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Chemical Vapor Deposition
Physical deposits under vacuum
Alternative deposits & heat treatments
Deposition of organic thin films
Epitaxie
The micro-nanofabrication facility offers a wide range of thin-film deposition techniques to cover a wide variety of material properties. For several years, we have capitalized on our know-how in many fields such as :
- deposits of materials for energy in atomic or thin conformal layers
- silicon technology using thermal or low temperature deposition processes
- multilayers of magnetic and multi-ferroic nanostructured materials
- organic deposits for biosystems or organic and molecular electronics
_ electrochemical thickenings
- metal deposits used for contact the active layers components of several dies (Si, III/V, III/N)
- growth and integration of monolayer or multilayer graphene in components
- localized deposits in direct writing by inkjet printing on flexible material
These activities are based on a set of techniques grouped into 4 areas: chemical vapor deposition, physical vacuum deposition, organic thin film deposition and electrochemical deposition and inkjet printing.
Contact:
Isabelle ROCH
Head
Christophe COINON
Head