Dual Beam Microscopy

Contact: David TROADEC

Fei Strata DB 235

Characteristics

Electron column (SEM) :

• Electron source: Field effect gun (FEG)
• Accelerated voltage : from 200V to 30kV
• Scanning resolution (SEM) : 3nm
• Transmission resolution (STEM) : 2nm

Ion column (FIB) :

• Ion source : Gallium liquid metal ion source (LMIS Ga+)
• Accelerated voltage : from 5kV to 30kV
• Current intensity : from 1pA to 20nA
• FIB resolution : 7nm

Detectors :

• CDEM : for secondary electron and ion images.
• SED : for secondary electron images.
• In-lens : for secondary and retrodifused electron images.
• STEM : for transmission electron images.

stage:

• 5 axes motorized eucentric stage : X,Y,Z translation, rotation et tilt.

Gaz injectors :

• Metal deposition : Platinum and Tungsten
• Insulator etching (XeF2) : SiO2, Organic, …

Internal and external micromanipulators :

• lift-out TEM preparation,
• manipulate particles on sample,
• I=f(V) characterization, ….

CCD camera to observe samples in the SEM vacuum chamber