Zn-IV-N2
Zn-IV-N2
Materials
Ternary ZnSnN2 and quaternaries ZnSn(Si or Ge)N2
Synthesis
Sputtering Alliance Concept cluster tool CT 200 -2 inch wafers – Room temperature – 10-2 mbar (PVD)
Mastering
Exploratory
Applications
Photovoltaïcs – absorber for Si solar tandem cells or contact layer for heterojunctionSi solar cells
Characterisation
SEM, AFM, EDS, resistivity, Hall Effect, XRD, UV-Vis, solar simulator
Partnership
CEA-LITEN, IJL, GeePs
Transition metal nitrides
Transition metal nitrides
Materials
VN, TiN, W2N, RuN
Synthesis
Sputtering Alliance Concept cluster tool CT 200 -3 inch wafers – Room temperatureto 500°C – 10-3 to 5.10-2 mbar
Mastering
Partial
Applications
Micro energy storage
Characterisation
AFM, DRX, XPS, TOF SIMS, SEM, electrical conductivity électrique, electrochemical properties
Partnership
RS2E, IMN, UCCS, CIRIMAT, ICGM
