The Micro and Nano Systems (NAM6) group is developing expertise in internationally renowned for many years, mainly in the field of micro-actuation, micro-sensors, resonant devices and transduction principles. The main objective of the NAM6 group is to address challenges to establish a new state of the art in the field of micro- and nano-electromechanical systems (MEMS and NEMS) by pursuing a three-pronged strategy:

1. benefit from the synergy between the skills and know-how of the group members and the IEMN environment in applied physics, electronic components, scientific instrumentation, modeling, technological processes, micro-nano-fabrication, and electrical characterization
2. define research orientations and objectives based on a pragmatic balance between technological and scientific considerations and application issues;
3. address research themes ranging from fundamental understanding and physical modeling, to device fabrication and evaluation, to system integration and potential technology transfer.

Using IEMN's clean room technology, micro- and nano-manufacturing and machining technologies were used to explore and convert the physical effects and properties of materials into devices and microsystems for applications.

Main topics :

1. Innovative Micro and Nanofabrication
2. Gallium Nitride MEMS
3. Probes for AFM microscopy based on MEMS with integrated transducers
4. Probes for multimodal measurements
5. Instrumentation combining RF, MEMS and near field
6. MEMS formicrowave optomechanics