{"id":77628,"date":"2026-03-30T11:51:39","date_gmt":"2026-03-30T09:51:39","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=77628"},"modified":"2026-04-10T10:12:41","modified_gmt":"2026-04-10T08:12:41","slug":"ebeam-2","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/newsletter\/ebeam-2.html","title":{"rendered":"State-of-the-art electron lithography equipment: the EBPG5200Plus (Raith)"},"content":{"rendered":"<div  class='flex_column av-2jm6i2u-6db82a5a37101b0d043b97a05049b8a3 av_one_full  avia-builder-el-0  el_before_av_hr  avia-builder-el-first  first flex_column_div'     ><section  class='av_textblock_section av-mkqp95a8-f971cffb14dfb0d93e2636346fbc3bab'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2 style=\"text-align: center;\">State-of-the-art electron lithography equipment: the EBPG5200Plus (Raith)<\/h2>\n<\/div><\/section><\/div>\n<div  class='hr av-294ctl2-052003d1dab071efe8c55ba0a37060d0 hr-default  avia-builder-el-2  el_after_av_one_full  el_before_av_one_half'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1or5i3q-819cb171864990a97ea8d7c3f6518194\">\n.flex_column.av-1or5i3q-819cb171864990a97ea8d7c3f6518194{\nborder-width:1px;\nborder-color:#eaeaea;\nborder-style:solid;\nborder-radius:15px 15px 15px 15px;\npadding:15px 15px 15px 15px;\n}\n<\/style>\n<div  class='flex_column av-1or5i3q-819cb171864990a97ea8d7c3f6518194 av_one_half  avia-builder-el-3  el_after_av_hr  el_before_av_one_half  first flex_column_div'     ><section  class='av_textblock_section av-mkqpap7e-5667cf1b5442744673c695d7a157d1fd'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3 style=\"line-height: 20pt; text-align: left;\"><strong>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5\">\n.av_font_icon.av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5{\ncolor:#f16728;\nborder-color:#f16728;\n}\n.av_font_icon.av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5 .av-icon-char{\nfont-size:32px;\nline-height:32px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-1-7-878dc3023f03f2d10e588e5e9cbf63c5 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue885' data-av_iconfont='entypo-fontello' ><\/span><\/span>\u00a0<\/strong><strong>State-of-the-art electron lithography equipment:<\/strong><\/h3>\n<h3><strong>The EBPG5200Plus (Raith)<\/strong><\/h3>\n<p>As part of the <span style=\"color: #ff9900;\">CPER IMITECH<\/span> and the <span style=\"color: #ff9900;\">PEPR Electronics<\/span> <span style=\"color: #ff9900;\">\u2013 France 2030 initiative<\/span>s,<\/p>\n<p>the IEMN is strengthening its technological capabilities with the acquisition of a new, <span style=\"color: #ff9900;\">state-of-the-art electron lithography system<\/span>: the <b>EBPG5200Plus (Raith)<\/b>.<\/p>\n<p>More advanced than the EBPG5000Plus already in service, this state-of-the-art tool will support IEMN\u2019s research projects across a wide range of devices, including <b>micro-batteries, neuromorphic devices, MEMS\/NEMS sensors and III-V technologies<\/b>, in response to the current and future needs of researchers and industry.<\/p>\n<p><span style=\"color: #ff9900;\">Key advantages:<\/span><\/p>\n<p>\u2022 increased positioning accuracy<\/p>\n<p>\u2022 significant reduction in exposure field misalignment (stitching)<\/p>\n<p>\u2022 improved overlay<\/p>\n<p>\u2022 increased writing speed<\/p>\n<p>\u2022 expanded writing fields and sample sizes<\/p>\n<p>\u2022 ability to expose non-planar samples<\/p>\n<p>This equipment opens up <b>new scientific and application prospects<\/b>, reinforcing the IEMN\u2019s position as a major player in advanced micro- and nano-fabrication.<\/p>\n<p>This purchase was made possible thanks to the financial support of the <b>PEPR Electronics<\/b> as part of <b>France Relance 2030<\/b> as well as the <b>CPER IMITECH.<\/b><\/p>\n<p>The necessary preparations for the installation of this equipment in the cleanroom were successfully completed thanks to the involvement of the <b>Lithography and Maintenance Divisions<\/b> at IEMN. The commissioning of the equipment also benefited from the technical expertise of engineers from <b>RAITH<\/b>, thereby ensuring that everything ran smoothly.<\/p>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-16lju7a-d2ca287ef3916a6e098de39e88a418cb\">\n@keyframes av_boxShadowEffect_av-16lju7a-d2ca287ef3916a6e098de39e88a418cb-column {\n0%   { box-shadow:  0 0 0 0 #dddddd; opacity: 1; }\n100% { box-shadow:  0 0 10px 0 #dddddd; opacity: 1; }\n}\n.flex_column.av-16lju7a-d2ca287ef3916a6e098de39e88a418cb{\nbox-shadow: 0 0 10px 0 #dddddd;\npadding:0 0 0 0;\n}\n.flex_column.av-16lju7a-d2ca287ef3916a6e098de39e88a418cb .avia-divider-svg-top svg{\nheight:5px;\nwidth:calc(100% + 1.3px);\nfill:#c1c1c1;\n}\n<\/style>\n<div  class='flex_column av-16lju7a-d2ca287ef3916a6e098de39e88a418cb av_one_half  avia-builder-el-6  el_after_av_one_half  avia-builder-el-last  flex_column_div shadow-not-animated av-zero-column-padding'     ><div class='avia-divider-svg avia-divider-svg-book avia-divider-svg-top avia-svg-original'><svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" viewbox=\"0 0 1000 100\" preserveaspectratio=\"none\">\n\t<path d=\"M194,99c186.7,0.7,305-78.3,306-97.2c1,18.9,119.3,97.9,306,97.2c114.3-0.3,194,0.3,194,0.3s0-91.7,0-100c0,0,0,0,0-0 L0,0v99.3C0,99.3,79.7,98.7,194,99z\"\/>\n<\/svg><\/div><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-p1bngc-556a6f898773dfd67c903e028c903c63\">\n.avia-video.av-p1bngc-556a6f898773dfd67c903e028c903c63{\nbackground-image:url(https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/03\/Capture-decran-2026-04-09-a-16.02.31-182x300.png);\n}\n<\/style>\n<div  class='avia-video av-p1bngc-556a6f898773dfd67c903e028c903c63 avia-video-16-9 av-preview-image avia-video-load-always avia-video-html5'  itemprop=\"video\" itemtype=\"https:\/\/schema.org\/VideoObject\"  data-original_url='https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/04\/e-beam-eng.mp4'><video class='avia_video' poster=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/03\/Capture-decran-2026-04-09-a-16.02.31-182x300.png\"   preload=\"auto\"  controls id='player_77628_417368022_2070045418'><source src='https:\/\/www.iemn.fr\/wp-content\/uploads\/2026\/04\/e-beam-eng.mp4' type='video\/mp4' \/><\/video><\/div><br \/>\n<section  class='av_textblock_section av-mkqq6skg-34ddc4b0e2a993167a295d1a92859571'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>The brand-new ebeam is now in service!<\/h4>\n<\/div><\/section><\/p><\/div><\/p>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[297],"tags":[],"class_list":["post-77628","post","type-post","status-publish","format-standard","hentry","category-newsletter"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/77628","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=77628"}],"version-history":[{"count":21,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/77628\/revisions"}],"predecessor-version":[{"id":77910,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/77628\/revisions\/77910"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=77628"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=77628"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=77628"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}