{"id":56728,"date":"2023-03-15T11:02:21","date_gmt":"2023-03-15T09:02:21","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=56728"},"modified":"2023-03-31T08:24:57","modified_gmt":"2023-03-31T06:24:57","slug":"detecteur-terahertz-micro-mecanique-a-temperature-ambiante-avec-un-temps-de-reponse-de-1%c2%b5s","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/newsletter\/detecteur-terahertz-micro-mecanique-a-temperature-ambiante-avec-un-temps-de-reponse-de-1%c2%b5s.html","title":{"rendered":"Room temperature micro-mechanical Terahertz detector with a response time of 1\u00b5s"},"content":{"rendered":"<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1wy5crc-7ea17cd7bced7eea2e656f9fbe21b23e\">\n.flex_column.av-1wy5crc-7ea17cd7bced7eea2e656f9fbe21b23e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1wy5crc-7ea17cd7bced7eea2e656f9fbe21b23e av_one_full  avia-builder-el-0  el_before_av_one_full  avia-builder-el-first  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-lfup90g4-52e6ca16ca10747833c20ce1e0a7cac6'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h2 style=\"text-align: center;\"><span style=\"color: #800000;\">A new Terahertz (THz) radiation detector has been demonstrated within the THz Photonics team of the IEMN, in collaboration with the startup Vmicro, a spin-off of the same laboratory.<\/span><\/h2>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lfupjprq-d546cb3b818b18853330f0da01e66fc8\">\n.flex_column.av-lfupjprq-d546cb3b818b18853330f0da01e66fc8{\nborder-radius:20px 20px 20px 20px;\npadding:20px 20px 20px 20px;\nbackground-color:#ede2d0;\n}\n<\/style>\n<div  class='flex_column av-lfupjprq-d546cb3b818b18853330f0da01e66fc8 av_one_full  avia-builder-el-2  el_after_av_one_full  el_before_av_one_full  first flex_column_div  column-top-margin'     ><section  class='av_textblock_section av-lfup01qm-fd67932ba3cd357454ca407c1b51689c'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: left;\" class=\"translation-block\"><strong>Fig. 1<\/strong> In the graph is represented the frequency response of the detector, measured with a quantum cascade laser at 2.5 THz, modulated in amplitude (black curve). The red curve is the result of a fit from an analytical model. <strong>(a)<\/strong> Scanning Electron Microscopy photo of the detector entirely realized on Silicon-on-Insulator (SOI) platform. The suspended \"U\"-shaped microlever can be distinguished. <strong>(b)<\/strong> Simulation of the 1<sup>rst<\/sup> out-of-plane bending mode excited by the incident THz radiation. <strong>(c)<\/strong> Cross-sectional view of the detector. Incident THz radiation is focused onto the antennas by a hyperhemispheric lens (green) in contact with the substrate (gray). The laser beam for the optical reading at 1.55\u00b5m is reflected by the end of the microlever [1].<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-s4toxk-ac0980ce9d6d41e26a1207c0f3fcc579\">\n.flex_column.av-s4toxk-ac0980ce9d6d41e26a1207c0f3fcc579{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-s4toxk-ac0980ce9d6d41e26a1207c0f3fcc579 av_one_full  avia-builder-el-4  el_after_av_one_full  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-lfup01qm-fd67932ba3cd357454ca407c1b51689c'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p>The THz range cruelly lacks detectors operating at room temperature that are both sensitive and fast. The detectors currently on the market, such as thermopiles, pyroelectric detectors, or silicon bolometers have response times typically ranging from 10 to 100ms, which makes them difficult or impossible to use for many applications, such as gas detection or spectroscopy, near-field imaging etc.<\/p>\n<p><strong>C\u2019est pour essayer de combler ce vide que des chercheurs de l\u2019\u00e9quipe Photonique THz, en collaboration avec le personnel de Vmicro, ont con\u00e7u, r\u00e9alis\u00e9 et caract\u00e9ris\u00e9 un nouveau type de d\u00e9tecteur constitu\u00e9 d\u2019un microlevier en silicium de seulement 40mm de longueur et 10mm de largeur.<\/strong> Comme illustr\u00e9 en FIg.1(a),(b), le microlevier prend la forme d\u2019un \u00abU\u00bb. Sur les deux bras est d\u00e9pos\u00e9e une fine couche d\u2019or, ce qui forme deux antennes dipolaires, capables donc de collecter et d\u2019absorber la radiation THz incidente. Par cons\u00e9quence la radiation THz est transform\u00e9e en chaleur par effet Joule dans les couches m\u00e9talliques. A cause de la diff\u00e9rence entre les coefficients d\u2019expansion thermique de l\u2019or et du silicium, ce r\u00e9chauffement produit une flexion hors-plan du microlevier, comme illustr\u00e9 en Fig.1(b) (cet effet est connu sous le nom \u00ab d\u2019effet bilame \u00bb). Cette derni\u00e8re est enfin lue optiquement, gr\u00e2ce \u00e0 un faisceau laser \u00e0 1550 nm qui est r\u00e9fl\u00e9chi par l\u2019extr\u00e9mit\u00e9 du microlevier et dirig\u00e9 vers un syst\u00e8me de d\u00e9tection sensible au d\u00e9placement du faisceau (Fig.1(c)). Grace \u00e0 sa taille extr\u00eamement r\u00e9duite, la constante de temps thermique du microlevier est de l\u2019ordre de la microseconde, ce qui d\u00e9termine le temps de r\u00e9ponse du d\u00e9tecteur. La r\u00e9ponse en fr\u00e9quence illustr\u00e9e en Fig.1 en est la preuve exp\u00e9rimentale.<\/p>\n<p>A new type of detector, both sensitive (NEP ~ 10nW\/Hz^1\/2) and 4 to 5 orders of magnitude faster compared to commercially available detectors has been demonstrated. Moreover, this detector is entirely realized on a SOI platform, thus compatible with CMOS (Complementary Metal Oxide Semiconductor) microelectronics, which could, in the future, allow the realization of a completely integrated reading system.<\/p>\n<p>These results were published in the journal Applied Physics Letters [1].<br \/>\n[1] K. Froberegr at el., <em>SOI-based micro-mechanical terahertz detector operating at room-temperature and atmospheric pressure<\/em>Appl. Phys. Lett. <strong>120<\/strong>, 261103 (2022); <a href=\"https:\/\/dx.doi.org\/10.1063\/5.0095126\" target=\"_blank\" rel=\"noopener\">doi:10.1063\/5.0095126<\/a><\/p>\n<\/blockquote>\n<div  class='avia-button-wrap av-rpqvoq-c3dddfbda59258b11f2dc72cdae53d06-wrap avia-button-left  avia-builder-el-6  avia-builder-el-no-sibling'><a href='mailto:stefano.barbieri@univ-lille.fr'  class='avia-button av-rpqvoq-c3dddfbda59258b11f2dc72cdae53d06 av-link-btn avia-icon_select-yes-left-icon avia-size-small avia-position-left avia-color-silver'   aria-label=\"stefano.barbieri@univ-lille.fr\"><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'><\/span><span class='avia_iconbox_title' >stefano.barbieri@univ-lille.fr<\/span><\/a><\/div>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[297],"tags":[],"class_list":["post-56728","post","type-post","status-publish","format-standard","hentry","category-newsletter"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/56728","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=56728"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/56728\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=56728"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=56728"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=56728"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}