{"id":60978,"date":"2023-11-29T14:53:25","date_gmt":"2023-11-29T12:53:25","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=60978"},"modified":"2023-11-29T14:53:25","modified_gmt":"2023-11-29T12:53:25","slug":"these-hugo-bouillaud-fabrication-et-optimisation-des-caracteristiques-thermiques-de-diodes-schottky-de-la-filiere-gaas-et-reportees-sur-sihr-pour-des-applications-de-multiplication-de-frequences","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/agenda\/these-hugo-bouillaud-fabrication-et-optimisation-des-caracteristiques-thermiques-de-diodes-schottky-de-la-filiere-gaas-et-reportees-sur-sihr-pour-des-applications-de-multiplication-de-frequences.html","title":{"rendered":"THESE Hugo BOUILLAUD \u00ab\u00a0Fabrication et optimisation des caract\u00e9ristiques thermiques de diodes Schottky de la fili\u00e8re GaAs et report\u00e9es sur SiHR pour des applications de multiplication de fr\u00e9quences\u00a0\u00bb"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_58_18fbnmjj610y8\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-1030x107.jpg 1030w, 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class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-60978'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lpjrnnt1-e273f276b2a8723f2f6a07af478eadba\">\n#top .av-special-heading.av-lpjrnnt1-e273f276b2a8723f2f6a07af478eadba{\nmargin:0 0 10px 0;\npadding-bottom:4px;\n}\nbody .av-special-heading.av-lpjrnnt1-e273f276b2a8723f2f6a07af478eadba .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-lpjrnnt1-e273f276b2a8723f2f6a07af478eadba .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-lpjrnnt1-e273f276b2a8723f2f6a07af478eadba av-special-heading-h2  avia-builder-el-1  el_after_av_layerslider  el_before_av_hr  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >THESE Hugo Bouillaud \u00ab\u00a0Fabrication et optimisation des caract\u00e9ristiques thermiques de diodes Schottky de la fili\u00e8re GaAs et report\u00e9es sur SiHR pour des applications de multiplication de fr\u00e9quences\u00a0\u00bb<\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18u73nj-dad6a947580930e400fc42ba200e80f1\">\n#top .hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1{\nmargin-top:5px;\nmargin-bottom:5px;\n}\n.hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1 .hr-inner{\nwidth:100%;\n}\n<\/style>\n<div  class='hr av-18u73nj-dad6a947580930e400fc42ba200e80f1 hr-custom  avia-builder-el-2  el_after_av_heading  el_before_av_textblock  hr-left hr-icon-no'><span class='hr-inner inner-border-av-border-thin'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-jriy64i8-2f4600354c0449b610997916bbd9b6bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" >\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-68e036126b913e5028f77311dc66b825\">\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825{\ncolor:#bfbfbf;\nborder-color:#bfbfbf;\n}\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825 .av-icon-char{\nfont-size:60px;\nline-height:60px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-68e036126b913e5028f77311dc66b825 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue8c9' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p>Hugo BOUILLAUD<\/p>\n<p><strong>7 d\u00e9cembre 2023\u00a0 \u00e0 14h30<br \/>\n<\/strong>Amphitheatre of the IEMN-Laboratoire central - Villeneuve d'Ascq<\/p>\n<\/div><\/section>\n<section  class='av_textblock_section av-jtefqx33-628129dba2299b2ecd65ebfc92eac29d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div  class='hr av-kjh3zw-4dff888f744b728a1aca9b3a0971493a hr-default  avia-builder-el-6  avia-builder-el-no-sibling'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<h5><strong><span style=\"color: #800000;\">Jury :<br \/>\n<\/span><\/strong><\/h5>\n<div style=\"color: #000000; font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff;\"><span style=\"font-family: arial, helvetica, sans-serif;\"><span style=\"font-size: 12pt;\">Mme Anne-Laure Billabert, Professeure, CNAM, Paris, France, Rapporteure<\/span><\/span><\/div>\n<div style=\"color: #000000; font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff;\"><span style=\"font-family: arial, helvetica, sans-serif;\"><span style=\"font-size: 12pt;\">M. Jean-Guy