{"id":55334,"date":"2023-02-03T15:55:23","date_gmt":"2023-02-03T13:55:23","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=55334"},"modified":"2023-02-03T15:55:23","modified_gmt":"2023-02-03T13:55:23","slug":"these-lin-q-y-detecteurs-moyen-infrarouge-a-multi-puits-quantiques-ultra-rapides-a-base-dantennes-patch","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/these\/these-2021\/these-lin-q-y-detecteurs-moyen-infrarouge-a-multi-puits-quantiques-ultra-rapides-a-base-dantennes-patch.html","title":{"rendered":"THESE : LIN Q.Y &#8211; D\u00e9tecteurs moyen-infrarouge \u00e0 multi-puits quantiques ultra-rapides, \u00e0 base d&rsquo;antennes patch"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_58_1ae2hjbp3zc3c\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;border-style:solid;border-color:#000;background-position:0% 0%;background-repeat:no-repeat;width:180px;height:30px;left:0px;top:231px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-quote-right\" style=\"color:#ffffff;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>ACTUALITES<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-55334'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lawlb5r3-da30a507943060ef2f5d9c90dac650f2\">\n#top .av-special-heading.av-lawlb5r3-da30a507943060ef2f5d9c90dac650f2{\nmargin:0 0 10px 0;\npadding-bottom:4px;\n}\nbody .av-special-heading.av-lawlb5r3-da30a507943060ef2f5d9c90dac650f2 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-lawlb5r3-da30a507943060ef2f5d9c90dac650f2 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-lawlb5r3-da30a507943060ef2f5d9c90dac650f2 av-special-heading-h2  avia-builder-el-1  el_after_av_layerslider  el_before_av_hr  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >THESE : LIN Q.Y &#8211; D\u00e9tecteurs moyen-infrarouge \u00e0 multi-puits quantiques ultra-rapides, \u00e0 base d\u2019antennes patch <\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18u73nj-dad6a947580930e400fc42ba200e80f1\">\n#top .hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1{\nmargin-top:5px;\nmargin-bottom:5px;\n}\n.hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1 .hr-inner{\nwidth:100%;\n}\n<\/style>\n<div  class='hr av-18u73nj-dad6a947580930e400fc42ba200e80f1 hr-custom  avia-builder-el-2  el_after_av_heading  el_before_av_textblock  hr-left hr-icon-no'><span class='hr-inner inner-border-av-border-thin'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-jriy64i8-2f4600354c0449b610997916bbd9b6bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" >\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-68e036126b913e5028f77311dc66b825\">\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825{\ncolor:#bfbfbf;\nborder-color:#bfbfbf;\n}\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825 .av-icon-char{\nfont-size:60px;\nline-height:60px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-68e036126b913e5028f77311dc66b825 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue8c9' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><strong>LIN Q.Y. <\/strong><\/p>\n<p>Soutenance : 18 octobre 2021<strong><br \/>\n<\/strong>Th\u00e8se de doctorat en Electronique, Photonique, Universit\u00e9 de Lille, ENGSYS Sciences de l\u2019ing\u00e9nierie et des syst\u00e8mes.<\/p>\n<p><strong><br \/>\n<\/strong><\/p>\n<\/div><\/section>\n<section  class='av_textblock_section av-jtefqx33-628129dba2299b2ecd65ebfc92eac29d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div  class='hr av-kjh3zw-4dff888f744b728a1aca9b3a0971493a hr-default  avia-builder-el-6  avia-builder-el-no-sibling'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<h5>Summary:<\/h5>\n<p>Cette Th\u00e8se est consacr\u00e9e \u00e0 la conception, la fabrication et la caract\u00e9risation exp\u00e9rimentale de photod\u00e9tecteurs ultra-rapides \u00e0 base de semi-conducteurs fonctionnant dans le moyen infrarouge (~3-12um). Plus pr\u00e9cis\u00e9ment, les d\u00e9tecteurs que j&rsquo;ai d\u00e9velopp\u00e9s, g\u00e9n\u00e9ralement appel\u00e9s photod\u00e9tecteurs infrarouges \u00e0 multi-puits quantiques (QWIP), reposent sur des transitions inter-sous-bandes (ISB) dans une h\u00e9t\u00e9rostructure GaAs-Al_0.2Ga_0.8As, o\u00f9 un \u00e9lectron occupant l&rsquo;\u00e9tat fondamental d&rsquo;un puits quantique est photoexcit\u00e9 dans un \u00e9tat sup\u00e9rieur, se trouvant en