{"id":42288,"date":"2020-07-01T07:59:22","date_gmt":"2020-07-01T05:59:22","guid":{"rendered":"https:\/\/www.iemn.fr\/articles-temporaires\/these-salim-alhajj-assaf-textiles-innovants-nanostructures-pour-le-confort-thermique-2.html"},"modified":"2020-08-31T09:00:12","modified_gmt":"2020-08-31T07:00:12","slug":"these-salim-alhajj-assaf-textiles-innovants-nanostructures-pour-le-confort-thermique-2","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/these\/these-salim-alhajj-assaf-textiles-innovants-nanostructures-pour-le-confort-thermique-2.html","title":{"rendered":"S\u00e9bastien AROULANDA \u2013 Co-int\u00e9gration de HEMT GaN hyperfr\u00e9quence normally-off avec des normally-on"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_58_1i6o91hrd8p4g\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2019\/01\/sliders_news1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;border-style:solid;border-color:#000;background-position:0% 0%;background-repeat:no-repeat;width:180px;height:30px;left:0px;top:231px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-quote-right\" style=\"color:#ffffff;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>ACTUALITES<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-42288'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-e2673c4ee7e022c9050feefc569c1bb8\">\n#top .av-special-heading.av-av_heading-e2673c4ee7e022c9050feefc569c1bb8{\nmargin:0 0 10px 0;\npadding-bottom:4px;\n}\nbody .av-special-heading.av-av_heading-e2673c4ee7e022c9050feefc569c1bb8 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-e2673c4ee7e022c9050feefc569c1bb8 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-e2673c4ee7e022c9050feefc569c1bb8 av-special-heading-h2  avia-builder-el-1  el_after_av_layerslider  el_before_av_hr  avia-builder-el-first'><h2 class='av-special-heading-tag'  itemprop=\"headline\"  >THESE : S\u00e9bastien AROULANDA \u2013 Co-int\u00e9gration de HEMT GaN hyperfr\u00e9quence normally-off avec des normally-on<\/h2><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18u73nj-dad6a947580930e400fc42ba200e80f1\">\n#top .hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1{\nmargin-top:5px;\nmargin-bottom:5px;\n}\n.hr.av-18u73nj-dad6a947580930e400fc42ba200e80f1 .hr-inner{\nwidth:100%;\n}\n<\/style>\n<div  class='hr av-18u73nj-dad6a947580930e400fc42ba200e80f1 hr-custom  avia-builder-el-2  el_after_av_heading  el_before_av_textblock  hr-left hr-icon-no'><span class='hr-inner inner-border-av-border-thin'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-jriy64i8-2f4600354c0449b610997916bbd9b6bc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" >\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-68e036126b913e5028f77311dc66b825\">\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825{\ncolor:#bfbfbf;\nborder-color:#bfbfbf;\n}\n.av_font_icon.av-13ewzjw-68e036126b913e5028f77311dc66b825 .av-icon-char{\nfont-size:60px;\nline-height:60px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-68e036126b913e5028f77311dc66b825 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue8c9' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><strong>S\u00e9bastien AROULANDA<\/strong><\/p>\n<p>Soutenance : 16 septembre 2020 \u00e0 9h30<strong><br \/>\n<\/strong>IEMN Amphitheatre - Central Laboratory - Villeneuve d'Ascq<\/p>\n<\/div><\/section>\n<section  class='av_textblock_section av-jtefqx33-628129dba2299b2ecd65ebfc92eac29d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><div  class='hr av-kjh3zw-4dff888f744b728a1aca9b3a0971493a hr-default  avia-builder-el-6  avia-builder-el-no-sibling'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<h5><strong><span style=\"color: #800000;\">Jury :<\/span><\/strong><\/h5>\n<ul>\n<li>Christophe\u00a0GAQUIERE, Professeur, Universit\u00e9 de Lille, Directeur de th\u00e8se<\/li>\n<li>Susana P\u00e9REZ SANTOS, Professeur, Universit\u00e9 de Salamanque, Examinateur<\/li>\n<li>Jean-Marie BLUET, Professeur, INSA Lyon, Rapporteur<\/li>\n<li>Jean-Claude DE JAEGER, Professeur, Universit\u00e9 de Lille, CoDirecteur de th\u00e8se<\/li>\n<li>Nathalie MALBERT, Professeur, Universit\u00e9 de Bordeaux, Examinateur<\/li>\n<li>Fran\u00e7ois JULIEN, Directeur de recherche, Centre