MEMS probe skate
Steve Arscott a récemment publié un article intitulé « Skate, overtravel, and contact force of tilted triangular cantilevers for microcantilever-based MEMS probe technologies » dans la revue Scientific Reports. Cet article propose un modèle évolutif décrivant la relation entre le patinage, la surcourse et la force de contact des sondes MEMS (MicroElectroMechanical Systems) basées sur des cantilevers de forme triangulaire en grande flexion (see figure).
The results should be useful to test engineers and MEMS probe designers involved in on-chip electrical testing. The work was carried out in anticipation of the ANR PRECISE project, which is conducted in collaboration with the University of Bordeaux, the University of Grenoble-Alpes and the MC2 company. The idea of the project is, among other things, to produce a new generation of MEMS-based electrical probes for high-frequency characterization on the chip.
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