Tartarin, Professeur, LAAS CNRS, Toulouse, France, Rapporteur<\/span><\/span><\/div>\n<div style=\"color: #000000; font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff;\"><span style=\"font-family: arial, helvetica, sans-serif;\"><span style=\"font-size: 12pt;\">M. Alain Maestrini,\u00a0<span style=\"font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; caret-color: #000000; white-space: normal; background-color: #ffffff; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; float: none; display: inline !important;\">Senior staff member,\u00a0<\/span><\/span><\/span><span style=\"font-size: 12pt;\">JPL, Pasadena, \u00c9tats-Unis, Examinateur<\/span><\/div>\n<div style=\"color: #000000; font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff;\"><span style=\"font-family: arial, helvetica, sans-serif;\"><span style=\"font-size: 12pt;\">M. Rachid Driad,\u00a0I<span style=\"font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; caret-color: #000000; white-space: normal; background-color: #ffffff; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\">ngenieur process<\/span><span style=\"font-family: arial, helvetica, sans-serif; font-size: 12pt; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; caret-color: #000000; white-space: normal; background-color: #ffffff; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\">,<\/span><\/span><\/span><span style=\"font-size: 12pt;\">\u00a0IAF, Freiburg, Allemagne,\u00a0<\/span><span style=\"font-size: 12pt; float: none; display: inline !important;\">Examinateur<\/span><\/div>\n<div style=\"color: #000000; font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff;\"><span style=\"font-family: arial, helvetica, sans-serif;\"><span style=\"font-size: 12pt;\">M. Guillaume Ducournau, Professeur, IEMN CRNS, Lille, France, Examinateur<\/span><\/span><\/div>\n<div style=\"color: #000000; font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff;\"><span style=\"font-family: arial, helvetica, sans-serif;\"><span style=\"font-size: 12pt;\">Mme Jeanne Treuttel, I<span style=\"font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; caret-color: #000000; white-space: normal; background-color: #ffffff; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\">ng\u00e9nieure de recherche<\/span><span style=\"font-family: arial, helvetica, sans-serif; font-size: 12pt; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; caret-color: #000000; white-space: normal; background-color: #ffffff; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial;\">,<\/span><\/span><\/span><span style=\"font-size: 12pt;\">\u00a0LERMA CNRS, Paris, France, Examinatrice<\/span><\/div>\n<div style=\"color: #000000; font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff;\">\n<p><span style=\"font-family: arial, helvetica, sans-serif;\"><span style=\"font-size: 12pt;\">M. Yannick Roelens,\u00a0<span style=\"font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; background-color: #ffffff; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; float: none; display: inline !important;\">Ma\u00eetre de conf\u00e9rence,\u00a0<\/span><\/span><\/span><span style=\"font-size: 12pt;\">IEMN CRNS, Lille, France, Co-encadrant de th\u00e8se<\/span><\/p>\n<div style=\"clear: both;\">\n<p><span style=\"font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; float: none; display: inline !important;\">M. Mohammed Zaknoune,\u00a0<\/span><span style=\"font-family: arial, helvetica, sans-serif; font-size: 16px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: start; text-indent: 0px; text-transform: none; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; white-space: normal; text-decoration-thickness: initial; text-decoration-style: initial; text-decoration-color: initial; background-color: #ffffff; float: none; display: inline !important;\">Directeur de recherche,\u00a0<\/span><span style=\"font-size: 12pt;\">IEMN CRNS, Lille, France,\u00a0<\/span><span style=\"font-size: 12pt;\">Directeur de th\u00e8se<\/span><\/p>\n<div style=\"clear: both;\">M. Pierre Gellie, Responsable entreprise, LYTID SAS, Paris, France, Invit\u00e9<\/div>\n<\/div>\n<\/div>\n<h5><strong><span style=\"color: #800000;\">\u00a0<\/span><\/strong><\/h5>\n<h5>Summary:<\/h5>\n<p>Les besoins exponentiels