MEMS probe skate

Steve Arscott recently published a paper entitled « Skate, overtravel, and contact force of tilted triangular cantilevers for microcantilever-based MEMS probe technologies » in the journal Scientific Reports. The paper proposes a scalable model describing the relationship between skate, overtravel, and contact force of MEMS (MicroElectroMechanical Systems) probes based on tilted triangular cantilevers in large bending (see figure).

The results should be useful to test engineers and MEMS probe designers involved in on-chip electrical testing. The work was carried out in anticipation of the ANR PRECISE project, which is conducted in collaboration with the University of Bordeaux, the University of Grenoble-Alpes and the MC2 company. The idea of the project is, among other things, to produce a new generation of MEMS-based electrical probes for high-frequency characterization on the chip.

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