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CHOP : PÔLE CARACTERISATION HYPERFREQUENCE, OPTIQUE ET PHOTONIQUE
Slide thumbnailCHOP : PÔLE CARACTERISATION HYPERFREQUENCE, OPTIQUE ET PHOTONIQUE
CHOP : PÔLE CARACTERISATION HYPERFREQUENCE, OPTIQUE ET PHOTONIQUE

Nano characterisation

MIR-THz microscopy and characterisation

The SNOM MIR-THz is a near-field optical measurement bench for acquiring images in the mid-infrared and terahertz ranges respectively, with a spatial resolution of the order of 30 nm (limited by the size of the AFM tip). Two laser sources are currently available for this purpose: a quantum cascade laser at 10µm and a THz molecular laser pumped by a CO2 laser.

This technique is well suited to the qualitative study of 2D materials such as graphene, molecular electronic nanostructures, doped materials (even if only slightly) and the study of waveguides induced by laser inscription in glass.

This equipment was acquired and developed as part of the Equipex Excelsior project.

Contact:

jean-francois.lampin@univ-lille.fr
 Tel : 03 20 19 79 11
sophie.eliet@univ-lille.fr
 Tel : 03 20 19 79 30

Microwave microscopy (MMS)

Microwave scanning microscopy is a scanning probe technique. It is based on an AFM technique coupled to a VNA (Vector Network Analyzer).
The probe is specially designed for this type of measurement and is integrated into a special holder with RF connectors.
There are 2 types of MMS in the CHOP division:

  • model 3600 LS Keysight, up to 12 GHz
  • under vacuum, a home-made system integrated into a Tescan scanning electron microscope, up to 67 GHz
Applications

The technique is based on AFM but develops a specific electrical contact mode at microwave frequencies (2-67 GHz) that enables the surfaces of materials or devices to be mapped at the nanometric scale for microwave topography and reflectivity. The sample must be compatible with AFM topography measurements.

SMM in the SEM illustration

Example: SMM in the SEM illustration

Contact:

Didier Theron
 
Kamel Haddadi
Sophie Eliet

  • CMNF - Micro and Nano Fabrication Center
    • CMNF Staff
    • Deposits and epitaxy division
      • Chemical Vapour Deposition (CVD)
      • Physical Vapour Deposition (PVD)
      • Inkjet printing
      • Heat tratments
      • Chemical synthesis and surface functionalisation
      • Epitaxial growth
    • Lithography Unit
      • Electronic Lithography
      • Optic Lithography
      • 2D laser lithography
      • Collage
    • Engraving and implantation pole
      • Etching and plasma treatment
      • Deep etching of silicon
      • Chemical vapor etching
      • Ion beam etching
      • Focused Ion Beam
      • Ion implantation
      • Wet etching and surface preparation
    • In Line Analysis Unit
      • Structural characterizations
      • Electrical properties
      • Propriétés optiques et spectroscopies
      • Microscopy Topography Morphology
      • Faisceau / beam
    • Soft Lithography and Bio Microfluidics
      • Soft lithography
      • BioMicroFluidics
    • Packaging Division
      • Shaping chips and wafers
      • Component assembly
      • Precision machining
  • PCMP - Multi-Physics Characterization Platform
    • PCMP Staff
    • Scanning Probe Microscopy Facility
      • Air Domain
      • UHV domain
    • Hyperfrequency, Optical and Photonic Characterization (CHOP)
      • Spectroscopy
      • Static - Small signal - Noise
      • Power
      • Nano characterisation
      • MEMS
      • Microwave photonics
      • Millimetre and THz
      • Temperature measurements
    • Characterisation of COMmunicating Systems and Prototyping cluster (SigmaCOM)
      • Analog and digital communication systems
        • Energy efficiency test bench
        • Multifunctional analogue and digital I/O devices
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      • Optical communication systems
      • Prototypage (SigmaCom – C2EM)
        • Design Modelling
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        • Tests & Measurements
    • Characterisation, ElectroMagnetic Compatibility and Prototyping Centre (C2EM)
      • Anechoic chamber
      • TEM cell
      • Reverberation chamber with mode mixing
      • MaMIMOSA
      • Measurement Zt
  • Services offered by our platforms
    • services of the Bio Micro Fluidic platform
    • Services of the CMNF platform
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Cité Scientifique
Avenue Henri Poincaré
CS 60069
59 652 Villeneuve d'Ascq Cedex, France
Tel : 03 20 19 79 79
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