{"id":9091,"date":"2016-04-06T12:47:36","date_gmt":"2016-04-06T10:47:36","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=9091"},"modified":"2020-11-09T16:16:31","modified_gmt":"2020-11-09T14:16:31","slug":"collage-2","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/lithographie\/collage-2","title":{"rendered":"Collage"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_one_full  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_6qx7d8cavoyr\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-9091'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7btd5v-617d9e142db44948e46b9984b9e61181\">\n.flex_column.av-7btd5v-617d9e142db44948e46b9984b9e61181{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7btd5v-617d9e142db44948e46b9984b9e61181 av_one_full  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_fifth  avia-builder-el-first  first flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jjo0mkkh-9e30dcadf5d6ede304fd6625e3753d9f\">\n#top .av-special-heading.av-jjo0mkkh-9e30dcadf5d6ede304fd6625e3753d9f{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-jjo0mkkh-9e30dcadf5d6ede304fd6625e3753d9f .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-jjo0mkkh-9e30dcadf5d6ede304fd6625e3753d9f .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-jjo0mkkh-9e30dcadf5d6ede304fd6625e3753d9f av-special-heading-h3  avia-builder-el-2  avia-builder-el-no-sibling'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Collage<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18kcjer-e202568736df1b37981ad2d19cc9ba3a\">\n.flex_column.av-18kcjer-e202568736df1b37981ad2d19cc9ba3a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-18kcjer-e202568736df1b37981ad2d19cc9ba3a av_one_fifth  avia-builder-el-3  el_after_av_one_full  el_before_av_two_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ey6ar-861fa3771a2d87543c14c0dd0f1161e5\">\n.avia-image-container.av-ey6ar-861fa3771a2d87543c14c0dd0f1161e5 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-ey6ar-861fa3771a2d87543c14c0dd0f1161e5 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-ey6ar-861fa3771a2d87543c14c0dd0f1161e5 av-styling- avia-align-center  avia-builder-el-4  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/collage-bonding-175x180.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-14274sz-7672a2dce26504ba54953e9c1204a837\">\n.flex_column.av-14274sz-7672a2dce26504ba54953e9c1204a837{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-14274sz-7672a2dce26504ba54953e9c1204a837 av_two_third  avia-builder-el-5  el_after_av_one_fifth  el_before_av_one_full  flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-12x52xf-627c94d4e4094fb00a06ea35200a3990'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">Thermal or anodic bonding (Suss MicroTec SB6e) with alignment allows for thermocompression or anodic bonding of substrates from 1 to 4 inches. We perform proximity (200\u00b5m spacer) or contact bonding of substrates with an alignment accuracy of 1 to 3 \u00b5m depending on material constraints. The use of a graphite pad (500\u00b5m) minimizes stresses and bonding can be performed under N2 purge or secondary vacuum.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_full-1df1b63c6c045939f2dc1aefbdd8e7ad\">\n.flex_column.av-av_one_full-1df1b63c6c045939f2dc1aefbdd8e7ad{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_full-1df1b63c6c045939f2dc1aefbdd8e7ad av_one_full  avia-builder-el-7  el_after_av_two_third  el_before_av_three_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jjo0ng9l-e920d5d780fc6d498254a9cb6956cd39'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Expertise and know-how: some highlights<\/h4>\n<\/div><\/section><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-zayfsj-90317655b5ec2c34aff6b1e9727777be\">\n.flex_column.av-zayfsj-90317655b5ec2c34aff6b1e9727777be{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-zayfsj-90317655b5ec2c34aff6b1e9727777be av_three_fifth  avia-builder-el-9  el_after_av_one_full  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-yog94j-e3868461f367ca0db45b55ec8ee698e5'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- <strong>Thermocompression adhesive bonding of aromatic epoxy resins.<\/strong> Use for microfluidics, swicth cap, MEMs, optoelectronics...