{"id":61125,"date":"2023-12-04T13:03:25","date_gmt":"2023-12-04T11:03:25","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=61125"},"modified":"2023-12-04T13:03:25","modified_gmt":"2023-12-04T11:03:25","slug":"these-cerine-mokhtari-development-of-a-nano-robotics-and-automated-microwave-on-wafer-probe-station","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/agenda\/these-cerine-mokhtari-development-of-a-nano-robotics-and-automated-microwave-on-wafer-probe-station.html","title":{"rendered":"THESE : Cerine MOKHTARI : \u00ab\u00a0Development of a Nano-robotics and Automated  Microwave On-Wafer Probe Station\u00a0\u00bb"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_58_1dbl0zqebg6ei\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" 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style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;border-style:solid;border-color:#000;background-position:0% 0%;background-repeat:no-repeat;width:180px;height:30px;left:0px;top:231px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-quote-right\" style=\"color:#ffffff;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>ACTUALITES<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-61125'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lpqsu7i3-7045384cde7fd3617e64780d4c3e35c9\">\n#top .av-special-heading.av-lpqsu7i3-7045384cde7fd3617e64780d4c3e35c9{\nmargin:0 0 10px 0;\npadding-bottom:4px;\n}\nbody .av-special-heading.av-lpqsu7i3-7045384cde7fd3617e64780d4c3e35c9 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-lpqsu7i3-7045384cde7fd3617e64780d4c3e35c9 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-lpqsu7i3-7045384cde7fd3617e64780d4c3e35c9 av-special-heading-h2  avia-builder-el-1  el_after_av_layerslider  el_before_av_hr  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >THESE : Cerine MOKHTARI : \u00ab\u00a0Development of a Nano-robotics and Automated Microwave On-Wafer Probe Station\u00a0\u00bb<\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18u73nj-dad6a947580930e400fc42ba200e80f1\">\n#top .hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1{\nmargin-top:5px;\nmargin-bottom:5px;\n}\n.hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1 .hr-inner{\nwidth:100%;\n}\n<\/style>\n<div  class='hr av-18u73nj-dad6a947580930e400fc42ba200e80f1 hr-custom  avia-builder-el-2  el_after_av_heading  el_before_av_textblock  hr-left hr-icon-no'><span class='hr-inner inner-border-av-border-thin'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-jriy64i8-2f4600354c0449b610997916bbd9b6bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" >\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-68e036126b913e5028f77311dc66b825\">\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825{\ncolor:#bfbfbf;\nborder-color:#bfbfbf;\n}\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825 .av-icon-char{\nfont-size:60px;\nline-height:60px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-68e036126b913e5028f77311dc66b825 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue8c9' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p>Cerine MOKHTARI<\/p>\n<p>Soutenance :<\/p>\n<p><strong>5 d\u00e9cembre 2013 \u00e0 10H30<br \/>\n<\/strong>Amphitheatre of the IEMN-Laboratoire central - Villeneuve d'Ascq<\/p>\n<\/div><\/section>\n<section  class='av_textblock_section av-jtefqx33-628129dba2299b2ecd65ebfc92eac29d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div  class='hr av-kjh3zw-4dff888f744b728a1aca9b3a0971493a hr-default  avia-builder-el-6  avia-builder-el-no-sibling'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<h5><strong><span style=\"color: #800000;\">Jury :<\/span><\/strong><\/h5>\n<ul>\n<li>Pr. Val\u00e9rie Vigneras (Rapporteur), ENSCBP-Bordeaux INP<\/li>\n<li>Pr. Val\u00e9rie Madrangeas\u00a0(Rapporteur), Xlim, Limoges<\/li>\n<li>Pr. Guillaume Ducournau (Examinateur ), Univ. Lille<\/li>\n<li>Dr. Johannes Hoffmann (Examinateur), METAS, Bern<\/li>\n<li>Dr. Joao Azevedo Goncalves (Invit\u00e9), STMicroelectronics, Crolles<\/li>\n<li>Dr. Djamel Allal (Invit\u00e9), LNE, Paris<\/li>\n<li>Pr. Kamel Haddadi (Directeur de th\u00e8se), Univ. Lille<\/li>\n<\/ul>\n<h5>Summary:<\/h5>\n<p>Dans le contexte g\u00e9n\u00e9ral de l\u2019industrie europ\u00e9enne de la nano\u00e9lectronique, il est n\u00e9cessaire de d\u00e9velopper de nouvelles techniques et de nouveaux instruments de caract\u00e9risation sous pointes pour la validation pr\u00e9cise et fine de circuits destin\u00e9s \u00e0 des applications haute fr\u00e9quence (HF). Pour faire progresser la miniaturisation des dispositifs \u00e0 haute fr\u00e9quence, de nouvelles questions m\u00e9trologiques li\u00e9es \u00e0 la caract\u00e9risation dimensionnelle et \u00e9lectrique doivent \u00eatre abord\u00e9es. Un instrument universel de caract\u00e9risation des dispositifs \u00e0 radiofr\u00e9quences (RF) consiste en un analyseur de r\u00e9seau vectoriel (VNA), une station de mesure \u00e9quip\u00e9e d\u2019une paire de sondes micro-ondes Ground-Signal-Ground (GSG) align\u00e9es manuellement ou automatiquement au moyen d\u2019un microscope ou d\u2019un syst\u00e8me de cam\u00e9ra sur des substrats d\u2019\u00e9talonnage et des dispositifs sous test (DUT). Les structures de test RF conventionnelles n\u00e9cessitent des tampons (structures de contact) sp\u00e9cifiques pour s\u2019adapter \u00e0 la g\u00e9om\u00e9trie de la pointe de la sonde. Le positionnement de la sonde sur la structure de test CPW g\u00e9n\u00e8re des erreurs de mesure de d\u00e9salignement qui affectent la reproductibilit\u00e9 de la mesure. En outre, les dispositifs pr\u00e9sentent des imp\u00e9dances extr\u00eames par rapport \u00e0 l\u2019imp\u00e9dance de r\u00e9f\u00e9rence 50 \u2126 du VNA, ce qui se traduit par une sensibilit\u00e9 et une pr\u00e9cision de mesure m\u00e9diocres.<br \/>\nPour relever ce d\u00e9fi, une nouvelle station de mesure sous pointe enti\u00e8rement automatis\u00e9e et robotis\u00e9e a \u00e9t\u00e9 con\u00e7ue et construite \u00e0 partir de z\u00e9ro. Les sondes de mesure ainsi que le porte \u00e9chantillon accueillant le dispositif sous test sont mont\u00e9s sur des nano-positionneurs pi\u00e9zo\u00e9lectriques du constructeur SmarAct\u00ae. La vision du contact sondes \u2013 au \u2013 composant sous test est assur\u00e9e par une cam\u00e9ra microscope haute r\u00e9solution. Un analyseur de r\u00e9seau vectoriel Streamline Keysight\u00ae a \u00e9t\u00e9 int\u00e9gr\u00e9 \u00e0 la station afin d\u2019obtenir une solution compacte au plus pr\u00e8s des sondes et r\u00e9duire ainsi les erreurs non syst\u00e9matiques inh\u00e9rentes aux variations de l\u2019environnement. Enfin, un programme de pilotage des sondes et du porte \u00e9chantillon automatique bas\u00e9 sur la reconnaissance d\u2019image a \u00e9t\u00e9 d\u00e9velopp\u00e9 avec le logiciel LabVIEWTM.<br \/>\nMots cl\u00e9s: mesures hyperfr\u00e9quences, mesures sous pointes, analyseur de r\u00e9seaux vectoriel, m\u00e9trologie haute fr\u00e9quence, calibration, tra\u00e7abilit\u00e9 \u00e9lectrique, nano-robotique, automatisation.<\/p>\n<h5>Abstract:<\/h5>\n<p>In the general context of the European nanoelectronics industry, there is a need to develop new sub-tip characterization techniques and instruments for the precise and fine validation of circuits intended for high-frequency (HF) applications. To advance the miniaturization of high-frequency devices, new metrological issues linked to dimensional and electrical characterization need to be addressed. A universal instrument for characterizing radio-frequency (RF) devices consists of a vector network analyzer (VNA), a measuring station equipped with a pair of Ground-Signal-Ground (GSG) microwave probes aligned manually or automatically by means of a microscope or camera system on calibration substrates and devices under test (DUTs). Conventional RF test structures require specific pads (contact structures) to adapt to the geometry of the probe tip. Positioning the probe on the CPW test structure generates misalignment measurement errors that affect measurement reproducibility. In addition, the devices exhibit extreme impedances compared to the 50 \u03a9 reference impedance of the VNA, resulting in poor measurement sensitivity and accuracy.<br \/>\nTo meet this challenge, a new, fully automated and robotized sub-peak measurement station was designed and built from scratch. The measurement probes and the sample holder housing the device under test are mounted on piezoelectric nano-positioners from the manufacturer SmarAct\u00ae. A high-resolution microscope camera is used to monitor the contact between the probes and the component under test. A Keysight\u00ae Streamline vector network analyzer has been integrated into the station to provide a compact solution close to the probes, thus reducing the non-systematic errors inherent in environmental variations. Last but not least, a program for controlling the probes and automatic sample holder based on image recognition was developed using LabVIEWTM software.<br \/>\nKeywords: microwave measurements, sub-peak measurements, vector network analyzer, high-frequency metrology, calibration, electrical traceability, nano-robotics, automation.<\/p>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":61127,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[65,87,84,187,318],"tags":[],"class_list":["post-61125","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-agenda","category-agenda-en","category-agenda-en-en","category-annonces-these","category-these-2023"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/61125","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=61125"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/61125\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media\/61127"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=61125"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=61125"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=61125"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}