Dual Beam Microscopy

Contact :

Fei Strata DB 235

FEI STRATA DB 235

Characteristics

Electron column (SEM) :

  • Electron source: Field effect gun (FEG)
  • Accelerated voltage : from 200V to 30kV
  • Scanning resolution (SEM) : 3nm
  • Transmission resolution (STEM) : 2nm

 

Ion column (FIB) :

  • Ion source : Gallium liquid metal ion source (LMIS Ga+)
  • Accelerated voltage : from 5kV to 30kV
  • Current intensity : from 1pA to 20nA
  • FIB resolution : 7nm

 

Detectors :

  • CDEM : for secondary electron and ion images.
  • SED : for secondary electron images.
  • In-lens : for secondary and retrodifused electron images.
  • STEM : for transmission electron images.

 

stage:

  • 5 axes motorized eucentric stage : X,Y,Z translation, rotation et tilt.

 

Gaz injectors :

  • Metal deposition : Platinum and Tungsten
  • Insulator etching (XeF2) : SiO2, Organic, …

 

Internal and external micromanipulators :

  • lift-out TEM preparation,
  • manipulate particles on sample,
  • I=f(V) characterization, ….

 

CCD camera to observe samples in the SEM vacuum chamber