Thesis defence
Khadim DAFFE
Wednesday 20 December 2018 at 10.00 am
Institute of Electronics, Microelectronics and Nanotechnology (IEMN)
Jury:
- Gilles DAMBRINE (IEMN, thesis supervisor,
- Tan Phu VUONG (Grenoble INP, Rapporteur)
- Valérie MADRANGEAS (University of Limoges, Rapporteur)
- Virginie DEGARDIN (University of Lille, Examiner)
- Marina DENG (IMS Bordeaux, Examiner)
- Kamel HADDAHI (IEMN, Examiner)
Summary:
| With the spectacular development of nano-objects, it is necessary to develop means of sub-peak electrical characterisation adapted to small scales. In particular, two instrumental obstacles need to be overcome. On the one hand, the main difficulty in characterising nano-components is that they exhibit, in regime impedance values compared with conventional microwave measurement systems. On the other hand, there is a size discontinuity between nano-objects and conventional measurement systems. Given the scientific challenge and the relatively limited state of the art, several avenues have been explored together. Firstly, as part of a European project bringing together metrology players and the joint IEMN-STMicroelectonics® laboratory, the traceability of high-impedance measurements of nano-devices has been established. The second stage involved the development of new generations of GSG (Ground-Signal-Ground) probes in MEMS (Microelectromechanical Systems) technology, miniaturised and adapted to the size of nano-devices. The probes are mounted on a robotised nano-positioning platform integrated into a scanning electron microscope. An application relating to the electrical characterisation of indium arsenide nanowires is demonstrated. |
Abstract:
In the frame of the spectacular development of nano-objects, innovative on-wafer electrical measurement methods must be addressed at the nanoscale. In particular, two main issues have been identified. On one hand, nano-devices exhibit very high dynamic impedance in contrast with conventional measuring microwave instruments. On the other hand, there is an inherent size discontinuity between nano-objects and conventional measurement systems. Given the scientific challenge and a relatively limited state of the art, several avenues of investigation have been explored. First, as part of a European project bringing together metrology laboratories, and the joint laboratory IEMN-STMicroelectonics®, the traceability of nano-devices high impedance measurements is established. In a second step, the development of an electrical on-wafer measuring platform for nano-devices is described. This includes the development of new generations of GSG (Ground-Signal-Ground) miniaturized probes in MEMS (Microelectromechanical Systems) technology with reduced access pads. The probes are mounted on a robotic nano-positioning platform integrated in a scanning electron microscope. An application relating to the electrical characterization of indium arsenide nanowires is demonstrated.
