{"id":50329,"date":"2022-01-28T12:03:40","date_gmt":"2022-01-28T10:03:40","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=50329"},"modified":"2022-03-21T12:01:34","modified_gmt":"2022-03-21T10:01:34","slug":"these-de-abbas-salhab-dynamic-characterization-of-the-wetting-and-drying-states-of-dti-deep-trench-isolation-structures-by-high-frequency-ultrasonic-waves","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/actualites\/these-de-abbas-salhab-dynamic-characterization-of-the-wetting-and-drying-states-of-dti-deep-trench-isolation-structures-by-high-frequency-ultrasonic-waves.html","title":{"rendered":"Th\u00e8se de Abbas Salhab : \u00ab\u00a0Dynamic characterization of the wetting and drying states of DTI (Deep Trench Isolation) structures by high frequency ultrasonic waves\u00a0\u00bb"},"content":{"rendered":"<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-19nsqwp-911adf25aa5585c7496496e6119eca62\">\n.flex_column.av-19nsqwp-911adf25aa5585c7496496e6119eca62{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-19nsqwp-911adf25aa5585c7496496e6119eca62 av_one_full  avia-builder-el-0  avia-builder-el-no-sibling  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-kyy8m2rg-26f786efefb226ae3d471eb53d25a017'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h4 style=\"text-align: center;\">Th\u00e8se de Abbas SALHAB<\/h4>\n<h4 style=\"text-align: center;\">\u00ab\u00a0Dynamic characterization of the wetting and drying states of DTI (Deep Trench Isolation) structures by high frequency ultrasonic waves\u00a0\u00bb<\/h4>\n<blockquote><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ikveov-92c0e1e8a70f730b34d6ee48b092e96b\">\n.av_font_icon.av-ikveov-92c0e1e8a70f730b34d6ee48b092e96b .av-icon-char{\nfont-size:30px;\nline-height:30px;\n}\n<\/style>\n<span  class='av_font_icon av-ikveov-92c0e1e8a70f730b34d6ee48b092e96b avia_animate_when_visible av-icon-style- avia-icon-pos-left av-no-color avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue8c9' data-av_iconfont='entypo-fontello' ><\/span><\/span>Soutenance de th\u00e8se le 4 f\u00e9vrier 2022 \u00e0 14h<br \/>\nAmphith\u00e9\u00e2tre de l&rsquo;IEMN-DOAE &#8211; Universit\u00e9 Polytechnique Hauts-de-France<\/p>\n<\/blockquote>\n<h5><\/h5>\n<h5>Jury :<\/h5>\n<p>Corinne DEJOUS, Professeur, IMS Bordeaux, ENSEIRB (Valence), Rapporteur<br \/>\nEmmanuel LE CLEZIO, Professeur, Universit\u00e9 de Montpellier, IES de Montpellier, Rapporteur<br \/>\nRaluca TIRON, Directrice de recherche, CEA \u2013 Leti (Grenoble), Examinateur<br \/>\nXiumei XU, Ing\u00e9nieur de recherche, IMEC (Louvain), Examinateur<br \/>\nJulien CARLIER, Professeur, UPHF \u2013 IEMN, Directeur de th\u00e8se<br \/>\nVincent THOMY, Professeur, ULille \u2013 IEMN, Directeur de th\u00e8se<br \/>\nPierre CAMPISTRON, Directeur, UPHF \u2013 IEMN, Encadrant<br \/>\nMalika TOUBAL, Directeur, UPHF \u2013 IEMN, Examinateur<br \/>\nBertrand NONGAILLARD, Professeur, UPHF \u2013 IEMN, Invit\u00e9<br \/>\nMarc NEYENS, Directeur, STMicroelectronics (Crolles), Invit\u00e9<\/p>\n<h5>Summary:<\/h5>\n<p>Dans l&rsquo;industrie des semi-conducteurs, un nettoyage efficace des contaminations par voie humide est un facteur d\u00e9terminant pour garantir la bonne qualit\u00e9 des produits \u00e9lectroniques. Le cycle entre les processus de mouillage et de s\u00e9chage peut alors cr\u00e9er plusieurs probl\u00e8mes dans les structures micro\/nanom\u00e9triques \u00e0 rapport d&rsquo;aspect \u00e9lev\u00e9. Dans ce travail de th\u00e8se, nous pr\u00e9sentons la caract\u00e9risation due mouillage dynamique de fluides au sein de structures \u00ab\u00a0Deep Trench Isolation\u00a0\u00bb (DTI) utilis\u00e9s dans les capteurs imageurs de STMicroelectronics. Cette caract\u00e9risation utilise une technique originale de r\u00e9flectom\u00e9trie d&rsquo;ondes acoustiques \u00e0 ultra-hautes fr\u00e9quences. Afin d&rsquo;obtenir des conditions de nettoyage aussi proches que possible de celles utilis\u00e9es dans le proc\u00e9d\u00e9 industriel, le mouillage dynamique est assur\u00e9 par un canal microfluidique r\u00e9alis\u00e9 en PolyDiMethylSiloxane (PDMS) localis\u00e9 au niveau des structures \u00e0 \u00e9tudier.