{"id":77719,"date":"2026-03-31T15:16:40","date_gmt":"2026-03-31T13:16:40","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=77719"},"modified":"2026-04-10T10:12:03","modified_gmt":"2026-04-10T08:12:03","slug":"ebeam","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/newsletter\/ebeam.html","title":{"rendered":"Nouvel \u00e9quipement de lithographie \u00e9lectronique de tr\u00e8s haut niveau\u00a0: l\u2019EBPG5200Plus (Raith)"},"content":{"rendered":"<div  class='flex_column av-2jm6i2u-6db82a5a37101b0d043b97a05049b8a3 av_one_full  avia-builder-el-0  el_before_av_hr  avia-builder-el-first  first flex_column_div'     ><section  class='av_textblock_section av-mkqp95a8-f971cffb14dfb0d93e2636346fbc3bab'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2 style=\"text-align: center;\"><strong>Nouvel \u00e9quipement de lithographie \u00e9lectronique de tr\u00e8s haut niveau\u00a0: l\u2019EBPG5200Plus (Raith)<\/strong><\/h2>\n<\/div><\/section><\/div>\n<div  class='hr av-294ctl2-052003d1dab071efe8c55ba0a37060d0 hr-default  avia-builder-el-2  el_after_av_one_full  el_before_av_one_half'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1or5i3q-819cb171864990a97ea8d7c3f6518194\">\n.flex_column.av-1or5i3q-819cb171864990a97ea8d7c3f6518194{\nborder-width:1px;\nborder-color:#eaeaea;\nborder-style:solid;\nborder-radius:15px 15px 15px 15px;\npadding:15px 15px 15px 15px;\n}\n<\/style>\n<div  class='flex_column av-1or5i3q-819cb171864990a97ea8d7c3f6518194 av_one_half  avia-builder-el-3  el_after_av_hr  el_before_av_one_half  first flex_column_div'     ><section  class='av_textblock_section av-mkqpap7e-5667cf1b5442744673c695d7a157d1fd'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3 style=\"line-height: 20pt; text-align: left;\"><strong>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5\">\n.av_font_icon.av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5{\ncolor:#f16728;\nborder-color:#f16728;\n}\n.av_font_icon.av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5 .av-icon-char{\nfont-size:32px;\nline-height:32px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue885' data-av_iconfont='entypo-fontello' ><\/span><\/span> Nouvel \u00e9quipement de lithographie \u00e9lectronique de tr\u00e8s haut niveau\u00a0:<br \/>\nL\u2019EBPG5200Plus (Raith)<\/strong><\/h3>\n<p data-start=\"203\" data-end=\"449\">As part of the <span style=\"color: #ff9900;\">CPER IMITECH<\/span>\u00a0et du\u00a0<span style=\"color: #ff9900;\">PEPR \u00c9lectronique \u2013 France 2030<\/span>,<\/p>\n<p data-start=\"203\" data-end=\"449\">L&rsquo;IEMN renforce ses capacit\u00e9s technologiques avec l\u2019acquisition d\u2019un\u00a0<span style=\"color: #ff9900;\">nouvel \u00e9quipement de lithographie \u00e9lectronique<\/span><strong data-start=\"349\" data-end=\"419\"> de tr\u00e8s haut niveau<\/strong>\u00a0: l\u2019<strong data-start=\"424\" data-end=\"448\">EBPG5200Plus (Raith)<\/strong>.<\/p>\n<p data-start=\"451\" data-end=\"781\">Plus avanc\u00e9 que l\u2019EBPG5000Plus d\u00e9j\u00e0 en service, cet outil de pointe accompagnera les projets de recherche de l\u2019IEMN sur un large spectre de dispositifs, notamment\u00a0<strong data-start=\"614\" data-end=\"704\">micro-batteries, dispositifs neuromorphiques, capteurs MEMS\/NEMS et technologies III-V<\/strong>, en r\u00e9ponse aux besoins actuels et futurs des chercheurs et des industriels.<\/p>\n<p data-start=\"783\" data-end=\"1085\"><span style=\"color: #ff9900;\">Principaux atouts :<\/span><br data-start=\"809\" data-end=\"812\" \/>\u2022 pr\u00e9cision de positionnement accrue<br data-start=\"848\" data-end=\"851\" \/>\u2022 r\u00e9duction significative des d\u00e9calages de champs d&rsquo;exposition (stitching)<br data-start=\"889\" data-end=\"892\" \/>\u2022 meilleure superposition des \u00e9critures (overlay)<br data-start=\"941\" data-end=\"944\" \/>\u2022 vitesse d\u2019\u00e9criture augment\u00e9e<br data-start=\"974\" data-end=\"977\" \/>\u2022 champs d\u2019\u00e9criture et tailles d\u2019\u00e9chantillons \u00e9largis<br data-start=\"1030\" data-end=\"1033\" \/>\u2022 exposition possible d\u2019\u00e9chantillons non planaires<\/p>\n<p data-start=\"1087\" data-end=\"1269\">Cet \u00e9quipement ouvre de\u00a0<strong data-start=\"1111\" data-end=\"1167\">nouvelles perspectives scientifiques et applicatives<\/strong>, renfor\u00e7ant le positionnement de l\u2019IEMN comme acteur majeur de la micro- et nano-fabrication avanc\u00e9e.