Topography Morphology
The IEMN's micro and nano fabrication center has many surface characterization tools to check the validity of a process during fabrication.
The IEMN's micro and nano fabrication center has many surface characterization tools to check the validity of a process during fabrication.
- 3-dimensional representation with possibility of image reconstruction (stitching) on large objects (study of morphology or topography by AFM, Fogale,...)
Surface roughness measurement (RMS, Ra, ...)
- Thickness measurements of semi-transparent materials by reflectometry and ellipsometry.
All these tools are located in a clean room and are freely accessible after training by an engineer from the plant