Solid-source molecular beam epitaxy

The solid source molecular beam epitaxy chamber RIBER 21 TM has been delivered in 2004.

Available elements : solid arsenic (valved-cracker Riber VAC 500), solid phosphorus (valved-cracker Riber KPC 250), solid antimony (valved-cracker Veeco RB 200), gallium, aluminium, indium, silicon, carbon (CBr4 injector) and tellurium (GaTe source)
Rheed 15 KeV Staib type 15S, together with image recording capabilities and intensity oscillation measurements
Residual gas analyser: quad Hiden HALO 201 LC
Main pump : ionic pump 400 l/s
Secundary pump : CTI cryogenic pump
Liquid nitrogen continuous flow line Vacuum Barrier