Sputtered Titanium Carbide Thick Film for High Areal Energy on Chip Carbon-Based Micro-Supercapacitors
Manon Létiche, Kevin Brousse, Arnaud Demortière, Peihua Huang, Barbara Daffos,Sébastien Pinaud, Marc Respaud, Bruno Chaudret, Pascal Roussel, Lionel Buchaillot, Pierre Louis Taberna, Patrice Simon, and Christophe Lethien* The areal energy density of on-chip micro-supercapacitors should be improved in order to obtain autonomous smart miniaturized sensors. To reach this goal, high surface capacitance electrode (>100 mF […]





