{"id":75842,"date":"2025-11-27T12:47:02","date_gmt":"2025-11-27T10:47:02","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=75842"},"modified":"2025-12-18T10:40:34","modified_gmt":"2025-12-18T08:40:34","slug":"un-double-reacteur-delaboration-de-semiconducteurs-pour-les-telecoms-ultra-haut-debit-arrive-a-liemn","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/newsletter\/un-double-reacteur-delaboration-de-semiconducteurs-pour-les-telecoms-ultra-haut-debit-arrive-a-liemn.html","title":{"rendered":"Un double r\u00e9acteur d\u2019\u00e9laboration de semiconducteurs pour les t\u00e9l\u00e9coms ultra-haut d\u00e9bit arrive \u00e0 l\u2019IEMN"},"content":{"rendered":"<div  class='flex_column av-142r7lu-356fbac5afeeac9430da8dfc49c79d58 av_one_fifth  avia-builder-el-0  el_before_av_three_fifth  avia-builder-el-first  first flex_column_div av-hide-on-mobile'     ><\/div>\n<div  class='flex_column av-su50w2-95335e0de697eddebc1c37b3fe333466 av_three_fifth  avia-builder-el-1  el_after_av_one_fifth  el_before_av_hr  flex_column_div'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-miiovi7v-6cb05a0fce414872c0fbab4ceb1fa19f\">\n.avia-video.av-miiovi7v-6cb05a0fce414872c0fbab4ceb1fa19f{\nbackground-image:url(https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/vignette_video_mbe.jpg);\n}\n<\/style>\n<div  class='avia-video av-miiovi7v-6cb05a0fce414872c0fbab4ceb1fa19f avia-video-16-9 av-preview-image avia-video-load-always avia-video-html5'  itemprop=\"video\" itemtype=\"https:\/\/schema.org\/VideoObject\"  data-original_url='https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/MBE.mp4'><video class='avia_video' poster=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/vignette_video_mbe.jpg\"   preload=\"auto\"  controls id='player_75842_1083257591_913780256'><source src='https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/MBE.mp4' type='video\/mp4' \/><\/video><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-miipcfwr-0589f7e5ceb16687c5b3c177cc06644e\">\n#top .hr.av-miipcfwr-0589f7e5ceb16687c5b3c177cc06644e{\nmargin-top:30px;\nmargin-bottom:30px;\n}\n.hr.av-miipcfwr-0589f7e5ceb16687c5b3c177cc06644e .hr-inner{\nwidth:500px;\nborder-color:#25499c;\nmax-width:45%;\n}\n.hr.av-miipcfwr-0589f7e5ceb16687c5b3c177cc06644e .av-seperator-icon{\ncolor:#25499c;\n}\n<\/style>\n<div  class='hr av-miipcfwr-0589f7e5ceb16687c5b3c177cc06644e hr-custom  avia-builder-el-3  el_after_av_three_fifth  el_before_av_textblock  hr-center hr-icon-yes'><span class='hr-inner inner-border-av-border-fat'><span class=\"hr-inner-style\"><\/span><\/span><span class='av-seperator-icon' aria-hidden='true' data-av_icon='\ue810' data-av_iconfont='entypo-fontello'><\/span><span class='hr-inner inner-border-av-border-fat'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-miip2r25-e7137a7d6cabd238878879a292a2b683'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2 style=\"text-align: center;\"><span style=\"color: #25499c;\"> Un double r\u00e9acteur d\u2019\u00e9laboration de semiconducteurs pour les t\u00e9l\u00e9coms ultra-haut d\u00e9bit arrive \u00e0 l\u2019IEMN !