li\u00e9s aux applications exploitant le domaine THz n\u00e9cessitent d\u2019accroitre l\u2019\u00e9ventail des sources disponibles et d\u2019optimiser leur fabrication. Dans ce travail de th\u00e8se, nous nous sommes int\u00e9ress\u00e9s aux diodes Schottky en vue de la r\u00e9alisation de multiplicateurs de fr\u00e9quences. Notre travail de recherche exp\u00e9rimental a consist\u00e9 en l\u2019optimisation des caract\u00e9ristiques de diodes Schottky de fili\u00e8re GaAs, par le d\u00e9veloppement et la mise en \u0153uvre d\u2019un proc\u00e9d\u00e9 de fabrication innovant. Dans un premier temps, nous avons r\u00e9alis\u00e9 des diodes Schottky GaAs sur substrat GaAs de diff\u00e9rentes tailles, pour \u00e9laborer des composants de r\u00e9f\u00e9rence. Nous avons ensuite fabriqu\u00e9 un composant de type flip-chip pour une application de multiplication \u00e0 150 GHz en boitier guide d\u2019ondes. Enfin, dans le but d\u2019am\u00e9liorer les performances en puissance des diodes, nous avons optimis\u00e9 leur dissipation thermique en transf\u00e9rant leur structure \u00e9pitaxiale sur un substrat b\u00e9n\u00e9ficiant d\u2019une meilleure conductivit\u00e9 thermique : le SiHR (silicium haute r\u00e9sistivit\u00e9). Le proc\u00e9d\u00e9 technologique complet de ces fabrications est d\u00e9taill\u00e9, puis la derni\u00e8re partie de l\u2019\u00e9tude est consacr\u00e9e \u00e0 leurs caract\u00e9risations. D\u2019une part, nous avons \u00e9valu\u00e9 les \u00e9ventuelles variations sur les caract\u00e9ristiques des diodes GaAs sur GaAs, induites par les diff\u00e9rentes tailles. D\u2019autre part nous avons compar\u00e9 les deux technologies sur les substrats SiHR et GaAs. Ce travail montre l\u2019apport que peut pr\u00e9senter ce type de technologie report\u00e9e, o\u00f9 une diminution significative de la r\u00e9sistance thermique des composants est observ\u00e9e, et est associ\u00e9e \u00e0 un gain notable sur la r\u00e9sistance s\u00e9rie.<\/p>\n<h5>Abstract:<\/h5>\n<p>The exponential needs associated with applications exploiting the THz domain require to expand the range of available sources and optimize their fabrication processes. In this thesis, we focused on Schottky diodes for its use as frequency multipliers. Our experimental research involved optimizing the characteristics of GaAs Schottky diodes through the development and implementation of an innovative fabrication process. First, we fabricated GaAs Schottky diodes on GaAs substrate with several aspect ratios in order to make a reference in terms of device. Then we fabricated a flip-chip device for a 150 GHz frequency multiplication application in a waveguide block. Finally, in order to enhance the power handling of the diodes, we optimized their thermal dissipation by transferring their epitaxial structure onto a substrate with higher thermal conductivity : SiHR (high resistivity silicon). The complete technological processes for these fabrications are detailed, and the last part of the study is dedicated to their characterization. On one hand, we assessed any variations in the characteristics of GaAs diodes on GaAs induced by the different aspect ratios. On the other hand, we compared the two technologies on SiHR and GaAs substrates. This work demonstrates the potential of this type of transferred technology, where a significant reduction of thermal resistance is observed and is associated with a notable improvement of the series resistance.<\/p>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":60980,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[65,87,84,187],"tags":[],"class_list":["post-60978","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-agenda","category-agenda-en","category-agenda-en-en","category-annonces-these"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/60978","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=60978"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/60978\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media\/60980"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=60978"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=60978"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=60978"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}