The Micro and Nano Systems (NAM6) group is developing expertise in internationally renowned for many years, mainly in the field of micro-actuation, micro-sensors, resonant devices and transduction principles. The main objective of the NAM6 group is to address challenges to establish a new state of the art in the field of micro- and nano-electromechanical systems (MEMS and NEMS) by pursuing a three-pronged strategy:
- benefit from the synergy between the skills and know-how of the group members and the IEMN environment in applied physics, electronic components, scientific instrumentation, modeling, technological processes, micro-nano-fabrication, and electrical characterization
- define research orientations and objectives based on a pragmatic balance between technological and scientific considerations and application issues;
- address research themes ranging from fundamental understanding and physical modeling, to device fabrication and evaluation, to system integration and potential technology transfer.
Using IEMN's clean room technology, micro- and nano-manufacturing and machining technologies were used to explore and convert the physical effects and properties of materials into devices and microsystems for applications.
Main topics :
- Innovative Micro and Nanofabrication
- Gallium Nitride MEMS
- Probes for AFM microscopy based on MEMS with integrated transducers
- Probes for multimodal measurements
- Instrumentation combining RF, MEMS and near field
- MEMS formicrowave optomechanics