Maxime Hallot, winner of the CNRS C’Nano 2020 thesis prize

Maxime Hallot, post-doctoral researcher at IEMN has just been rewarded for his research work on 3D Li-ion micro-batteries.

The aim of this work was to carry out the synthesis of thin layers of battery materials by PVD (Physical Vapor Deposition) and ALD (Atomic Layer Deposition). These deposits were carried out on planar silicon substrates but also on complex three-dimensional architectures as shown in the figure below. This particular architecture allows to deploy an exchange surface 50 to 80 times larger between the electrodes compared to an equivalent planar micro-battery. The final objective of this thesis work was to show the fabrication of 3D all-solid micro-batteries in Lithium-ion technology.

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Figure 1. A. Sectional view of a three-dimensional structure after deep etching (DRIE) of the silicon substrate with the Scanning Electron Microscope

B. Sectional view of the micro-batteries after the stacking of 6 successive layers by ALD on the 3D structure (Subs: Substrate, is: insulating layer, cc: current collector, E+ and E-: positive and negative electrodes and ES: Solid Électrolyte).