{"id":44651,"date":"2021-03-05T16:36:48","date_gmt":"2021-03-05T14:36:48","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=44651"},"modified":"2021-04-06T08:34:43","modified_gmt":"2021-04-06T06:34:43","slug":"elaboration-et-caracterisation-thermoelectrique-de-fines-couches-de-polysilicium-nanostructure-par-anodisation","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/newsletter\/elaboration-et-caracterisation-thermoelectrique-de-fines-couches-de-polysilicium-nanostructure-par-anodisation.html","title":{"rendered":"Elaboration et caract\u00e9risation thermo\u00e9lectrique de fines couches de polysilicium nanostructur\u00e9 par anodisation"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_one_full  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_27_17olcln73z742\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore 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l'IEMN<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-44651'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-uhyf4b-eacef0d5170c33e0810a94144de587a0\">\n.flex_column.av-uhyf4b-eacef0d5170c33e0810a94144de587a0{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-uhyf4b-eacef0d5170c33e0810a94144de587a0 av_one_full  avia-builder-el-1  el_after_av_layerslider  avia-builder-el-no-sibling  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-klwehua2-f14a7ae5f1bcacc244a0e1a25480b0be'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h3 style=\"text-align: center;\">Elaboration et caract\u00e9risation thermo\u00e9lectrique de fines couches de polysilicium nanostructur\u00e9 par anodisation<\/h3>\n<hr \/>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD3.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-44667\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD3-300x182.jpg\" alt=\"\" width=\"600\" height=\"364\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD3-300x182.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD3-768x466.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD3-16x10.jpg 16w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD3-705x428.jpg 705w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD3.jpg 808w\" sizes=\"auto, (max-width: 600px) 100vw, 600px\" \/><\/a>Durant la derni\u00e8re d\u00e9cennie, le march\u00e9 de l\u2019internet des objets (IoT) s\u2019est d\u00e9velopp\u00e9 de fa\u00e7on quasi exponentielle. La question \u00e9nerg\u00e9tique est devenue l\u2019un des enjeux majeurs pour les IoTs mais aussi, plus largement, pour tous les microsyst\u00e8mes. Toutes les solutions innovantes et respectueuses de l\u2019environnement pour r\u00e9cup\u00e9rer l\u2019\u00e9nergie jouent d\u00e9sormais un r\u00f4le strat\u00e9gique dans le d\u00e9veloppement de ces nouvelles technologies et m\u00eame font l\u2019objet de travaux de recherche et de publications de plus en plus importants. L\u2019abondance de la chaleur qui repr\u00e9sente l\u2019\u00e9nergie sous sa forme la plus d\u00e9grad\u00e9e \u2013 toute \u00e9nergie tend \u00e0 devenir de la chaleur \u2013 donne un int\u00e9r\u00eat particulier \u00e0 la thermo\u00e9lectricit\u00e9. Pour les applications miniatures, l\u2019effet thermo\u00e9lectrique (TE) a \u00e9t\u00e9 jusqu\u2019alors principalement exploit\u00e9 dans les capteurs thermiques ou dans les d\u00e9tecteurs infrarouges, o\u00f9 il favorise des sensibilit\u00e9s \u00e9lev\u00e9es malgr\u00e9 le faible rendement de conversion.<\/p>\n<p>L\u2019efficacit\u00e9 de conversion des mat\u00e9riaux TE, utilis\u00e9s dans les thermog\u00e9n\u00e9rateurs classiques, est directement li\u00e9e \u00e0 leur facteur de m\u00e9rite adimensionnel \u00a0<a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule1.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-44675\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule1.jpg\" alt=\"\" width=\"82\" height=\"16\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule1.jpg 110w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule1-16x3.jpg 16w\" sizes=\"auto, (max-width: 82px) 100vw, 82px\" \/><\/a> (o\u00f9 <a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule2.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-44677\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule2.jpg\" alt=\"\" width=\"13\" height=\"12\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule2.jpg 15w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule2-13x12.jpg 13w\" sizes=\"auto, (max-width: 13px) 100vw, 13px\" \/><\/a> est la conductivit\u00e9 \u00e9lectrique, a le pouvoir thermo\u00e9lectrique et <a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule4.