{"id":9852,"date":"2016-06-08T10:07:47","date_gmt":"2016-06-08T08:07:47","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=9852"},"modified":"2024-06-20T16:54:14","modified_gmt":"2024-06-20T14:54:14","slug":"gravure-chimique","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/gravure-chimique","title":{"rendered":"Chemical vapor etching"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_1midmg8dar4oh\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, 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https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-9852'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-4ew5t8-e72a8eaebb9925b61cd2058f635dfbc2\">\n#top .av-special-heading.av-4ew5t8-e72a8eaebb9925b61cd2058f635dfbc2{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-4ew5t8-e72a8eaebb9925b61cd2058f635dfbc2 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-4ew5t8-e72a8eaebb9925b61cd2058f635dfbc2 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-4ew5t8-e72a8eaebb9925b61cd2058f635dfbc2 av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_fifth  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Chemical vapor etching<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n<div class='flex_column_table av-61rae4-43f280cac34c6b4657f4f3f25946499d sc-av_one_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-61rae4-43f280cac34c6b4657f4f3f25946499d\">\n.flex_column.av-61rae4-43f280cac34c6b4657f4f3f25946499d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-61rae4-43f280cac34c6b4657f4f3f25946499d av_one_fifth  avia-builder-el-2  el_after_av_heading  el_before_av_four_fifth  first flex_column_table_cell av-equal-height-column av-align-bottom av-zero-column-padding'     ><section  class='av_textblock_section av-13i8hh8-32350c3b165f6cc238c483918e390cdf'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimique.png\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-19945 aligncenter\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimique.png\" alt=\"\" width=\"180\" height=\"180\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimique.png 180w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimique-80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimique-36x36.png 36w\" sizes=\"auto, (max-width: 180px) 100vw, 180px\" \/><\/a><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-25ahn0-217db7bbe3c53836fc204345ef94273b\">\n.flex_column.av-25ahn0-217db7bbe3c53836fc204345ef94273b{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-25ahn0-217db7bbe3c53836fc204345ef94273b av_four_fifth  avia-builder-el-4  el_after_av_one_fifth  el_before_av_one_full  flex_column_table_cell av-equal-height-column av-align-bottom av-zero-column-padding'     ><section  class='av_textblock_section av-lxk7z7td-bdb5b2db7bb091fd0d78db9c5099f179'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">A l\u2019IEMN, nous avons d\u00e9velopp\u00e9 depuis plusieurs ann\u00e9es un savoir-faire dans la lib\u00e9ration de dispositifs par voie s\u00e8che (MEMS, couches actives pour transfert sur flexible\u2026). En effet, la gravure chimique s\u00e8che offre une alternative int\u00e9ressante aux gravures par voie humide puisqu\u2019elle permet d\u2019\u00e9viter les effets de stiction, tout en conservant une haute s\u00e9lectivit\u00e9 et en limitant fortement la corrosion de nombreux m\u00e9taux. Cette technique est \u00e9galement compl\u00e9mentaire de la gravure plasma parce qu\u2019elle propose une gravure isotrope, une meilleure s\u00e9lectivit\u00e9 entre les mat\u00e9riaux et qu\u2019elle \u00e9vite l\u2019endommagement des surfaces avec des vitesses de gravure plus lentes et une absence de bombardement ionique. Actuellement, nous pouvons graver par cette technique 2 mat\u00e9riaux de la fili\u00e8re Si : le Si par XeF<sub>2<\/sub>, en utilisant un B\u00e2ti Xactix X4, et le SiO<sub>2<\/sub> par HF en phase vapeur, gr\u00e2ce \u00e0 un B\u00e2ti SPTS \u00b5Etch (Primaxx).<\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-lxk85wt4-7257e715a1c9661a4f6fe92586d49b9b sc-av_one_full av-equal-height-column-flextable'><div  class='flex_column av-lxk85wt4-7257e715a1c9661a4f6fe92586d49b9b av_one_full  avia-builder-el-6  el_after_av_four_fifth  el_before_av_one_half  first flex_column_table_cell av-equal-height-column av-align-middle'     ><section  class='av_textblock_section av-lxk7yxwj-56aa30c58065fae6fdf6b32cde630448'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Deposits of organic thin films under vacuum are also proposed (parylene, pentacene,...).