Metallic multilayers
Metallic multilayers
Materials
Ferromagnetics, magnetoelastics
Fe, Co, FeCo, Ni, TbCo2, TbFe2 and associated multilayers
FePt, TbFeCo, FeGa
Synthesis
RF sputtering – leybold Z550 – 3 inch wafers – 2 inch homogeneity – Room temperature
– Ar pressure from 10-3 to 10-2mbar
Mastering
Complete for Fe, Co, FeCo, Ni, TbCo2, TbFe2
Partial for FePt, TbFeCo, FeGa
Applications
Magnetostriction, magnetotransport, magneto-optics, actuators, sensors, spintronics, THz
Characterisation
Profilometry, magnetometer, magnetostriction, magneto-optic measurements, TDS
Partnership
LIA LICS/LEMAC, CINTRA
Piezo and ferro electrics
Piezo and ferro electrics
Materials
Ferroelectrics, anti ferroelectrics, piezoelectrics, pyroelectrics, magnetics, shapememory materials, metallic oxides
Synthesis
Sputtering and hydrothermal -3 inch wafers – Room temperature to 650°C
Mastering
Complete for ZnO, PZT, PMN-PT, PZ, YIG/PZT, LiNbO3, NMG, BNT (piezo Pb free), ZnOnanowires
Partial for BNT-BT, and BT nanowires
Exploratory for KNN and ZnO/LiNbO3
Applications
Energy harvesting and storage, tunable RF devices, 5G filtering devices, acousticstransducers (pMUT), actuators, smart autonomous sensors
Characterisation
XRD
Partnership
CEA-LETI, ST Microelectronics (Grenoble and Tours),
3D-oxides, Nanovation, Véolia
Conducting oxides
Conducting oxides
Materials
Conducting transparent N type oxides (AZO)
Synthesis
Sputtering Alliance Concept cluster tool CT 200 -3 inch wafers – Room temperature – 10-2 mbar (PVD)
Mastering
Complete
Applications
Photovoltaïcs
Characterisation
Resistivity, Hall effect, UV-Vis
Partnership
Depending on the realization of the absorbant materials