<\/span><\/h2>\n<h2 style=\"text-align: center;\"><\/h2>\n<\/div><\/section>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-txshs2-1b7d1dcb4e70e1db73fa5505bc7ec251\">\n.flex_column.av-txshs2-1b7d1dcb4e70e1db73fa5505bc7ec251{\nborder-width:20px;\nborder-color:#f9f9f9;\nborder-style:solid;\nborder-radius:20px 20px 20px 20px;\nbackground-color:#f9f9f9;\n}\n<\/style>\n<div  class='flex_column av-txshs2-1b7d1dcb4e70e1db73fa5505bc7ec251 av_one_half  avia-builder-el-5  el_after_av_textblock  el_before_av_one_half  first flex_column_div  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mihb6tnj-1a8c31be0e1a71e4104f5922df3d8514\">\n#top .av_textblock_section.av-mihb6tnj-1a8c31be0e1a71e4104f5922df3d8514 .avia_textblock{\ntext-align:justify;\n}\n<\/style>\n<section  class='av_textblock_section av-mihb6tnj-1a8c31be0e1a71e4104f5922df3d8514'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p>\u00a0<strong>L&rsquo;IEMN vient d&rsquo;installer un nouvel \u00e9quipement majeur pour la fabrication de semiconducteurs : un double r\u00e9acteur d&rsquo;\u00e9pitaxie RIBER connect\u00e9 sous ultra-vide. Cet investissement strat\u00e9gique permet le d\u00e9veloppement de composants \u00e9lectroniques d&rsquo;avant-garde pour la 6G (t\u00e9l\u00e9communications \u00e0 tr\u00e8s haut d\u00e9bit) et l&rsquo;opto\u00e9lectronique THz. <\/strong><strong>Le syst\u00e8me offre un contr\u00f4le accru des propri\u00e9t\u00e9s des couches semiconductrices III-V \u00e9pitaxi\u00e9es et permet \u00e9galement d\u2019explorer de nouvelles opportunit\u00e9s d&rsquo;int\u00e9gration sur silicium et de croissance s\u00e9lective \u00e0 l&rsquo;\u00e9chelle nanom\u00e9trique.<\/strong><\/p>\n<\/blockquote>\n<p>Dans le cadre du PEPR Electronique, et gr\u00e2ce \u00e0 un financement compl\u00e9mentaire par le FEDER, la centrale de Micro-nanofabrication de l\u2019IEMN s\u2019est dot\u00e9 d\u2019un nouveau double r\u00e9acteur d\u2019\u00e9pitaxie par jets mol\u00e9culaires. Ce nouveau syst\u00e8me, mis au point par RIBER, est constitu\u00e9 de deux chambres de croissance. La premi\u00e8re de <strong>type C21-DZ<\/strong> est \u00e9quip\u00e9e de craqueurs \u00e0 vanne comme sources de phosphore, d\u2019arsenic et d\u2019antimoine, de cellules \u00e0 double filament pour l\u2019effusion des \u00e9l\u00e9ments III (In, Ga et Al), et de sources de Si, de B\u00e9ryllium et de Carbone pour le dopage. Un syst\u00e8me EZCurve permettra \u00e9galement de mesurer la d\u00e9flection du substrat pendant la croissance afin de mesurer pr\u00e9cis\u00e9ment la contrainte des alliages et d\u2019en assurer pr\u00e9cis\u00e9ment la composition.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-uv4rnm-ae70ef43b5c91883d02d917e7d556c72\">\n.flex_column.av-uv4rnm-ae70ef43b5c91883d02d917e7d556c72{\nborder-width:20px;\nborder-color:#f9f9f9;\nborder-style:solid;\nborder-radius:20px 20px 20px 20px;\nbackground-color:#f9f9f9;\n}\n<\/style>\n<div  class='flex_column av-uv4rnm-ae70ef43b5c91883d02d917e7d556c72 av_one_half  avia-builder-el-7  el_after_av_one_half  avia-builder-el-last  flex_column_div  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-miimidvk-c36e98599f1dd29693d72479bb3dba34\">\n#top .av_textblock_section.av-miimidvk-c36e98599f1dd29693d72479bb3dba34 .avia_textblock{\ntext-align:justify;\n}\n<\/style>\n<section  class='av_textblock_section av-miimidvk-c36e98599f1dd29693d72479bb3dba34'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Gr\u00e2ce \u00e0 un module de transfert sous ultra-vide, cette chambre est connect\u00e9e \u00e0 <strong>un deuxi\u00e8me r\u00e9acteur d\u2019\u00e9pitaxie de type C21-T<\/strong> particuli\u00e8rement bien adapt\u00e9 \u00e0 la pr\u00e9paration des surfaces pour la croissance gr\u00e2ce \u00e0 son manipulateur pouvant atteindre 1200\u00b0C et la pr\u00e9sence d\u2019une cellule plasma RF pour la production d\u2019hydrog\u00e8ne atomique. Ce deuxi\u00e8me r\u00e9acteur est \u00e9galement \u00e9quip\u00e9 de sources d\u2019arsenic et d\u2019antimoine, de cellules d\u2019indium, de gallium et d\u2019aluminium et de sources de dopants dont une cellule d\u2019effusion de Fer pour le d\u00e9veloppement de photod\u00e9tecteurs ultra-rapides ou de semiconducteurs semi-isolants.