proximit du continuum d&rsquo;\u00e9nergie au-dessus des barri\u00e8res d&rsquo;AlGaAs. Dans mon travail, j&rsquo;ai exploit\u00e9 une g\u00e9om\u00e9trie de dispositif sp\u00e9cifique qui permet le couplage de la lumi\u00e8re \u00e0 incidence normale, bas\u00e9e sur un r\u00e9seau bidimensionnel d&rsquo;antennes patch m\u00e9talliques connect\u00e9es \u00e9lectriquement. Chaque antenne est obtenue en intercalant l&rsquo;h\u00e9t\u00e9rostructure multipuits quantique GaAs-AlGaAs entre une couche m\u00e9tallique de contact sup\u00e9rieure et un plan de masse m\u00e9tallique inf\u00e9rieur, formant ainsi une microcavit\u00e9 carr\u00e9e m\u00e9tal-di\u00e9lectrique-m\u00e9tal, o\u00f9 le mode \u00e9lectromagn\u00e9tique TM fondamental est en r\u00e9sonance avec le l&rsquo;\u00e9nergie de la transition ISB. Enfin, pour permettre l&rsquo;extraction de micro-ondes sur une large bande, le r\u00e9seau d&rsquo;antennes est connect\u00e9 \u00e0 un guide d&rsquo;onde coplanaire 50Ohm, int\u00e9gr\u00e9 de fa\u00e7on monolithique. Dans la premi\u00e8re partie de mon travail, j&rsquo;ai con\u00e7u les antennes pour une d\u00e9tection optimale \u00e0 une longueur d&rsquo;onde de 10 \u00b5m. Cela a \u00e9t\u00e9 fait par le biais de simulations \u00e0 l&rsquo;aide d&rsquo;un solveur \u00e9lectromagn\u00e9tique commercial bas\u00e9 sur la m\u00e9thode des \u00e9l\u00e9ments finis (FDTD). Sur la base des r\u00e9sultats des simulations, j&rsquo;ai fabriqu\u00e9 un ensemble de structures pr\u00e9liminaires, sans guide d&rsquo;onde coplanaire, afin de caract\u00e9riser les propri\u00e9t\u00e9s optiques du r\u00e9seau d&rsquo;antennes par des mesures de micro-r\u00e9flectance par transform\u00e9e de Fourier. Ces mesures m&rsquo;ont permis de s\u00e9lectionner les dimensions optimales du r\u00e9seau de patchs, \u00e0 savoir la taille lat\u00e9rale du patch carr\u00e9 et la p\u00e9riodicit\u00e9 du r\u00e9seau. La deuxi\u00e8me partie de mon travail a \u00e9t\u00e9 consacr\u00e9e \u00e0 la fabrication du d\u00e9tecteur QWIP complet, y compris le guide d&rsquo;onde coplanaire int\u00e9gr\u00e9. Dans ces d\u00e9tecteurs, la taille du r\u00e9seau d&rsquo;antennes bidimensionnelles a \u00e9t\u00e9 r\u00e9duite au minimum, sans pour autant compromettre la collection de la radiation incidente, afin de r\u00e9duire autant que possible la constante de temps RC du dispositif et donc de maximiser la vitesse du d\u00e9tecteur. J&rsquo;ai fabriqu\u00e9 deux g\u00e9n\u00e9rations de d\u00e9tecteurs reposant sur deux r\u00e9gions actives l\u00e9g\u00e8rement diff\u00e9rentes, respectivement bas\u00e9es sur une transition ISB de type li\u00e9-li\u00e9 et li\u00e9-continu. Dans la derni\u00e8re partie de mon doctorat, j&rsquo;ai \u00e9galement fabriqu\u00e9 une troisi\u00e8me g\u00e9n\u00e9ration de dispositifs, o\u00f9 le r\u00e9seau de patchs, plut\u00f4t qu&rsquo;\u00e0 un guide d&rsquo;onde coplanaire, est connect\u00e9 \u00e0 une antenne THz spirale. Ce dispositif n&rsquo;a pas \u00e9t\u00e9 caract\u00e9ris\u00e9 dans ce travail et je pr\u00e9sente sa pertinence dans le cadre de cette Th\u00e8se dans les perspectives. La derni\u00e8re partie de la Th\u00e8se est consacr\u00e9e \u00e0 la caract\u00e9risation \u00e9lectro-optique des d\u00e9tecteurs fabriqu\u00e9s. Tout d&rsquo;abord, j&rsquo;ai mesur\u00e9 le courant d&rsquo;obscurit\u00e9, la d\u00e9pendance \u00e0 la polarisation et la photor\u00e9ponse continue, ce qui m&rsquo;a permis de d\u00e9terminer la responsivit\u00e9 \u00e0 77K et 300K. Ensuite, j&rsquo;ai caract\u00e9ris\u00e9 la r\u00e9ponse en fr\u00e9quence micro-onde des d\u00e9tecteurs. A cet effet, j&rsquo;ai particip\u00e9 \u00e0 la mise en place d&rsquo;un banc exp\u00e9rimental bas\u00e9 sur une station sous pointes cryog\u00e9nique large bande (67GHz). Dans ce banc, les faisceaux de deux lasers \u00e0 cascade quantique (QCL) \u00e9mettant \u00e0 une longueur d&rsquo;onde de 10.3 \u00b5m sont focalis\u00e9s simultan\u00e9ment sur le d\u00e9tecteur QWIP pour g\u00e9n\u00e9rer un signal de battement h\u00e9t\u00e9rodyne \u00e0 leur diff\u00e9rence de fr\u00e9quence. En changeant la temp\u00e9rature\/courant d\u2019un QCL, la fr\u00e9quence de battement h\u00e9t\u00e9rodyne peut \u00eatre balay\u00e9e en continu, permettant ainsi d\u2019obtenir la r\u00e9ponse en fr\u00e9quence du d\u00e9tecteur \u00e0 l&rsquo;aide d&rsquo;un analyseur de spectre. A temp\u00e9rature ambiante j&rsquo;obtiens une r\u00e9ponse.