CSAM Group: Energy micro-storage devices for connected objects
The axis micro energy storage devices for connected objects a highlighted new approaches to the production of micro-supercapacitors and new-generation micro-batteries (all-solid state) with unprecedented storage capacities. The group is drawing on the technological resources of the IEMN to develop new materials in thin-film technologies that will be incorporated into micro energy storage devices manufactured in clean rooms. The group has expertise in the development of porous materials based on binary transition metal nitride acting as electrodes. The results have been published in leading journals, and a start-up has been set up to exploit this technology. This fast-growing area of research is part of the RS2E (Réseau sur le stockage électrochimique de l'énergie), the PEPR Batteries, and is working with leading players in France and abroad (UCLA).
Developing new materials for energy storage and micro-storage
The group is drawing on the technological resources of the IEMN to develop new materials in thin-film technologies that will be integrated into energy storage micro-devices manufactured in clean rooms. The group has expertise in the development of porous materials based on binary transition metal nitride (VN, W2N, Mo2N, RuN, TiN, NbN, etc.) acting as electrodes for micro-supercapacitors. To increase storage performance, one approach we have chosen is to develop multi-cationic thin films (ternary, quaternary and quinary transition nitride) by magnetron sputtering in planar or confocal mode. In order to obtain an electrode in which 2 cations are electroactive, we will alternate nanometric layers of binary thin films ('nanolaminate' approach) in which we will co-sputter the two metals simultaneously under Ar/N2/O2. The confocal mode approach makes it possible to implement a combinatorial approach that can scan a large number of different compositions/phases. To achieve this optimisation, we will be using a sputtering frame with several confocal sources, which will enable us to obtain a chemical composition gradient on a complete 4-inch wafer. Using multi-technique mapping tools (structural, chemical, mechanical, electrical, electrochemical, etc.), we will be able to trace the composition and structure of the deposit at wafer scale.
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| Illustration of deposition possibilities by alternating layers of varying thickness, either alternately (nano-laminate) or simultaneously. B) X-ray micro-fluorescence mapping showing a composition gradient. |
Micro super-capacitors
