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Optical litography

Contact:

Pascal Tilmant

Lithography

Mask aligner & bond aligner

Substrate bounder

Electron beam lithography
Optical litography
Package
Growth and deposition of thin layer
Etching
- Dry etching : Chemical
- #896 (no title)

Cité Scientifique
Avenue Henri Poincaré
CS 60069
59 652 Villeneuve d'Ascq Cedex, France

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