{"id":55389,"date":"2023-02-03T16:02:46","date_gmt":"2023-02-03T14:02:46","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=55389"},"modified":"2023-02-03T16:02:46","modified_gmt":"2023-02-03T14:02:46","slug":"these-l-sauze-elaboration-et-caracterisation-de-couches-minces-de-linbo3-obtenues-par-pulverisation-cathodique-et-ablation-laser-pulsee","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/theses-2022\/these-l-sauze-elaboration-et-caracterisation-de-couches-minces-de-linbo3-obtenues-par-pulverisation-cathodique-et-ablation-laser-pulsee.html","title":{"rendered":"THESE : L.SAUZE \u2013 \u00c9laboration et caract\u00e9risation de couches minces de LiNbO3 obtenues par pulv\u00e9risation cathodique et ablation laser puls\u00e9e"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_58_99n8xlswa4uo\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;border-style:solid;border-color:#000;background-position:0% 0%;background-repeat:no-repeat;width:180px;height:30px;left:0px;top:231px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-quote-right\" style=\"color:#ffffff;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>ACTUALITES<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-55389'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-03cc5bf5cfafdcc8bfd2d313e6a78b7b\">\n#top .av-special-heading.av-av_heading-03cc5bf5cfafdcc8bfd2d313e6a78b7b{\nmargin:0 0 10px 0;\npadding-bottom:4px;\n}\nbody .av-special-heading.av-av_heading-03cc5bf5cfafdcc8bfd2d313e6a78b7b .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-03cc5bf5cfafdcc8bfd2d313e6a78b7b .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-03cc5bf5cfafdcc8bfd2d313e6a78b7b av-special-heading-h2  avia-builder-el-1  el_after_av_layerslider  el_before_av_hr  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >THESE : L.SAUZE \u2013 \u00c9laboration et caract\u00e9risation de couches minces de LiNbO3 obtenues par pulv\u00e9risation cathodique et ablation laser puls\u00e9e <\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18u73nj-dad6a947580930e400fc42ba200e80f1\">\n#top .hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1{\nmargin-top:5px;\nmargin-bottom:5px;\n}\n.hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1 .hr-inner{\nwidth:100%;\n}\n<\/style>\n<div  class='hr av-18u73nj-dad6a947580930e400fc42ba200e80f1 hr-custom  avia-builder-el-2  el_after_av_heading  el_before_av_textblock  hr-left hr-icon-no'><span class='hr-inner inner-border-av-border-thin'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-jriy64i8-2f4600354c0449b610997916bbd9b6bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" >\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-68e036126b913e5028f77311dc66b825\">\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825{\ncolor:#bfbfbf;\nborder-color:#bfbfbf;\n}\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825 .av-icon-char{\nfont-size:60px;\nline-height:60px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-68e036126b913e5028f77311dc66b825 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue8c9' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><strong>L. SAUZE<br \/>\n<\/strong><\/p>\n<p>Soutenance :<strong> 18 janvier 2022<br \/>\n<\/strong><span class=\"titre\">Th\u00e8se de doctorat en Electronique, micro\u00e9lectronique, nano\u00e9lectronique et micro-ondes, Universit\u00e9 Polytechnique Hauts de France.<\/span><\/p>\n<\/div><\/section>\n<section  class='av_textblock_section av-jtefqx33-628129dba2299b2ecd65ebfc92eac29d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div  class='hr av-kjh3zw-4dff888f744b728a1aca9b3a0971493a hr-default  avia-builder-el-6  avia-builder-el-no-sibling'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<h5>Summary:<\/h5>\n<p>Atteindre le plein potentiel de la 5\u00e8me g\u00e9n\u00e9ration d\u2019applications mobiles (5G) n\u00e9cessite de pousser les performances des filtres acoustiques radiofr\u00e9quences au-del\u00e0 de leurs limites actuelles. Les filtres radiofr\u00e9quences hautes performances existants (sup\u00e9rieurs \u00e0 2,5 GHz) sont r\u00e9alis\u00e9s \u00e0 base de nitrure d\u2019aluminium. Leur bande passante est cependant limit\u00e9e par le faible coefficient de couplage \u00e9lectrom\u00e9canique du nitrure d\u2019aluminium. Dans ce