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PLATEFORME : CENTRALE DE MICRO NANO FABRICATION
Slide thumbnailPLATEFORME : CENTRALE DE MICRO NANO FABRICATION
PLATEFORME : CENTRALE DE MICRO NANO FABRICATION
PLATEFORME : CENTRALE DE MICRO NANO FABRICATION

Lithography Unit

Electronic Lithography

Optic Lithography

2D laser lithography

Le site internet: Collage

Collage

The lithography resource represents a pillar in the manufacturing technology of many components manufactured at the IEMN and is therefore in constant interaction with the other resources of the plant. It is composed of a complete set of equipment spread over 3 rooms. A room with inactinic light allows preparation, coating, annealing and development. A second room allows optical exposure (UV or deepUV) linked to bonding (thermocompression or anodization) and laser lithography. One room is dedicated to electronic lithography.

Six spinners with specific solvent routing allow the coating of a panel of more than 50 variants of optical or electronic resins obtained by dilution or distillation. The latter allow the realization of micron to submicron patterns (UV, laser) and up to 10nm in electronic lithography. Specific annealing processes (programmed ramps, proximity annealing) are also used to control the stresses or adhesion of the resins. The equipment can process substrates ranging from 4-5 mm to 4 inches in a wide range of materials (metals, semiconductors, glass, polymers, flexible substrates, ceramics...).

The lithography team has set up and shared standard processes and continues to explore new resins or specific processes to unlock technological locks. The vast majority of the resource is available for free access after an appropriate training.

Contact Us :

Yves Deblock
Head

yves.deblock@iemn.fr

  • CMNF - Micro and Nano Fabrication Center
    • CMNF Staff
    • Deposits and epitaxy division
      • Chemical Vapour Deposition (CVD)
      • Physical Vapour Deposition (PVD)
      • Inkjet printing
      • Heat tratments
      • Chemical synthesis and surface functionalisation
      • Epitaxial growth
    • Lithography Unit
      • Electronic Lithography
      • Optic Lithography
      • 2D laser lithography
      • Collage
    • Engraving and implantation pole
      • Etching and plasma treatment
      • Deep etching of silicon
      • Chemical vapor etching
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      • Focused Ion Beam
      • Ion implantation
      • Wet etching and surface preparation
    • In Line Analysis Unit
      • Structural characterizations
      • Electrical properties
      • Propriétés optiques et spectroscopies
      • Microscopy Topography Morphology
      • Faisceau / beam
    • Soft Lithography and Bio Microfluidics
      • Soft lithography
      • BioMicroFluidics
    • Packaging Division
      • Shaping chips and wafers
      • Component assembly
      • Precision machining
  • PCMP - Multi-Physics Characterization Platform
    • PCMP Staff
    • Scanning Probe Microscopy Facility
      • Air Domain
      • UHV domain
    • Hyperfrequency, Optical and Photonic Characterization (CHOP)
      • Spectroscopy
      • Static - Small signal - Noise
      • Power
      • Nano characterisation
      • MEMS
      • Microwave photonics
      • Millimetre and THz
      • Temperature measurements
    • Characterisation of COMmunicating Systems and Prototyping cluster (SigmaCOM)
      • Analog and digital communication systems
        • Energy efficiency test bench
        • Multifunctional analogue and digital I/O devices
        • Software-defined radio
        • Telecom test bench
      • Optical communication systems
      • Prototypage (SigmaCom – C2EM)
        • Design Modelling
        • Programming
        • Achievements
        • Tests & Measurements
    • Characterisation, ElectroMagnetic Compatibility and Prototyping Centre (C2EM)
      • Anechoic chamber
      • TEM cell
      • Reverberation chamber with mode mixing
      • MaMIMOSA
      • Measurement Zt
  • Services offered by our platforms
    • services of the Bio Micro Fluidic platform
    • Services of the CMNF platform
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Cité Scientifique
Avenue Henri Poincaré
CS 60069
59 652 Villeneuve d'Ascq Cedex, France
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