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      • Engraving and implantation pole
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PLATEFORME : CENTRALE DE MICRO NANO FABRICATION
PLATEFORME : CENTRALE DE MICRO NANO FABRICATION
PLATEFORME : CENTRALE DE MICRO NANO FABRICATION
PLATEFORME : CENTRALE DE MICRO NANO FABRICATION

Members

ORCID François VAURETTE,

Head of the Micro Nano Manufacturing Centre CMNF
+33 (0)3 20 19 79 79
francois.vauretteuniv-lille.fr

ORCID Isabelle ROCH-JEUNE

Deposition Manager
+33 (0)3 20 19 79 79 – Bur. 006
isabelle.roch-jeuneuniv-lille.fr

ORCID Chiara CRIVELLO 

+33 (0)3 20 19 79 79
chiara.crivellouniv-lille.fr

Marc DEWITTE

Physical deposits, characterisation
+33 (0)3 20 19 79 79
marc.dewitteuniv-lille.fr

ORCID David GUERIN

Organic chemistry
+33 (0)3 20 19 79 79
david.guerinuniv-lille.fr

ORCID Carlos MONCASI LUQUE 

+33 (0)3 20 19 79 79

ORCID Christophe COINON

Epitaxy Manager 

+33 (0)3 20 19 78 37
christophe.coinon@univ-lille.fr

ORCID Dmitri YAREKHA

Manager 

+33 (0)3 20 19 79 79
dmitri.yarekhauniv-lille.fr

Timothey BERTRAND

Engraving (RIE/ICP)
+33 (0)3 20 19 79 79
timothey.bertrandiemn.fr

Laurent FUGERE

Implanter, engraving
+33 (0)3 20 19 79 79
laurent.fugereuniv-lille.fr

Jean HOUPIN

Engraving
+33 (0)3 20 19 79 79
jean.houpiniemn.fr

ORCID David TROADEC

FIB
+33 (0)3 20 19 79 79
david.troadecuniv-lille.fr

ORCID Yves DEBLOCK 

Manager
+33 (0)3 20 19 79 79
yves.deblockiemn.fr

ORCID Christophe BOYAVAL

Characterization
+33 (0)3 20 19 79 79
christophe.boyavaluniv-lille.fr

James ELEGBE 

Bur. 003
+33 (0)3 20 19 79 79

Saliha OUENDI

Lithography
+33 (0)3 20 19 79 79
saliha.ouendiuniv-lille.fr

Pascal TILMANT

Lithography
+33 (0)3 20 19 79 79
pascal.tilmantuniv-lille.fr

ORCID Christophe BOYAVAL

Manager
+33 (0)3 20 19 79 79
christophe.boyavaluniv-lille.fr

ORCID Flavie BRAUD

Integration Assembly Packaging
+33 (0)3 20 19 79 79
flavie.brauduniv-lille.fr

ORCID Christophe COINON

Head of materials growth and advanced characterisation
+33 (0)3 20 19 79 79
christophe.coinonuniv-lille.fr

ORCID Yves DEBLOCK

Head of Lithography and Characterisation
+33 (0)3 20 19 79 79
yves.deblockuniv-lille.fr

Marc DEWITTE

Physical deposits, characterisation
+33 (0)3 20 19 79 79
marc.dewitteuniv-lille.fr

ORCID David GUERIN

Organic chemistry
+33 (0)3 20 19 79 79
david.guerinuniv-lille.fr

ORCID Aude SIVERY

Bio Micro Fluidics

+33 (0)3 20 19 79 79
aude.siveryuniv-lille.fr

Marvin SAVANXAYADEH 

+33 (0)3 20 19 79 79

marvin.savanxayadehiemn.fr

ORCID Flavie BRAUD

Head of Packaging

+33 (0)3 20 19 79 79
flavie.brauduniv-lille.fr

ORCID Christophe BOYAVAL

+33 (0)3 20 19 79 79
christophe.boyavaluniv-lille.fr

ORCID Elisabeth GALOPIN 

Renatech Internal projects – Renatech tools

 +33 (0)3 20 19 79 79
elisabeth.galopinuniv-lille.fr

ORCID Karine BLARY

Process engineer – Renatech external Projects

+33 (0)3 20 19 79 79
karine.blaryuniv-lille.fr

  • CMNF - Micro and Nano Fabrication Center
    • CMNF Staff
    • Deposits and epitaxy division
      • Chemical Vapour Deposition (CVD)
      • Physical Vapour Deposition (PVD)
      • Inkjet printing
      • Heat tratments
      • Chemical synthesis and surface functionalisation
      • Epitaxial growth
    • Lithography Unit
      • Electronic Lithography
      • Optic Lithography
      • 2D laser lithography
      • Collage
    • Engraving and implantation pole
      • Etching and plasma treatment
      • Deep etching of silicon
      • Chemical vapor etching
      • Ion beam etching
      • Focused Ion Beam
      • Ion implantation
      • Wet etching and surface preparation
    • In Line Analysis Unit
      • Structural characterizations
      • Electrical properties
      • Propriétés optiques et spectroscopies
      • Microscopy Topography Morphology
      • Faisceau / beam
    • Soft Lithography and Bio Microfluidics
      • Soft lithography
      • BioMicroFluidics
    • Packaging Division
      • Shaping chips and wafers
      • Component assembly
      • Precision machining
  • PCMP - Multi-Physics Characterization Platform
    • PCMP Staff
    • Scanning Probe Microscopy Facility
      • Air Domain
      • UHV domain
    • Hyperfrequency, Optical and Photonic Characterization (CHOP)
      • Spectroscopy
      • Static - Small signal - Noise
      • Power
      • Nano characterisation
      • MEMS
      • Microwave photonics
      • Millimetre and THz
      • Temperature measurements
    • Characterisation of COMmunicating Systems and Prototyping cluster (SigmaCOM)
      • Analog and digital communication systems
        • Energy efficiency test bench
        • Multifunctional analogue and digital I/O devices
        • Software-defined radio
        • Telecom test bench
      • Optical communication systems
      • Prototypage (SigmaCom – C2EM)
        • Design Modelling
        • Programming
        • Achievements
        • Tests & Measurements
    • Characterisation, ElectroMagnetic Compatibility and Prototyping Centre (C2EM)
      • Anechoic chamber
      • TEM cell
      • Reverberation chamber with mode mixing
      • MaMIMOSA
      • Measurement Zt
  • Services offered by our platforms
    • Prestations du pôle Bio Micro Fluidique – CMNF
    • Services of the CMNF platform
    • Cellule d’accueil projets Renatech
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Cité Scientifique
Avenue Henri Poincaré
CS 60069
59 652 Villeneuve d'Ascq Cedex, France
Tel : 03 20 19 79 79
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