<\/p>\n<p><span style=\"color: #f16728;\"><strong><img loading=\"lazy\" decoding=\"async\" class=\"alignright wp-image-75865\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/MBEvisuel.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/MBEvisuel.jpg 400w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/MBEvisuel-300x225.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2025\/11\/MBEvisuel-16x12.jpg 16w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/strong><\/span>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-1-6-833fa66ac94a2301018ef5704680067a\">\n.av_font_icon.av-mqde7m-1-6-833fa66ac94a2301018ef5704680067a{\ncolor:#f16728;\nborder-color:#f16728;\n}\n.av_font_icon.av-mqde7m-1-6-833fa66ac94a2301018ef5704680067a .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-1-6-833fa66ac94a2301018ef5704680067a avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue897' data-av_iconfont='entypo-fontello' ><\/span><\/span><strong>Gr\u00e2ce \u00e0 une homog\u00e9n\u00e9it\u00e9 accrue et un meilleur contr\u00f4le de la composition des alliages, cette nouvelle configuration de r\u00e9acteurs permettra de r\u00e9pondre aux besoins en \u00e9pitaxie dans le cadre des projets cibl\u00e9s T-REX6G et FUN-TERA du PEPR \u00e9lectronique mais offrira \u00e9galement de nouvelles opportunit\u00e9s pour la croissance d\u2019h\u00e9t\u00e9rostructures et de nanostructures innovantes pour l\u2019IEMN ou pour r\u00e9pondre aux demandes ext\u00e9rieures dans le cadre du r\u00e9seau RENATECH.<\/strong><\/p>\n<hr \/>\n<p><span style=\"color: #f16728;\"><strong>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-11665d57be50482f466d54b8a3268ec6\">\n.av_font_icon.av-mqde7m-11665d57be50482f466d54b8a3268ec6{\ncolor:#f16728;\nborder-color:#f16728;\n}\n.av_font_icon.av-mqde7m-11665d57be50482f466d54b8a3268ec6 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-11665d57be50482f466d54b8a3268ec6 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello' ><\/span><\/span><\/strong><\/span>Contact: <a href=\"mailto:Christophe.coinon@univ-lille.fr\">Christophe.coinon@univ-lille.fr<\/a><\/p>\n<p><span style=\"color: #f16728;\"><strong>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-2-818f94eedbef30b6a6f089c5d07f52ab\">\n.av_font_icon.av-mqde7m-2-818f94eedbef30b6a6f089c5d07f52ab{\ncolor:#f16728;\nborder-color:#f16728;\n}\n.av_font_icon.av-mqde7m-2-818f94eedbef30b6a6f089c5d07f52ab .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-2-818f94eedbef30b6a6f089c5d07f52ab avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello' ><\/span><\/span><\/strong><\/span>Contact: <a href=\"mailto:ludovic.desplanque@univ-lille.fr\">ludovic.desplanque@univ-lille.fr<\/a><\/p>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[297],"tags":[],"class_list":["post-75842","post","type-post","status-publish","format-standard","hentry","category-newsletter"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/75842","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=75842"}],"version-history":[{"count":18,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/75842\/revisions"}],"predecessor-version":[{"id":76938,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/75842\/revisions\/76938"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=75842"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=75842"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=75842"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}