Institut d’Electronique, de Microélectronique
et de Nanotechnologie
23 research groups
distributed in 5 research departments
The activity of the EPIPHY group is focused on the elaboration and characterization of materials and heterostructures for micro and optoelectronic applications as well as for fundamental studies. The core-activity centered on III-V semiconductor epitaxy has recently evolved towards nanostructure growth. Regarding 2D materials, after the development of graphene epitaxy (both on SiC and metals), heterostructure growth is now emerging (graphene/hBN, TMDCs). Finally the group has developed the synthesis of polymer-derived carbon materials for THz applications, which in the future will be directed towards the use of bio-sourced materials.
The NCM group is interested in the physics of nanostructures and nanodevices made of organic molecules and/or hybrid systems involving organic molecules and inorganic nanostructures. NCM contributes to knowledge development, studying the fundamental electronic and transport properties of various molecular devices based on self-assembled monolayers, small ensemble of molecules, supramolecular assembly of molecules and nano-objects. We develop/study new devices for molecular-scale electronics and organic electronics.
The Physics group studies thin layers, hetero- and periodic structures, individual or assemblies of biomolecules and of 0D/1D/2D materials of high interest for technological breakthroughs in electronics, optics, acoustics, opto-electronics and nanotechnology. Physics group combines theoretical and experimental research in several directions: structure and dynamical properties of materials; transport, optoelectronic properties and theoretical studies of semiconductor nanostructures; phononics/phoXonics, plasmonics, and nano-acoustics in micro and nanostuctured materials
The activity of the BioMEMS group is based on a multidisciplinary expertise dedicated to advanced technological solutions for biosensors, microfluidics for handling and studying bio species, solutions to control surface wettability, bio-printing, biomimetic system for Lab / tumor / organ on-chip development and micro-technology for thermal comfort.
NANOBIOINTERFACES (NBI) GROUP
The aim of the NBI research program is to exploit the physico-chemical properties of metallic and semiconductor nanostructures, to take advantage of controlled surface chemistry, and surface analysis to design functional materials for potential applications in various fields, including biosensors, nano-medicine, environment and energy storage.
Micro and nanosystems group (NAM6) develops MEMS and NEMS, from fundamental building blocks to sensors prototypes and technological readiness levels above 4. NAM6 is strongly involved in cleanroom processes, developping new fabrication steps and full integration loops to explore out-of beaten paths devices. The group also designs and characterize most of the fabricated devices that include resonators, force probes for AFM, inertials MEMS. We have pionnered the use of GaN/Si for novel MEMS intending to work in harsh environments. Moreover, the group works on instrumentation beyond the limits by combining microwave measurements schemes to MEMS, NEMS and/or to near field setups.
The Group is focused on studies of static, quasi-static and dynamic critical and supercritical phenomena in the multi-physic fields of functional electronics, acoustics and fluidics. The activity extends from fundamental research on specific features of coupled nonlinear systems and instabilities, to development of new concepts and disruptive solutions for applications and transfer. This concerns: New paradigms for collecting, transmitting and processing of information, Functional electronics and theragnostics, Functional micro-fluidics & interface dynamics.
The objectives of the MITEC group, which stands for « Microtechnology and Instrumentation for Thermal and Electromagnetic Characterization », are to carry out both basic and applied research in the fields of microwave characterization and thermoelectric microsensors and microgenerators. The realization of devices or instruments is targeted in the two research activities.
The main goals of MAMINA group (Matériaux et Acoustique pour les MIcro et NAno systèmes intégrés) is to develop transducing materials (thin films, polymers and composite materials) using electroactive and piezoelectric effects for micro and nano devices. Starting from these active materials development to their integration, MAMINA Group innovates for different applications : high frequency acoustic detection and interface characterizations (until micro and nanoscales), energy harvesting or storage, and also local actuation, in the case of bioinspired microsystems , or for handling in acoustic Lab-on-chips.
In the Microwave Power Devices group (PUISSANCE) at IEMN, the main objectives consist to design, fabricate and characterize active devices such as GaN HEMTs, diodes and characterize SiGe HBTs from ST Microelectronics which constitute attractive components to develop circuits operating in millimeter and THz bandwidths. These components are based on new technological steps well suited for small device dimensions and new physical concepts. For the characterization, fully integrated benches are developed for THz demonstrator measurement. The applications are the power amplification, mixer, detectors, THz sources… dedicated to telecommunications, military applications, imagery…
Advanced NanOmeter DEvices (ANODE) Group focuses on nanometric Silicon (Si) and III-V narrow-bandgap based Devices. This involves process development, device fabrication, DC/HF characterizations to extract figure-of-merits. From applications point of view, ANODE interest is low power, low noise devices or functions operating from microwave to THz. These activities are full part of the three main research theme of IEMN (Nanocharacterization, Flexible Electronics and μ-Energy).