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-44679\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule4.jpg\" alt=\"\" width=\"18\" height=\"14\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule4.jpg 20w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/formule4-16x12.jpg 16w\" sizes=\"auto, (max-width: 18px) 100vw, 18px\" \/><\/a> la conductivit\u00e9 thermique du mat\u00e9riau TE). Ces propri\u00e9t\u00e9s physiques d\u00e9pendent de mani\u00e8re oppos\u00e9e de la densit\u00e9 de porteurs et de la temp\u00e9rature, ce qui complique l\u2019optimisation de leur performance. Les principales pistes \u00e9tudi\u00e9es pour l\u2019am\u00e9lioration de ces mat\u00e9riaux ont recours \u00e0 la nanostructuration, en particulier pour r\u00e9duire la composante phononique de la conductivit\u00e9 thermique. L\u2019utilisation de nanostructures, de syst\u00e8mes de faible dimensionnalit\u00e9 ou de structuration nano-composite permet de confiner le transport thermique des phonons en 2D ou voire m\u00eame quasi-1D.<\/p>\n<p>Les travaux effectu\u00e9s \u00e0 l\u2019IEMN, dans le domaine de la thermo\u00e9lectricit\u00e9, ont permis de d\u00e9velopper une nouvelle m\u00e9thode pour fabriquer de fines couches de polysilicium nanostructur\u00e9, isol\u00e9es \u00e9lectriquement de leur substrat silicium. Les caract\u00e9risations ont montr\u00e9 que la porosification des couches de polysilicium (POpSi) r\u00e9duit drastiquement leur conductivit\u00e9 thermique sans impacter leur pouvoir thermo\u00e9lectrique. Cette am\u00e9lioration de la composante thermique surcompense la d\u00e9gradation de la conductivit\u00e9 \u00e9lectrique et permet ainsi une augmentation de 25 fois du facteur de m\u00e9rite (pour une couche de POpSi avec une porosit\u00e9 de 44%, ZT ~ 0.1). Les simulations, sous COMSOL 3D\u00ae montrent que l\u2019int\u00e9gration de telles couches dans des thermog\u00e9n\u00e9rateurs planaires r\u00e9alis\u00e9es sur membranes suspendues (technologies IEMN) permettraient une augmentation de 30 % de leur rendement de conversion.<\/p>\n<p><strong>Flow chart of the porous polysilicon layer (a to d) and plated thermocouple strip (f)<\/strong><\/p>\n<p><a href=\"..\/wp-content\/uploads\/2021\/03\/visuel_kz1.jpg\">\u00a0\u00a0\u00a0\u00a0\u00a0 <\/a><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD1.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignleft wp-image-44669\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD1-300x259.jpg\" alt=\"\" width=\"400\" height=\"345\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD1-300x259.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD1-14x12.jpg 14w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD1.jpg 494w\" sizes=\"auto, (max-width: 400px) 100vw, 400px\" \/><\/a><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD2.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-44668\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD2-300x243.jpg\" alt=\"\" width=\"400\" height=\"324\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD2-300x243.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD2-16x12.jpg 16w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD2-495x400.jpg 495w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2021\/03\/visuelHD2.jpg 613w\" sizes=\"auto, (max-width: 400px) 100vw, 400px\" \/><\/a><\/p>\n<p>Katir Ziouche, Ibrahim Bel-Hadj and Zahia Bougrioua<br \/>\nNano Energy, 80 (2021) 105553, <a href=\"https:\/\/doi.org\/10.1016\/j.nanoen.2020.105553\" target=\"_blank\" rel=\"noopener\">https:\/\/doi.org\/10.1016\/j.nanoen.2020.105553<\/a><\/p>\n<div  class='avia-button-wrap av-rpqvoq-162c699fc5260589c21a7ff2857dafd1-wrap avia-button-left  avia-builder-el-3  avia-builder-el-no-sibling'><a href='mailto:katir.ziouche@univ-lille.fr'  class='avia-button av-rpqvoq-162c699fc5260589c21a7ff2857dafd1 av-link-btn avia-icon_select-yes-left-icon avia-size-small avia-position-left avia-color-silver'   aria-label=\"katir.ziouche@univ-lille.fr\"><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'><\/span><span class='avia_iconbox_title' >katir.ziouche@univ-lille.fr<\/span><\/a><\/div>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[297],"tags":[],"class_list":["post-44651","post","type-post","status-publish","format-standard","hentry","category-newsletter"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/44651","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=44651"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/44651\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=44651"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=44651"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=44651"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}