<\/h4>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 --><div class='flex_column_table av-107pang-69d8ac5076d29cd23ef330efe111ec07 sc-av_one_half av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-107pang-69d8ac5076d29cd23ef330efe111ec07\">\n.flex_column.av-107pang-69d8ac5076d29cd23ef330efe111ec07{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-107pang-69d8ac5076d29cd23ef330efe111ec07 av_one_half  avia-builder-el-8  el_after_av_one_full  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-x94x30-225e540995dd46386f3e2a40103e7542'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li style=\"text-align: justify;\">transfer of active layers on flexible material<\/li>\n<\/ul>\n<\/div><\/section><\/div><\/p>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-we95xo-72bd94d1cb1e0ec0347e60e10d71b270\">\n.flex_column.av-we95xo-72bd94d1cb1e0ec0347e60e10d71b270{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-we95xo-72bd94d1cb1e0ec0347e60e10d71b270 av_one_fifth  avia-builder-el-10  el_after_av_one_half  el_before_av_one_fourth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-31993w-3cf1c4f7438603bae86b4a9ec59d2f6f\">\n.avia-image-container.av-31993w-3cf1c4f7438603bae86b4a9ec59d2f6f img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-31993w-3cf1c4f7438603bae86b4a9ec59d2f6f .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-31993w-3cf1c4f7438603bae86b4a9ec59d2f6f av-styling- avia-align-center  avia-builder-el-11  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19941 avia-img-lazy-loading-not-19941 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_transitor.png\" alt='' title='cmnf_gravures_chemistry_transitor'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_transitor.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_transitor-36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2yjy0s-c1e2097db3c44b737dfcbd6f446ffb9e\">\n.flex_column.av-2yjy0s-c1e2097db3c44b737dfcbd6f446ffb9e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2yjy0s-c1e2097db3c44b737dfcbd6f446ffb9e av_one_fourth  avia-builder-el-12  el_after_av_one_fifth  el_before_av_one_half  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-rj9nj0-b60c46e7e1db8bf95e2f5fb649fef7d2\">\n#top .av_textblock_section.av-rj9nj0-b60c46e7e1db8bf95e2f5fb649fef7d2 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-rj9nj0-b60c46e7e1db8bf95e2f5fb649fef7d2'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>Transistor of the GaN die transferred on flexible after thinning of the substrate and 20\u00b5m XeF2 etching of the remaining Si layer (Carbon team)<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-pmlqbw-f368a97d7755a2ff5e5836ec0f44a52a sc-av_one_half av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-pmlqbw-f368a97d7755a2ff5e5836ec0f44a52a\">\n.flex_column.av-pmlqbw-f368a97d7755a2ff5e5836ec0f44a52a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-pmlqbw-f368a97d7755a2ff5e5836ec0f44a52a av_one_half  avia-builder-el-14  el_after_av_one_fourth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-nw604c-ba38eda714524f9773f94ad9100ea8c7'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li style=\"text-align: justify;\" class=\"translation-block\">Si etching using vapor-phase XeF<sub>2<\/sub> etch cycles exhibiting high selectivity over thermal oxide and resin.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mp15cc-231b9c3133c180a0906ba24fc99d78ed\">\n.flex_column.av-mp15cc-231b9c3133c180a0906ba24fc99d78ed{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mp15cc-231b9c3133c180a0906ba24fc99d78ed av_one_fifth  avia-builder-el-16  el_after_av_one_half  el_before_av_one_fourth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-koqwsc-8e5b85e63655700aef8f0cf77b81d28a\">\n.avia-image-container.av-koqwsc-8e5b85e63655700aef8f0cf77b81d28a img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-koqwsc-8e5b85e63655700aef8f0cf77b81d28a .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-koqwsc-8e5b85e63655700aef8f0cf77b81d28a av-styling- avia-align-center  avia-builder-el-17  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19943 avia-img-lazy-loading-not-19943 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_vapeur.png\" alt='' title='cmnf_gravures_chimie_vapeur'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_vapeur.