The research activity of CARBON focus on developing novel electronics devices, based on low dimensional materials such as carbon nanotubes, graphene and related 2D layered materials (Transition Metal Dichalcogenide (TMD) materials and others) . CARBON group combines several technological processes to design and fabricate devices and circuits for high frequency electronics/optoelectronics applications.
The main objective of research performed in DOME group (standing for Dispositifs Opto- et Micro- Electronique quantiques) is to apply the electromagnetic artificial material technology (metamaterial, Photonic Crystal and plasmonics) to the design of innovative devices, aimed at operating in a broad part of the electromagnetic spectrum.
Silicon Microelectronics Group
The activity of the Silicon Microelectronics group covers three complementary fields of research ranging from device to systems with deep connections to industrial R&D (ST-IEMN common laboratory), high-risk research topics (ERC UPTEG) and deep commitment in advanced processing platforms (EQUIPEX LEAF).
The three specific research activities deal with i) Silicon-based thermoelectric micro-sources, ii) Smart packaging and integration and iii) Digital RF and mmW circuits for communication systems.
The OPTOelectronic group has long-time activity in the design, technological fabrication and characterization of optoelectronic, integrated photonic and acousto-optic devices. A more recent activity concerns photonics sensors that are shared between photovoltaic and biosensors. Optoelectronic and integrated photonic devices focus on components for high speed optical analog-to-digital converters. Acousto-optic activity deals with the modulation, deflection and filtering functions in a mixed fibre and free-space optics domain. Photovoltaics targets mainly thin film deposition of materials for inorganic cell fabrication. Bio-sensors are based on surface plasmon resonance principle and focus on agro-food applications.
SILPHYDE group research activity is devoted to physical simulation of electronic and optoelectronic devices. The objective is to develop models based on fundamental physical properties and to implement them into simulation tools relevant for realistic devices of practical interest. SILPHYDE areas of interest and expertise cover a wide spectrum ranging from basic physics of materials, semiconductors or ferroelectrics, used in electronics and optoelectronics to the realistic modeling of devices or even small circuits
Main objectives focus on new devices for terahertz (THz) waves: sources, detectors, transmission lines and antennas. The group is working also on new applications of THz waves for spectroscopy, telecommunications, imagery and near-field microscopy. The THz Photonics group was created 01/01/2012. Before this date the members of the group were members of a team of the EPIPHY group.
The CSAM group mainly develops a multidisciplinary work towards energy autonomous microwave and millimeter wave smart microsystems and wireless sensor networks. To reach its goals, the group develops 4 main activities: link reliability, localization and communication; circuits and systems architectures; power sources: energy storage and energy scavenging micro-devices; 3D heterogeneous integration
The COMNUM Group research activities aim to develop innovative signal processing techniques to conceive physical layers and receivers for wired and wireless digital communication systems. The objective is to propose efficient waveforms, new coding and modulation techniques, adapted receivers and real time signal processing units. The activities of the group are focused on digital communications and radiofrequency systems for Transport Systems.
The research activities carried out in the TELICE group mainly apply to communication in transportation systems where the required bit rate, but also reliability of the link and electromagnetic compatibility (EMC) constraints must be satisfied. Three mains topics are investigated: vehicle to ground communications, in-vehicle power line communication (PLC) and network health monitoring, and susceptibility of communication to interference.
Based on its expertise on phononic crystals and metamaterials, transduction, and numerical methods, the Acoustics group develops research activities on the study of fundamental and peculiar acoustical phenomena, involving multiphysical, linear and non linear effects, associated to wave generation and propagation in complex media; and the application of these unusual phenomena in devices for sonar, acoustic imaging, telecommunications, audible and environmental acoustics.
The acoustics and ultrasound research activities of the TPIA Group concern the field of physical acoustics. The main TZobjectives are to understand the interactions of ultrasonic waves with matter, propose different methods of analysis (inverse problems) adapted to monitoring structure integrity and material properties, model the behaviour of ultrasonic sources and their interactions with materials and develop tools for the optimal design of systems.
WIND is a research group focused on the development of wide bandgap devices for high frequency applications and high-power energy conversion. The materials of interest include GaN, SiC but also ultra-wide bandgaps (beyond GaN & SiC) such as AlGaN-based alloys, AlN or Ga2O3. Our activities cover the device design and simulation as well as advanced processing and characterization. GaN and related alloys (AlN, InN and its alloys) are a game-changer in the electronic device field. In addition to this, its large bandgap delivers high breakdown voltage and high operating temperature. The properties of these basic materials make them the ideal candidates for electronic devices.