A dual reactor for growing semiconductors for ultra-high-speed telecommunications arrives at IEMN!
As part of the PEPR research investment plan for electronics, IEMN has acquired a dual epitaxy reactor for growing semiconductors that are essential for developing devices for very high-speed telecommunications and THz optoelectronics.
This new system, designed by RIBER, comprises two chambers connected under ultra-high vacuum, allowing both greater control over the properties of epitaxial III-V semiconductor layers and new opportunities for their integration on silicon or for the development of new functionalities based on selective growth at the nanometric scale.
As part of the PEPR Electronics program, and thanks to additional funding from the FEDER, IEMN’s Micro-Nanofabrication Centre has acquired a new dual molecular beam epitaxy reactor. This new system, developed by RIBER, consists of two growth chambers. The first, a C21-DZ type, is equipped with valve crackers as sources of phosphorus, arsenic and antimony, double filament cells for the effusion of III elements (In, Ga and Al), and sources of Si, beryllium and carbon for doping. An EZ Curve system will also measure substrate deflection during growth in order to accurately measure alloy stress and ensure precise composition.
Thanks to an ultra-high vacuum transfer module, this chamber is connected to a second C21-T epitaxy reactor, which is particularly well suited to surface preparation for growth thanks to its manipulator capable of reaching 1200°C and the presence of a RF plasma cell for the production of atomic hydrogen. This second reactor is also equipped with arsenic and antimony sources, indium, gallium and aluminum cells, and dopant sources, including an iron effusion cell for the development of ultra-fast photodetectors or insulating semiconductors.
Thanks to increased homogeneity and better control of alloy composition, this new reactor configuration will meet the epitaxy requirements of the T-REX6G and FUN-TERA projects under the PEPR Electronics program, while also offering new opportunities for the growth of innovative heterostructures and nanostructures for IEMN or to meet external demand within the RENATECH network.
Contact : Christophe.coinon
univ-lille.fr
Contact : ludovic.desplanque
univ-lille.fr