<\/p>\n<h5>Abstract:<\/h5>\n<p>This thesis is devoted to the design, fabrication and experimental characterization of ultrafast semiconductor-based photodetectors operating in the mid-infrared (~3-12um). Specifically, the detectors I have developed, generally referred to as quantum multi-well infrared (QWIP) photodetectors, rely on inter-subband transitions (ISBs) in a GaAs-Al_0.2Ga_0.8As heterostructure, where an electron occupying the ground state of a quantum well is photoexcited into a higher state, lying proximate to the energy continuum above the AlGaAs barriers. In my work, I have exploited a specific device geometry that allows the coupling of light at normal incidence, based on a two-dimensional array of electrically connected metallic patch antennas. Each antenna is obtained by intercalating the GaAs-AlGaAs quantum multiwell heterostructure between an upper metal contact layer and a lower metal ground plane, thus forming a square metal-electrical-metal microcavity, where the fundamental TM electromagnetic mode is in resonance with the ISB transition energy. Finally, to enable broadband microwave extraction, the antenna array is connected to a monolithically integrated 50Ohm coplanar waveguide. In the first part of my work, I designed the antennas for optimal detection at a wavelength of 10 \u00b5m. This was done through simulations using a commercial electromagnetic solver based on the finite element method (FDTD). Based on the results of the simulations, I fabricated a set of preliminary structures, without coplanar waveguide, in order to characterize the optical properties of the antenna array by Fourier transform microreflectance measurements. These measurements allowed me to select the optimal dimensions of the patch array, namely the lateral size of the square patch and the periodicity of the array. The second part of my work was devoted to the fabrication of the complete QWIP detector, including the integrated coplanar waveguide. In these detectors, the size of the two-dimensional antenna array was minimized, without compromising the collection of incident radiation, in order to minimize the RC time constant of the device and thus maximize the detector speed. I have fabricated two generations of detectors based on two slightly different active regions, respectively based on a bonded-bound and bonded-continuous ISB transition. In the last part of my PhD, I also fabricated a third generation of devices, where the patch array, instead of a coplanar waveguide, is connected to a spiral THz antenna. This device has not been characterized in this work and I present its relevance to this Thesis in the perspectives. The last part of the thesis is devoted to the electro-optical characterization of the fabricated detectors. First, I measured the dark current, polarization dependence and continuous photoresponse, which allowed me to determine the responsivity at 77K and 300K. Then, I characterized the microwave frequency response of the detectors. For this purpose, I participated in the setting up of an experimental bench based on a wide band (67GHz) cryogenic spike station. In this bench, the beams of two quantum cascade lasers (QCL) emitting at a wavelength of 10.3 \u00b5m are simultaneously focused on the QWIP detector to generate a heterodyne beat signal at their frequency difference. By changing the temperature\/current of a QCL, the heterodyne beat frequency can be continuously scanned, thus allowing the frequency response of the detector to be obtained using a spectrum analyzer. At room temperature I get a response.<\/p>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":20,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[317],"tags":[],"class_list":["post-55334","post","type-post","status-publish","format-standard","hentry","category-these-2021"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/55334","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=55334"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/55334\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=55334"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=55334"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=55334"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}