Zn-IV-N2

Zn-IV-N2

Materials
Ternary ZnSnN2  and quaternaries ZnSn(Si or Ge)N2

Synthesis
Sputtering Alliance Concept cluster tool CT 200 -2  inch wafers – Room temperature – 10-2 mbar (PVD)

Mastering
Exploratory

Applications
Photovoltaïcs – absorber for Si solar tandem cells or contact layer for heterojunctionSi solar cells

Characterisation
SEM, AFM, EDS, resistivity, Hall Effect, XRD, UV-Vis, solar simulator

Partnership
CEA-LITEN, IJL, GeePs

Transition metal nitrides

Transition metal nitrides

Materials
VN, TiN, W2N, RuN

Synthesis
Sputtering Alliance Concept cluster tool CT 200 -3  inch wafers – Room temperatureto 500°C – 10-3  to 5.10-2 mbar

Mastering
Partial

Applications
Micro energy storage

Characterisation
AFM, DRX, XPS, TOF SIMS, SEM, electrical conductivity électrique, electrochemicalproperties

Partnership
RS2E, IMN, UCCS, CIRIMAT, ICGM