Dual Beam Microscopy
Contact : David TROADEC
Fei Strata DB 235
Characteristics
Electron column (SEM) :
- Electron source: Field effect gun (FEG)
- Accelerated voltage : from 200V to 30kV
- Scanning resolution (SEM) : 3nm
- Transmission resolution (STEM) : 2nm
Ion column (FIB) :
- Ion source : Gallium liquid metal ion source (LMIS Ga+)
- Accelerated voltage : from 5kV to 30kV
- Current intensity : from 1pA to 20nA
- FIB resolution : 7nm
Detectors :
- CDEM : for secondary electron and ion images.
- SED : for secondary electron images.
- In-lens : for secondary and retrodifused electron images.
- STEM : for transmission electron images.
stage:
- 5 axes motorized eucentric stage : X,Y,Z translation, rotation et tilt.
Gaz injectors :
- Metal deposition : Platinum and Tungsten
- Insulator etching (XeF2) : SiO2, Organic, …
Internal and external micromanipulators :
- lift-out TEM preparation,
- manipulate particles on sample,
- I=f(V) characterization, ….
CCD camera to observe samples in the SEM vacuum chamber