The MicroNanofabrication platform covers 1600m² of ISO6 certified clean room and an additional 260m² dedicated to the back-end. The plant has a wide range of equipment from the basics of the semiconductor industry to state-of-the-art micro-nanofabrication equipment.
An equipment listing is available here. A description of the major equipment is available here.
Historically designed for the development of components mainly in the field of electronics, the IEMN's clean room has today acquired a reputation of a different scale: a state-of-the-art multidisciplinary platform for the fabrication of advanced components and systems in various fields such as bioMEMs, photonics or acoustics. With a team of about twenty qualified engineers and technicians working in close collaboration with researchers, PhD and post-doctoral students, the facility allows to explore the most ambitious projects offered by micro and nanotechnologies.
The main mission of the CMNF is to be the technological support for the Institute's research teams. In addition, projects from outside the IEMN can be supported via a project reception cell thanks to the RENATECH network(national network of large micro-nanofabrication power plants) of which the IEMN is an active member.
The CMNF thus aims to remain at the forefront of technology and to put its infrastructure and expertise at the service of the laboratory's projects but also of external companies and institutions.
In order to carry out all the technological projects, about 200 projects per year, the technology center is managed by a technical team of about twenty engineers and cleanroom technicians. The Micro Nano Manufacturing center is organized around major areas of expertise: Growth and deposition of thin films, Lithography, Etching, Process characterization, Integration-Assembly-Packaging, Thermal treatments-Ion implantation or BioMicrofluidics.
Most of the plant's equipment is accessible to all users with authorization. Only some very sensitive equipment is restricted, due to its complex handling or the associated risks.
There is also a project reception unit, a relay of the Renatech network internally, which allows the technical team to request the realization of technological bricks or a complete technological process (component, micro-object, characterization...).
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Bertrand GRIMBERT, Head of Centrale de Micro Nano Fabrication CMNF
+33 (0)3 20 19 78 43
bertrand.grimbert@univ-lille.fr
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