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_vapeur-36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-iyb6ks-531880a1a606dc1820fcafa42322a62e\">\n.flex_column.av-iyb6ks-531880a1a606dc1820fcafa42322a62e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-iyb6ks-531880a1a606dc1820fcafa42322a62e av_one_fourth  avia-builder-el-18  el_after_av_one_fifth  el_before_av_one_half  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-gyxiv0-66ad21b34e4a3198219ef3266ca62df1\">\n#top .av_textblock_section.av-gyxiv0-66ad21b34e4a3198219ef3266ca62df1 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-gyxiv0-66ad21b34e4a3198219ef3266ca62df1'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>Release by 10\u00b5m deep XeF2 etching of a thermoelectric characterization platform on 60nm Si membrane protected by BOX. The oxide is then etched by HF in vapor phase (MicroelecSi team)<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-fv9eto-86565dd5a8e4ad0c3894ea3f543ef668 sc-av_one_half av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fv9eto-86565dd5a8e4ad0c3894ea3f543ef668\">\n.flex_column.av-fv9eto-86565dd5a8e4ad0c3894ea3f543ef668{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fv9eto-86565dd5a8e4ad0c3894ea3f543ef668 av_one_half  avia-builder-el-20  el_after_av_one_fourth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-efvx18-be8d0f01c55d57c4eca260b21fdce95f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li style=\"text-align: justify;\" class=\"translation-block\">SiO<sub>2<\/sub> etching, performing vapor phase HF etch cycles offering high selectivity to Si and very good compatibility with many materials such as SiC, Al, Pt, Au, Ni, Cr, TiW, and Al<sub>2<\/sub>O<sub>3<\/sub>.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-cn93lo-bef933e7a6fd75e22f1c7233e3debece\">\n.flex_column.av-cn93lo-bef933e7a6fd75e22f1c7233e3debece{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-cn93lo-bef933e7a6fd75e22f1c7233e3debece av_one_fifth  avia-builder-el-22  el_after_av_one_half  el_before_av_one_fourth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-bfp8p8-62abb4e3937c08c7a80455bd6189d478\">\n.avia-image-container.av-bfp8p8-62abb4e3937c08c7a80455bd6189d478 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-bfp8p8-62abb4e3937c08c7a80455bd6189d478 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-bfp8p8-62abb4e3937c08c7a80455bd6189d478 av-styling- avia-align-center  avia-builder-el-23  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19939 avia-img-lazy-loading-not-19939 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_box.png\" alt='' title='cmnf_gravures_chimie_box'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_box.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_chimie_box-36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-8gr5b0-53b5833704dc0664ff8f214ad5bff032\">\n.flex_column.av-8gr5b0-53b5833704dc0664ff8f214ad5bff032{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-8gr5b0-53b5833704dc0664ff8f214ad5bff032 av_one_fourth  avia-builder-el-24  el_after_av_one_fifth  el_before_av_one_full  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7qtpws-502c45281e152fc0867d3978ff138945\">\n#top .av_textblock_section.av-7qtpws-502c45281e152fc0867d3978ff138945 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-7qtpws-502c45281e152fc0867d3978ff138945'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>Sub etching of a 2\u00b5m BOX by HF in vapor phase (Nam6 team)<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-73hf0-3d00fa547851732e20b300b6283df5c4\">\n.flex_column.av-73hf0-3d00fa547851732e20b300b6283df5c4{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-73hf0-3d00fa547851732e20b300b6283df5c4 av_one_full  avia-builder-el-26  el_after_av_one_fourth  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-2i460c-5005baa7c02f92635fceb704994fe7cb'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p>Contact: Jean Houpin, Dmitri Yarekha<\/p>\n<\/blockquote>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":447,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-9852","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9852","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=9852"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9852\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=9852"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}