Dual Beam Microscopy

Contact : David TROADEC

Fei Strata DB 235

FEI STRATA DB 235

Characteristics
Electron column (SEM) :
  • Electron source: Field effect gun (FEG)
  • Accelerated voltage : from 200V to 30kV
  • Scanning resolution (SEM) : 3nm
  • Transmission resolution (STEM) : 2nm
Ion column (FIB) :
  • Ion source : Gallium liquid metal ion source (LMIS Ga+)
  • Accelerated voltage : from 5kV to 30kV
  • Current intensity : from 1pA to 20nA
  • FIB resolution : 7nm
Detectors :
  • CDEM : for secondary electron and ion images.
  • SED : for secondary electron images.
  • In-lens : for secondary and retrodifused electron images.
  • STEM : for transmission electron images.
stage:
  • 5 axes motorized eucentric stage : X,Y,Z translation, rotation et tilt.
Gaz injectors :
  • Metal deposition : Platinum and Tungsten
  • Insulator etching (XeF2) : SiO2, Organic, …
Internal and external micromanipulators :
  • lift-out TEM preparation,
  • manipulate particles on sample,
  • I=f(V) characterization, ….
CCD camera to observe samples in the SEM vacuum chamber