<br \/>\nUn mod\u00e8le num\u00e9rique analytique bas\u00e9 sur les diff\u00e9rences finies 2D nous a permis de simuler les interactions acoustiques \u00e0 l&rsquo;int\u00e9rieur des micro\/nanostructures pour interpr\u00e9ter au mieux les r\u00e9sultats exp\u00e9rimentaux. De plus, le d\u00e9veloppement d&rsquo;une technique d&rsquo;acquisition automatique du coefficient de r\u00e9flexion acoustique a donn\u00e9 la possibilit\u00e9 d\u201f\u00e9tudier les processus rapides de mouillage des structures DTI. Enfin, la cin\u00e9matique de s\u00e9chage des DTI a \u00e9galement \u00e9t\u00e9 \u00e9tudi\u00e9e avec diff\u00e9rents liquides. Des ph\u00e9nom\u00e8nes de d\u00e9formation des structures (\u00ab\u00a0pattern collapse\u00a0\u00bb) ont \u00e9t\u00e9 analys\u00e9s \u00e0 l&rsquo;aide d&rsquo;images de microscopie \u00e9lectronique \u00e0 balayage (MEB) et corr\u00e9l\u00e9s avec les mesures acoustiques.<\/p>\n<h5>Abstract:<\/h5>\n<p>In the semiconductor industry, effective wet cleaning of contamination is a critical factor in ensuring good quality of electronic products. The cycle between the wetting and drying processes can create several problems in the high aspect ratio micro \/ nanoscale structures. In this thesis work, we present the characterization of the dynamic wetting of fluids within Deep Trench Isolation (DTI) structures used in STMicroelectronics imaging sensors. This characterization uses an original technique of acoustic waves reflectometry at ultra-high frequencies. In order to obtain cleaning conditions as close as possible to those used in the industrial process, dynamic wetting is provided by a microfluidic channel made of PolyDiMethylSiloxane (PDMS) located at the level of the structures to be studied.<br \/>\nAn analytical numerical model based on 2D finite difference allowed us to simulate the acoustic interactions inside micro \/ nanostructures to better interpret the experimental results. In addition, the development of a technique for the automatic acquisition of the acoustic reflection coefficient has made it possible to study the rapid wetting processes of DTI structures. Finally, the kinematics of DTI drying was also studied with different liquids. Structural deformation phenomenon, known as \u00ab\u00a0pattern collapse\u00a0\u00bb, was analyzed using scanning electron microscopy (SEM) images and correlated with acoustic measurements.<\/p>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":50342,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[8,40],"tags":[],"class_list":["post-50329","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-actualites","category-articles-temporaires-anglais"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/50329","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=50329"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/50329\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media\/50342"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=50329"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=50329"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=50329"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}