{"id":60842,"date":"2023-11-10T11:57:56","date_gmt":"2023-11-10T09:57:56","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=60842"},"modified":"2023-11-10T11:57:56","modified_gmt":"2023-11-10T09:57:56","slug":"these-hao-zu-analyse-des-proprietes-des-resonateurs-nanoelectromecaniques-a-membrane-en-nitrure-de-silicium-pour-les-futures-applications-de-thermometrie-optomecanique","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/agenda\/these-hao-zu-analyse-des-proprietes-des-resonateurs-nanoelectromecaniques-a-membrane-en-nitrure-de-silicium-pour-les-futures-applications-de-thermometrie-optomecanique.html","title":{"rendered":"THESE : Hao ZU : \u00ab\u00a0Analyse des propri\u00e9t\u00e9s des r\u00e9sonateurs nano\u00e9lectrom\u00e9caniques \u00e0 membrane en nitrure de silicium pour les futures applications de thermom\u00e9trie optom\u00e9canique\u00a0\u00bb"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  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alpha units'><div class='post-entry post-entry-type-page post-entry-60842'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-losfuhut-c498432129061ee04ea85a096214d739\">\n#top .av-special-heading.av-losfuhut-c498432129061ee04ea85a096214d739{\nmargin:0 0 10px 0;\npadding-bottom:4px;\n}\nbody .av-special-heading.av-losfuhut-c498432129061ee04ea85a096214d739 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-losfuhut-c498432129061ee04ea85a096214d739 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-losfuhut-c498432129061ee04ea85a096214d739 av-special-heading-h2  avia-builder-el-1  el_after_av_layerslider  el_before_av_hr  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >THESE : Hao ZU : \u00ab\u00a0Analyse des propri\u00e9t\u00e9s des r\u00e9sonateurs nano\u00e9lectrom\u00e9caniques \u00e0 membrane en nitrure de silicium pour les futures applications de thermom\u00e9trie optom\u00e9canique\u00a0\u00bb<\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18u73nj-dad6a947580930e400fc42ba200e80f1\">\n#top .hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1{\nmargin-top:5px;\nmargin-bottom:5px;\n}\n.hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1 .hr-inner{\nwidth:100%;\n}\n<\/style>\n<div  class='hr av-18u73nj-dad6a947580930e400fc42ba200e80f1 hr-custom  avia-builder-el-2  el_after_av_heading  el_before_av_textblock  hr-left hr-icon-no'><span class='hr-inner inner-border-av-border-thin'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-jriy64i8-2f4600354c0449b610997916bbd9b6bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" >\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-68e036126b913e5028f77311dc66b825\">\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825{\ncolor:#bfbfbf;\nborder-color:#bfbfbf;\n}\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825 .av-icon-char{\nfont-size:60px;\nline-height:60px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-68e036126b913e5028f77311dc66b825 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue8c9' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><strong>Hao XU<br \/>\n<\/strong><\/p>\n<p>Defense: November 29, 2023 at 10:30 a.m.<strong><br \/>\n<\/strong>IEMN Amphitheatre - Central Laboratory - Villeneuve d'Ascq<\/p>\n<\/div><\/section>\n<section  class='av_textblock_section av-jtefqx33-628129dba2299b2ecd65ebfc92eac29d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div  class='hr av-kjh3zw-4dff888f744b728a1aca9b3a0971493a hr-default  avia-builder-el-6  avia-builder-el-no-sibling'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<h5><strong><span style=\"color: #800000;\">Jury :<\/span><\/strong><\/h5>\n<ul>\n<li>\n<div>Dr. Bernard Legrand, Directeur de Recherches au CNRS-LAAS, Toulouse \u00a0Rapporteur<\/div>\n<div>Pr. Ga\u00eblle Lissorgues, Professeur \u00e0 l\u2019ESIEE, Laboratoire ESYCOM \u00a0Rapporteur<\/div>\n<div>Dr. Eddy Collin, Directeur de Recherches au CNRS,\u00a0 Institut N\u00e9el Examinateur<\/div>\n<div>Pr. Yan Pennec, Professeur \u00e0 l\u2019Universit\u00e9 de Lille Examinateur<\/div>\n<div>Dr. Xin Zhou, Charg\u00e9e de Recherches au CNRS-IEMN,\u00a0 Co-directrice de th\u00e8se<\/div>\n<div>Dr. Didier Th\u00e9ron, Directeur de Recherches au CNRS-IEMN,\u00a0 \u00a0 \u00a0 Directeur de th\u00e8se<\/div>\n<\/li>\n<\/ul>\n<h5>Summary:<\/h5>\n<div>Les micro-nano-r\u00e9sonateurs \u00e9lectrom\u00e9caniques jouent un r\u00f4le de plus en plus important dans divers domaines, tels que les capteurs, les communications \u00e0 haute fr\u00e9quence et m\u00eame la recherche fondamentale. Ils permettent de coupler un d\u00e9placement m\u00e9canique \u00e0 des signaux \u00e9lectriques \u00e0 des fins de d\u00e9tection ou de manipulation. Jusqu\u2019\u00e0 pr\u00e9sent, les chercheurs ont r\u00e9guli\u00e8rement d\u00e9velopp\u00e9 des nouvelles formes de dispositifs afin de r\u00e9pondre aux diverses exigences des applications. R\u00e9cemment, des r\u00e9sonateurs nano\u00e9lectrom\u00e9caniques \u00e0 membrane ont \u00e9t\u00e9 mis au point. Ils se composent d\u2019une membrane en nitrure de silicium coupl\u00e9e de mani\u00e8re capacitive \u00e0 une grille en aluminium suspendue au-dessus de la membrane. Cette conception unique fournit une grande capacit\u00e9 de couplage aux circuits \u00e9lectriques externes, et permet \u00e9galement d\u2019\u00e9tudier le couplage des modes m\u00e9caniques et \u00e9lectriques.