{"id":30142,"date":"2018-12-10T13:48:28","date_gmt":"2018-12-10T11:48:28","guid":{"rendered":"https:\/\/www.iemn.fr\/?p=30142"},"modified":"2019-09-06T10:30:50","modified_gmt":"2019-09-06T08:30:50","slug":"these-khadim-daffe","status":"publish","type":"post","link":"https:\/\/www.iemn.fr\/en\/actualites\/these-khadim-daffe.html","title":{"rendered":"THESE : Caracte\u0301risation Hyperfre\u0301quence Sous Pointes de Nano Dispositifs : Me\u0301trologie et Instrumentation"},"content":{"rendered":"

\"\"<\/a>\u00a0Khadim DAFFE <\/strong><\/p>\n

Thesis defence<\/strong>
\nJeudi 20 d\u00e9cembre 2018 \u00e0 10h00<\/strong>
\nAmphith\u00e9\u00e2tre IEMN \u2013 LCI, Villeneuve d\u2019Ascq<\/strong><\/p><\/blockquote>\n


\nJury:<\/strong>
\nPr. Virginie Degardin, (Univ. Lille, Examinateur)
\nPr. Tan Phu Vuong, (Grenoble INP, Rapporteur)
\nPr. Val\u00e9rie Madrangeas, (Univ. Limoges, Rapporteur)
\nMCF. Marina Deng, (IMS Bordeaux, Examinateur)
\nDr. C\u00e9dric Durand, (STMicroelectronics, Invit\u00e9)
\nPr. Gilles Dambrine, (Univ. Lille, Directeur de th\u00e8se)
\nMCF-HDR Kamel Haddadi, (Univ. Lille)<\/p>\n

\u00a0R\u00e9sum\u00e9:<\/strong>
\nDans un contexte de d\u00e9veloppement spectaculaire des nano-objets, il est n\u00e9cessaire de d\u00e9velopper des moyens de caract\u00e9risation \u00e9lectrique haute fr\u00e9quence sous pointes adapt\u00e9s aux petites \u00e9chelles. En particulier, deux verrous instrumentaux doivent \u00eatre lev\u00e9s. D\u2019une part, la principale difficult\u00e9 pour caract\u00e9riser des nano-composants est qu\u2019ils pr\u00e9sentent en r\u00e9gime dynamique de fortes valeurs d\u2019imp\u00e9dances comparativement \u00e0 celle des syst\u00e8mes de mesure hyperfr\u00e9quence usuels. D\u2019autre part, Il existe une discontinuit\u00e9 de taille entre les nano-objets et les syst\u00e8mes de mesure conventionnels. Compte tenu du challenge scientifique et d\u2019un \u00e9tat de l\u2019art relativement limit\u00e9, plusieurs voies ont \u00e9t\u00e9 explor\u00e9es de concert. En premier lieu, dans le cadre d\u2019un projet europ\u00e9en regroupant les acteurs de la m\u00e9trologie, et du laboratoire commun IEMN-STMicroelectronics\u00ae, la tra\u00e7abilit\u00e9 des mesures hautes imp\u00e9dances de nano-dispositifs est \u00e9tablie. Par ailleurs, il s\u2019agit de d\u00e9veloppement de nouvelles g\u00e9n\u00e9rations de sondes GSG (Ground-Signal-Ground) en technologie MEMS (Microelectromechanical Systems), miniaturis\u00e9es et adapt\u00e9es \u00e0 la taille des nano-dispositifs. Les sondes sont mont\u00e9es sur une plateforme de nano-positionnement robotis\u00e9e et int\u00e9gr\u00e9e dans un microscope \u00e9lectronique \u00e0 balayage.<\/p>\n

\u00a0Abstract:<\/strong>
\nIn the frame of the spectacular development of nano-objects, innovative on-wafer electrical measurement methods must be addressed at the nanoscale. In particular, two main issues have been identified. On one hand, nano-devices exhibit very high dynamic impedance in contrast with conventional measuring microwave instruments. On the other hand, there is an inherent size discontinuity between nano-objects and conventional measurement systems. Given the scientific challenge and a relatively limited state of the art, several avenues of investigation have been explored. First, as part of a European project bringing together metrology laboratories, and the joint laboratory IEMN-ST Microelectronics\u00ae, the traceability of nano-devices high impedance measurements is established. In a second step, the development of an electrical on-wafer measuring platform for nano-devices is described. This includes the development of new generations of GSG (Ground-Signal-Ground) miniaturized probes in MEMS (Microelectromechanical Systems) technology with reduced access pads. The probes are mounted on a robotic nano-positioning platform integrated in a scanning electron microscope.
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