{"id":48705,"date":"2021-12-06T18:11:18","date_gmt":"2021-12-06T16:11:18","guid":{"rendered":"https:\/\/www.iemn.fr\/articles-temporaires-anglais\/48691-2.html"},"modified":"2021-12-07T11:57:48","modified_gmt":"2021-12-07T09:57:48","slug":"48691-2","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/newsletter\/48691-2.html","title":{"rendered":"Fast X-ray nanotomography with sub-10 nm resolution, a powerful imaging tool for nanotechnology and electrochemical energy storage"},"content":{"rendered":"<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-m6q1lf-d93b8340953229131dbc6c7ff74248b7\">\n.flex_column.av-m6q1lf-d93b8340953229131dbc6c7ff74248b7{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-m6q1lf-d93b8340953229131dbc6c7ff74248b7 av_one_full  avia-builder-el-0  avia-builder-el-no-sibling  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-kwuvf15y-6c510895f3646b8ca2313fc5baf5d29a'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3 style=\"text-align: center;\">Fast X-ray nanotomography with sub-10 nm resolution, a powerful imaging tool for nanotechnology and electrochemical energy storage<\/h3>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/12\/Nanomoto.png\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-48695 alignleft\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/12\/Nanomoto-300x278.png\" alt=\"\" width=\"276\" height=\"255\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/12\/Nanomoto-300x278.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/12\/Nanomoto-13x12.png 13w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/12\/Nanomoto.png 536w\" sizes=\"auto, (max-width: 276px) 100vw, 276px\" \/><\/a><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lgrjmb-91662bfdae75a286433967ede329d50f\">\n.av_font_icon.av-lgrjmb-91662bfdae75a286433967ede329d50f{\ncolor:#7bb0e7;\nborder-color:#7bb0e7;\n}\n.av_font_icon.av-lgrjmb-91662bfdae75a286433967ede329d50f .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-lgrjmb-91662bfdae75a286433967ede329d50f avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue826' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><strong>Tomographic analysis of a 3D electrode<\/strong>.<\/p>\n<p>a) Preparation and analysis by double beam microscopy of a 3D Si \/ Al2O3 \/ Pt \/ T-Nb2O5 electrode.<br \/>\nb,c) 3D reconstruction by TXM of a T-Nb2O5 electrode deposited by ALD (b) and by DC magnetron sputtering (c) on a silicon micro-tube array covered with an Al2O3 \/ Pt stack deposited by ALD. Pt and T-Nb2O5 are shown in blue and red, respectively.<br \/>\nd,e) Zooms on cross sections of the samples prepared by ALD (d) and magnetron sputtering (e).<br \/>\nf,g) Profiles of the average thickness of Pt and T-Nb2O5 as a function of micro-tube depth.<\/p>\n<h5>Abstract:<\/h5>\n<p>During the last decade, transmission x-ray microscopes have been put into operation in most of the world&rsquo;s synchrotrons. They are exceptional tools for non-invasive three-dimensional characterization of materials. However, their spatial resolution has not improved for many years, while new functional materials and micro-devices show ever finer nanostructures. In a recent work, fast (85 min) 3D tomographic acquisitions were performed with a spatial resolution of less than 10 nm. This technique, which reduces the gap between X-ray microscopy and electron microscopy, has been used to study the morphology and conformality of thin films deposited by ALD (Atomic Layer Deposition) or magnetron sputtering on silicon micro-tubes, for electrochemical energy storage applications.<\/p>\n<h5 style=\"text-align: center;\">Article<\/h5>\n<blockquote>\n<p>The potential of Transmission X-Ray Microscopes (TXM) in nanometer resolution ranges has been demonstrated by a team from IEMN, CIRIMAT and APS synchrotron in Chicago for electrochemical energy storage micro-devices based on 3D niobium pentoxide (T-Nb2O5) electrodes.<\/p>\n<\/blockquote>\n<p>This study investigated the suitability of two different deposition methods compatible with the microelectronics industry for large-scale component production (ALD atomic layer deposition and magnetron sputtering). A single micro-tube coated with Al2O3, Pt and T-Nb2O5was plated on a copper substrate using a FIB (Focussed Ion Beam) preparation performed at IEMN..<\/p>\n<p>The tomographic analysis by TXM with nanometric resolution was performed on the Argonne synchrotron (Advanced Photon Source) in Chicago and confirmed the importance of using conformal deposition methods to cover substrates or surfaces with complex geometries. As such, the evolution of the thickness of the T-Nb2O5 electrode deposited by ALD or magnetron sputtering was measured as a function of the depth of a silicon micro-tube. The TXM analysis confirms that sputtering cannot be used to conformally coat high aspect ratio 3D silicon skeletons.<\/p>\n<p><div  class='avia-button-wrap av-rpqvoq-1745616a2244775359b95e45b9cb9b9e-wrap avia-button-left  avia-builder-el-3  el_after_av_font_icon  el_before_av_font_icon'><a href='mailto:christophe.lethien@univ-lille.fr'  class='avia-button av-rpqvoq-1745616a2244775359b95e45b9cb9b9e av-link-btn avia-icon_select-yes-left-icon avia-size-small avia-position-left avia-color-silver'   aria-label=\"christophe.lethien@univ-lille.fr\"><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'><\/span><span class='avia_iconbox_title' >christophe.lethien@univ-lille.fr<\/span><\/a><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ijboe9-601f5980916de9ac4420dc6a62ead68c\">\n.av_font_icon.av-ijboe9-601f5980916de9ac4420dc6a62ead68c .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-ijboe9-601f5980916de9ac4420dc6a62ead68c avia_animate_when_visible av-icon-style- avia-icon-pos-left av-no-color avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue80c' data-av_iconfont='entypo-fontello' ><\/span><\/span>Vincent De Andrade, Viktor Nikitin, Michael Wojcik, Alex Deriy, Sunil Bean, Deming Shu, Tim Mooney, Kevin Peterson, Prabhat Kc, Kenan Li, Sajid Ali, Kamel Fezzaa, Doga Gursoy, Cassandra Arico, Saliha Ouendi, David Troadec, Patrice Simon, Francesco De Carlo, and Christophe Lethien<\/p>\n<ul>\n<li>Fast X-ray Nanotomography with Sub-10 nm Resolution as a Powerful Imaging Tool for Nanotechnology and Energy Storage Applications<\/li>\n<li>Advanced Materials 33, no. 21, 2008653 (2021).<\/li>\n<li>https:\/\/dx.doi.org\/10.1002\/adma.202008653<\/li>\n<\/ul>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[297],"tags":[],"class_list":["post-48705","post","type-post","status-publish","format-standard","hentry","category-newsletter"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/48705","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=48705"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/48705\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=48705"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=48705"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=48705"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}