<\/div>\n<div>Dans cette th\u00e8se, nous nous sommes concentr\u00e9s sur l\u2019\u00e9tude de ce type de r\u00e9sonateur nano-\u00e9lectrom\u00e9canique. Dans l\u2019analyse th\u00e9orique, nous avons mod\u00e9lis\u00e9 ce r\u00e9sonateur nanom\u00e9canique \u00e0 membrane en nitrure de silicium et grille en aluminium comme un condensateur \u00e0 plaques parall\u00e8les. Les \u00e9quations du mouvement nous permettent d\u2019\u00e9tudier l\u2019amplification param\u00e9trique de la membrane dans les cas d\u00e9g\u00e9n\u00e9r\u00e9s et non d\u00e9g\u00e9n\u00e9r\u00e9s, en r\u00e9gime de r\u00e9ponse lin\u00e9aire. En outre, un sch\u00e9ma de commande \u00e0 double signal (un sur la membrane et un sur la grille) a \u00e9galement \u00e9t\u00e9 \u00e9tudi\u00e9, par analogie avec le syst\u00e8me optom\u00e9canique. Nous avons mod\u00e9lis\u00e9 la transparence et l\u2019amplification induites par le couplage de mode entre les deux r\u00e9sonateurs \u00e0 membrane SiN et \u00e0 grille sup\u00e9rieure en Al. Dans la partie suivante, nous avons pr\u00e9sent\u00e9 les proc\u00e9d\u00e9s de nanofabrication critiques pour la r\u00e9alisation du dispositif. L\u2019\u00e9tape de fluage et l\u2019\u00e9tape de gravure plasma ont \u00e9t\u00e9 discut\u00e9es et analys\u00e9es.\u00a0 Dans le chapitre d\u00e9di\u00e9 aux mesures, en plus de la caract\u00e9risation de base des propri\u00e9t\u00e9s m\u00e9caniques de la membrane actionn\u00e9e capacitivement par la grille en Al, nous exploitons la microscopie \u00e0 micro-ondes \u00e0 balayage (SMM) pour \u00e9tudier les r\u00e9sonateurs \u00e0 membrane en nitrure de silicium, en r\u00e9alisant une cartographie des modes m\u00e9caniques. L\u2019interaction entre la pointe AFM et la membrane a \u00e9t\u00e9 simul\u00e9e sur la base d\u2019un couplage capacitif. En outre, la technique de caract\u00e9risation \u00e0 double signal a \u00e9galement \u00e9t\u00e9 utilis\u00e9e en couplant le mode de la pointe AFM au mode de la membrane. Par ailleurs, nous pr\u00e9sentons un syst\u00e8me optom\u00e9canique \u00e0 micro-ondes dans lequel ce r\u00e9sonateur \u00e0 membrane est coupl\u00e9 capacitivement \u00e0 une cavit\u00e9 \u00e0 micro-ondes, afin de d\u00e9velopper \u00e0 l\u2019avenir un thermom\u00e8tre optom\u00e9canique \u00e0 micro-ondes.<\/div>\n<h5>Abstract:<\/h5>\n<div>Micro-nano-electromechanical resonators play a more and more important role in various domains, such as sensing, high frequency communications, and even in fundamental research. They allow mechanical displacement to be coupled with electrical signals for both detection and manipulation. So far, researchers continue to develop new device designs in order to meet various requirements in applications. More recently, membrane nanoelectromechanical resonators have been developed, consisting of a silicon nitride membrane capacitively coupled to an aluminium suspended top-gate drum. This unique design not only provides large coupling capacitance to external electrical circuits but allows to study mechanical and electrical mode coupling.<\/div>\n<div>In this thesis, we have focused on the study of this type of nanoelectromechanical resonator. In the theoretical analysis, we have modeled this silicon nitride membrane nanomechanical resonator as a parallel plate capacitor. The simple motion equations allow us to analyze parametric amplification in both non-degenerate and degenerate cases, in the linear response region. In addition, a double-tone driving scheme has also been investigated, through an analogy to optomechanical system. Besides, we also modeled both nanoelectromechanically induced transparency and amplification based on mode coupling between the two silicon nitride membrane and aluminium top-gate resonators. In the following part of nanofabrication, we have presented critical fabrication process in achieving the device. Both reflow step and dry etching step have been discussed and analyzed.\u00a0 In the measurement part, besides of basic characterization of mechanical properties through aluminium gate, we exploit scanning microwave microscopy to investigate this silicon nitride membrane resonators, such as spatial mapping of mechanical modes. The interaction between the AFM tip and the membrane has been simulated based on a capacitive coupling. Besides, double-tone driving techniques have also been demonstrated through coupling the AFM tip mode to the membrane mode. In addition, we also discussed microwave optomechanical system in which this membrane resonator is capacitively coupled to a microwave cavity, for developing microwave optomechanical thermometer in the future.<\/div>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":60844,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[65,87,84,318],"tags":[],"class_list":["post-60842","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-agenda","category-agenda-en","category-agenda-en-en","category-these-2023"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/60842","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=60842"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/60842\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media\/60844"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=60842"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=60842"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=60842"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}