de Nanosciences et de Nanotechnologies (C2N), Rapporteur<\/li>\n<li>Olivier PATARD, Ing\u00e9nieur de recherche, Thales III\/V lab, Examinateur<\/li>\n<li>Nicolas DEFRANCE, Ma\u00eetre de conf\u00e9rences, Universit\u00e9 de Lille, Examinateur<\/li>\n<\/ul>\n<h5>Summary:<\/h5>\n<p>Dans le cadre de la fabrication de dispositifs hyperfr\u00e9quences, la fonctionnalit\u00e9 normally-off pr\u00e9sente deux avantages : elle permet d\u2019une part de s\u2019affranchir de la source de tension n\u00e9gative pour les circuits int\u00e9gr\u00e9s monolithiques hyperfr\u00e9quences (Monolithic Microwave Integrated Circuit \u2013 MMIC) et, d\u2019autre part, la co-int\u00e9gration de transistors normally-on et normally-off permettrait de r\u00e9aliser des circuits logiques.<br \/>\nCe manuscrit pr\u00e9sente les travaux r\u00e9alis\u00e9s dans l\u2019objectif de d\u00e9velopper un proc\u00e9d\u00e9 de fabrication de HEMT normally-off compatible avec la fabrication de normally-on, permettant ainsi leur co-int\u00e9gration au sein de la m\u00eame puce. Pour cela, deux technologies ont \u00e9t\u00e9 \u00e9tudi\u00e9es : l\u2019une bas\u00e9e sur la combinaison d\u2019un recess de grille, d\u2019une implantation de fluor sous la grille et d\u2019un d\u00e9p\u00f4t d\u2019oxyde de grille et l\u2019autre bas\u00e9e sur la nanostructuration de l\u2019espace source-drain afin des r\u00e9aliser des FinFET GaN. La premi\u00e8re technologie nous as permis d\u2019obtenir des transistors normally-off pr\u00e9sentant une tension de seuil d\u2019environ 1,4 V associ\u00e9e \u00e0 une densit\u00e9 de courant maximale de 1 A\/mm. Ces composants, bien que pr\u00e9sentant des r\u00e9sultats satisfaisants, souffrent toutefois d\u2019effets de pi\u00e8ges importants qui sont probablement dus \u00e0 l\u2019oxyde de grille et qui doivent absolument \u00eatre r\u00e9duits. La technologie FinFET \u00e9tait quant \u00e0 elle une premi\u00e8re au laboratoire et n\u00e9cessite encore de nombreuses optimisations. Les transistors ainsi fabriqu\u00e9s pr\u00e9sentent cependant des r\u00e9sultats prometteurs avec des topologies entrainant un d\u00e9calage de la tension de seuil de + 3 V par rapport aux transistors de r\u00e9f\u00e9rences et d\u2019autres permettant de quasiment doubler la densit\u00e9 de courant de drain.<\/p>\n<h5>Abstract:<\/h5>\n<p>In the context of high frequency devices fabrication, normally-off transistors offer two benefits: they eliminate the need of a negative voltage supply in the case of Monolithic Microwave Integrated Circuit (MMIC) and would allow the fabrication of logic circuits if integrated with normally-on HEMT.<br \/>\nThis manuscript exposes the work performed to develop a normally-off HEMT fabrication process compatible with the fabrication of normally-on transistors. To achieve this, we studied two technologies: one based on the combination of a gate recess, fluorine implantation under the gate and gate-oxide deposition while the other is based on the nanostructuration of the source-drain region in order to make GaN FinFET. The first process gave us normally-off transistors with threshold voltage of 1,4 V associated with current density of about 1 A\/mm. However, these devices suffer from significant trap effects that are probably due to the gate oxide. The FinFET technology we have developed, as a first trial, still needs a lot of optimization but showed promising results. While a topology lead to an increase of the threshold voltage of about + 3 V compared to the reference, an other one lead to a doubling of the current density.<\/p>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[199],"tags":[],"class_list":["post-42288","post","type-post","status-publish","format-standard","hentry","category-these"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/42288","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=42288"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/posts\/42288\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=42288"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/categories?post=42288"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/tags?post=42288"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}