contexte, en raison de son coefficient de couplage \u00e9lectrom\u00e9canique plus \u00e9lev\u00e9, le niobate de lithium semble \u00eatre un bon candidat comme mat\u00e9riau pi\u00e9zo\u00e9lectrique. Pour cette application, les couches de niobate de lithium doivent \u00eatre st?chiom\u00e9triques et soit hautement textur\u00e9es, soit mono cristallines. Dans le pr\u00e9sent travail, deux techniques de d\u00e9p\u00f4t ont \u00e9t\u00e9 \u00e9tudi\u00e9es. Plusieurs techniques de caract\u00e9risations ont \u00e9t\u00e9 \u00e9valu\u00e9es afin de pouvoir analyser les propri\u00e9t\u00e9s des couches : leur cristallinit\u00e9, leur rugosit\u00e9, leur composition chimique ou encore leur microstructure. En effet, la couche doit r\u00e9pondre \u00e0 un cahier des charges pr\u00e9cis afin de pouvoir \u00eatre utile pour l\u2019application radiofr\u00e9quences. Dans un premier temps, des couches hautement textur\u00e9es suivant l\u2019axe c (correspondant \u00e0 la famille de plans cristallins 001), d\u00e9pos\u00e9es directement sur substrat silicium par pulv\u00e9risation cathodique radio fr\u00e9quence \u00e0 temp\u00e9rature ambiante et apr\u00e8s recuits ont \u00e9t\u00e9 r\u00e9alis\u00e9s. Dans un second temps, des couches homo\u00e9piatxiales ont \u00e9t\u00e9 obtenues sur des substrats niobate de lithium de diff\u00e9rentes coupes cristallines par ablation laser puls\u00e9e. De plus, les relations de croissance de niobate de lithium sur des substrats de saphir ont \u00e9t\u00e9 mises en \u00e9vidence avec cette m\u00eame technique de d\u00e9p\u00f4t. Enfin, les propri\u00e9t\u00e9s pi\u00e9zo\u00e9lectriques de couches minces de niobate de lithium d\u00e9pos\u00e9es sur \u00e9lectrodes m\u00e9talliques sur des substrats de niobate de lithium, saphir et silicium ont \u00e9t\u00e9 \u00e9tudi\u00e9es avec la r\u00e9alisation d\u2019un r\u00e9sonateur FBAR (Film Bulk Acoustic waves Resonator).<\/p>\n<h5>Abstract:<\/h5>\n<p>Reaching the full potential of 5th generation mobile applications (5G) requires pushing the performance of radio frequency acoustic filters beyond their current limits. Existing high performance RF filters (above 2.5 GHz) are made of aluminum nitride. However, their bandwidth is limited by the low electromechanical coupling coefficient of aluminum nitride. In this context, due to its higher electromechanical coupling coefficient, lithium niobate seems to be a good candidate as a piezoelectric material. For this application, lithium niobate layers must be stoichiometric and either highly textured or mono-crystalline. In the present work, two deposition techniques have been studied. Several characterization techniques have been evaluated in order to analyze the properties of the layers: their crystallinity, their roughness, their chemical composition or their microstructure. Indeed, the layer must meet a precise specification in order to be useful for the radio frequency application. In a first step, highly textured layers along the c-axis (corresponding to the 001 family of crystal planes), deposited directly on silicon substrate by radio frequency sputtering at room temperature and after annealing were realized. In a second step, homoepiatxial layers were obtained on lithium niobate substrates of different crystal cross sections by pulsed laser ablation. Moreover, the growth relationships of lithium niobate on sapphire substrates have been demonstrated with this same deposition technique. Finally, the piezoelectric properties of lithium niobate thin films deposited on metal electrodes on lithium niobate, sapphire and silicon substrates have been studied with the realization of a FBAR (Film Bulk Acoustic waves Resonator).<\/p>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[316],"tags":[],"class_list":["post-55389","post","type-post","status-publish","format-standard","hentry","category-theses-2022"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/55389","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=55389"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/55389\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=55389"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=55389"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=55389"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}