MAMINA : Matériaux et Acoustique pour les MIcro et NAno systèmes intégrés
D. Callens-Debavelaere (MC), P. Campistron (MC), J. Carlier (MC- HDR, Head), E. Cattan (Pr), S. Grondel (Pr, F. Lefebvre (MC), G. Nassar (MC-HDR), B. Nongaillard (Pr), F. Ponchel (MC, >2013), D. Remiens (Pr), C. Soyer (MC).
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The main goal of MAMINA group (Matériaux et Acoustique pour les MIcro et NAnosystèmes intégrés) is to develop transducer materials (thin films, polymers and composite materials) using electroactive and piezoelectric effects for the realization of micro and nano devices. Starting from these active materials development to their integration, MAMINA Group innovates in terms of the proposed applications: high frequency acoustic for detection, interface and complex media characterizations (until micro and nanoscales), energy harvesting or storage, but also local actuation, in the case of bioinspired microsystems, or for handling in acoustic Lab-on-chips.
The research on electroactive functional materials has been focused on different electroactive materials: ferroelectric materials for rf tunable devices (growth of BST and doped BST), PST, BZN and hetero structures BST/BZN ; anti ferroelectric materials (PZ) for energy storage ; artificial ferroic materials for which we change the permeability with an applied electric field (opportunity for future integration in MMIC circuits).
Bulk composite materials (ceramic/polymer) and polymer transducers have also been developed to induce flexibility. New transducer materials based on conductive polymers and interpenetrating polymer networks were for the first time integrated at micrometer scale into flexible microstructures.
These materials developments are dedicated to applications in numerous domains: energy, health, transport… like storage and energy harvesting or acoustic transducers (sensors and actuators) with pMUT technology.
One example of system developed in the group is a bioinspired nanoaerial vehicle (OVMI). The objective of this topic is to make a tethered object of the insect size capable of hovering while embarking the electronics and a payload like an on-board micro-camera. This work is based on the original concept of combination in phase quadrature of the flapping (stroke angle) and twisting (angle of attack) vibratory modes of wings to reproduce insect wings kinematics and generate lift. In the light of this challenge, a polymeric prototype was micromachined with a wingspan of 3 cm, flexible wings and a single actuator.
Another application concerns the integration of high frequency piezoelectric transducers for interface and complex media characterization but also for local actuation thanks to acoustic waves (until GHz range). It made it possible to develop acoustic methods to characterize interfaces at micro and nanoscales. As an example, we demonstrated the possibility to evaluate the critical surface tension of a liquid for which wetting occurs depending in nanostructures. This method has been developed in collaboration with STMicroelectronics. We have also demonstrated the possibility to use these high frequency acoustic waves for microparticles detection and deflection in Lab-On-Chip. Increasing the power (30 dBm) made it also possible to create very local micromixing or deflection in the microchannels.