<\/p>\n<p>Cet achat a \u00e9t\u00e9 rendu possible gr\u00e2ce au soutien financier du <strong>PEPR Electronics<\/strong> dans le cadre de <strong>France Relance 2030<\/strong> ainsi que du <strong>CPER IMITECH.<\/strong><\/p>\n<p>Les pr\u00e9paratifs n\u00e9cessaires \u00e0 l\u2019accueil et l&rsquo;installation de cet \u00e9quipement en salle blanche ont \u00e9t\u00e9 men\u00e9s \u00e0 bien gr\u00e2ce \u00e0 l\u2019intervention des <strong>P\u00f4les Lithographie et Maintenanc<\/strong>e de l\u2019IEMN. La mise en service de l\u2019\u00e9quipement a aussi b\u00e9n\u00e9fici\u00e9 de l\u2019expertise technique des ing\u00e9nieurs de <strong>RAITH<\/strong>, assurant ainsi le bon d\u00e9roulement des op\u00e9rations.<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-16lju7a-d2ca287ef3916a6e098de39e88a418cb\">\n@keyframes av_boxShadowEffect_av-16lju7a-d2ca287ef3916a6e098de39e88a418cb-column {\n0%   { box-shadow:  0 0 0 0 #dddddd; opacity: 1; }\n100% { box-shadow:  0 0 10px 0 #dddddd; opacity: 1; }\n}\n.flex_column.av-16lju7a-d2ca287ef3916a6e098de39e88a418cb{\nbox-shadow: 0 0 10px 0 #dddddd;\npadding:0 0 0 0;\n}\n.flex_column.av-16lju7a-d2ca287ef3916a6e098de39e88a418cb .avia-divider-svg-top svg{\nheight:5px;\nwidth:calc(100% + 1.3px);\nfill:#c1c1c1;\n}\n<\/style>\n<div  class='flex_column av-16lju7a-d2ca287ef3916a6e098de39e88a418cb av_one_half  avia-builder-el-6  el_after_av_one_half  avia-builder-el-last  flex_column_div shadow-not-animated av-zero-column-padding'     ><div class='avia-divider-svg avia-divider-svg-book avia-divider-svg-top avia-svg-original'><svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" viewbox=\"0 0 1000 100\" preserveaspectratio=\"none\">\n\t<path d=\"M194,99c186.7,0.7,305-78.3,306-97.2c1,18.9,119.3,97.9,306,97.2c114.3-0.3,194,0.3,194,0.3s0-91.7,0-100c0,0,0,0,0-0 L0,0v99.3C0,99.3,79.7,98.7,194,99z\"\/>\n<\/svg><\/div><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-p1bngc-9b2b47493f96789a71057509228e5268\">\n.avia-video.av-p1bngc-9b2b47493f96789a71057509228e5268{\nbackground-image:url(https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/03\/Capture-decran-2026-03-30-a-11.35.29.png);\n}\n<\/style>\n<div  class='avia-video av-p1bngc-9b2b47493f96789a71057509228e5268 avia-video-16-9 av-preview-image avia-video-load-always avia-video-html5'  itemprop=\"video\" itemtype=\"https:\/\/schema.org\/VideoObject\"  data-original_url='https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/03\/e-beam-3.mp4'><video class='avia_video' poster=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/03\/Capture-decran-2026-03-30-a-11.35.29.png\"   preload=\"auto\"  controls id='player_77719_1210375450_2008677775'><source src='https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/03\/e-beam-3.mp4' type='video\/mp4' \/><\/video><\/div><br \/>\n<section  class='av_textblock_section av-mkqq6skg-34ddc4b0e2a993167a295d1a92859571'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Le tout nouveau Nanomasqueur est en service !<\/h4>\n<\/div><\/section><\/p><\/div><\/p>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[297],"tags":[],"class_list":["post-77719","post","type-post","status-publish","format-standard","hentry","category-newsletter"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/77719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=77719"}],"version-history":[{"count":8,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/77719\/revisions"}],"predecessor-version":[{"id":77905,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/77719\/revisions\/77905"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=77719"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=77719"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=77719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}