Jury:

• Christophe LETHIEN, MCF, University of Lille (Thesis supervisor)
• Marie Paule BESLAND, Director of Research, Institut des Matériaux Jean Rouxel UMR 6502 (Rapporteur)
• Thierry DJENIZIAN, Professor, University of Aix-Marseille, AMU (Rapporteur)
• Laurence CROGUENNEC, Research Director, Institute of Condensed Matter Chemistry, ICMCB, UMR 5026 (Examiner)
• Thierry BROUSSE, Professor, Jean Rouxel Materials Institute IMN UMR CNRS 6502 (Examiner)
• Pascal ROUSSEL, Research Director, Catalysis and Solid Chemistry Unit UMR 8181 (Examiner)

Summary:

Development of synthesis techniques (PVD, ALD) and thin-film characterisation (CP, CV, EIS, DRX, XRR, XPS, Raman) for the manufacture of all-solid-state micro-batteries on planar and three-dimensional Silicon substrates prepared by DRIE for the Internet of Things (IoT).

Abstract:

Development of thin-films by PVD and ALD for 2D and 3D all solid state microbatteries on Silion substrates for Internet of things (IoT). Thin films were characerized by structurals and electrochemicals techniques such as CV, CP, EIS, Raman, XPS, DRX, XRR...