MEMs characterization

 

Characterisation of micro-electro-mechanical systems (MEMS) - 1

 

We have a probe station dedicated to the characterization of Microsystems and Microelectromechanical systems in order to study the properties of micro-actuators and micro-sensors. The measured performance of these actuators are based on electrostatic effects, thermal effects and piezoelectric effects. A set-up which uses I/V amplifiers together with synchronized detection allows the treatment of signals from differential capactive micro-sensors and permits access to nanometric precision movement. Another important part of the characterization concerns the measurement of electromechanical micro-resonators working from KHz to GHz using synchronized detection at 2 M, an impedance meter (to 110 MHz) and network analyzers. In terms of the characterization of RF micro switches, the electromechanical characterization of the actuation part of the switch is coupled to the high frequency characterization due to the expertise mention above.

 

A sub-station is dedicated to the characterisation of microsystem devices in order to study the properties of micro-actuators and micro-sensors. The performance of actuators based on electrostatic, thermal or piezoelectric effects is routinely measured. A set-up using current/voltage amplifiers combined with synchronous detection is used to process signals from differential capacitive micro-sensors, giving access to microstructure displacements with nanometric precision. A large part of the activity concerns the characterisation of electromechanical micro-resonators in the range from a few hundred kHz to 1 GHz, and depending on the frequency, uses synchronous detection (2 MHz max), an impedance meter (110 MHz max) or network analysers. When characterising RF microswitches, electromechanical characterisation of the microswitch actuator is combined with microwave characterisation of the device using the characterisation methods described above - 2