<\/p>\n<\/div><\/section><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-x0twlv-cd02057aeb809a9ddd85eb360b764ef5\">\n.flex_column.av-x0twlv-cd02057aeb809a9ddd85eb360b764ef5{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-x0twlv-cd02057aeb809a9ddd85eb360b764ef5 av_one_fifth  avia-builder-el-11  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-udu71f-01d2f00a78116ca81eb94a299c633dc0\">\n.avia-image-container.av-udu71f-01d2f00a78116ca81eb94a299c633dc0 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-udu71f-01d2f00a78116ca81eb94a299c633dc0 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-udu71f-01d2f00a78116ca81eb94a299c633dc0 av-styling- avia-align-center  avia-builder-el-12  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex1-bonding-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-t7a4pv-7b04258c2602a51036a573900b683383\">\n.flex_column.av-t7a4pv-7b04258c2602a51036a573900b683383{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-t7a4pv-7b04258c2602a51036a573900b683383 av_one_fifth  avia-builder-el-13  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-s2zihv-a99e580673d46f95c0d4606d3d9ade2a\">\n#top .av_textblock_section.av-s2zihv-a99e580673d46f95c0d4606d3d9ade2a .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-s2zihv-a99e580673d46f95c0d4606d3d9ade2a'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em>\u00a01.\u00a0 Bonding Glass \/ BCB\/ Si (200\u00b5m)\/ BCB\/ Glass for microfluidics (Biomems group)<\/em><\/p>\n<\/div><\/section><\/div>\n<div class='flex_column_table av-pp9y8z-ed7f90ce16b305746777ca04545e7bd7 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-pp9y8z-ed7f90ce16b305746777ca04545e7bd7\">\n.flex_column.av-pp9y8z-ed7f90ce16b305746777ca04545e7bd7{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-pp9y8z-ed7f90ce16b305746777ca04545e7bd7 av_three_fifth  avia-builder-el-15  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-nuv1pv-330f3b5663fef51b2faf76a3debdf7ed'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>&#8211;<strong> Metal bonding (low T\u00b0 or T\u00b0 340\u00b0C)<\/strong><\/p>\n<p style=\"padding-left: 30px;\">-Au\/Au diffusion (340\u00b0C) for via-hole interconnection in microfluidics, MEMs<\/p>\n<p style=\"padding-left: 30px;\">-Au, Cu bonding for transfer of materials (GaN, GaAs, InP, LiNbO3..) on Si, GaAs or stainless steel.<\/p>\n<p style=\"padding-left: 30px;\">-Low T\u00b0 Ti\/Au bonding (200\u00b0C) for the transfer of materials (GaAs, InP...) on Si.<\/p>\n<p style=\"padding-left: 30px;\">-In\/In bonding for THz components<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lv5tc3-a3d2b60ab69a3568c09f741f38f63942\">\n.flex_column.av-lv5tc3-a3d2b60ab69a3568c09f741f38f63942{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-lv5tc3-a3d2b60ab69a3568c09f741f38f63942 av_one_fifth  avia-builder-el-17  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ktp08j-ad646809c1b6bbbe2550ac7378516bed\">\n.avia-image-container.av-ktp08j-ad646809c1b6bbbe2550ac7378516bed img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-ktp08j-ad646809c1b6bbbe2550ac7378516bed .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-ktp08j-ad646809c1b6bbbe2550ac7378516bed av-styling- avia-align-center  avia-builder-el-18  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex2-bonding-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-j5dkxv-c1b7046d5f98885d79e3abda260631d1\">\n.flex_column.av-j5dkxv-c1b7046d5f98885d79e3abda260631d1{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-j5dkxv-c1b7046d5f98885d79e3abda260631d1 av_one_fifth  avia-builder-el-19  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-grs3ar-9743384b3bbf551093aa40f64aaccd99\">\n#top .av_textblock_section.av-grs3ar-9743384b3bbf551093aa40f64aaccd99 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-grs3ar-9743384b3bbf551093aa40f64aaccd99'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em> <em>2.<\/em><\/em> <em>Transfer of a porous membrane (100nm pores) of 64\u00b5m thickness on Si by Ti\/Au layer (Aiman group)<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fbz5yb-dbd43b23dc73c9ef9b39f69f773f382f\">\n.flex_column.av-fbz5yb-dbd43b23dc73c9ef9b39f69f773f382f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fbz5yb-dbd43b23dc73c9ef9b39f69f773f382f av_three_fifth  avia-builder-el-21  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-dlnxs3-402104d8560534d5a27fe38dfc27c828'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- <strong>Si\/pyrex or Si\/Pyrex\/Si<\/strong> type anodic bonding with or without Via, used especially in microfluidics<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-c9wrcj-b9592062198877049ceb0629590e4a80\">\n.flex_column.av-c9wrcj-b9592062198877049ceb0629590e4a80{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-c9wrcj-b9592062198877049ceb0629590e4a80 av_one_fifth  avia-builder-el-23  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-asiltf-ff6f1e9e26444b043a51506bc353bdff\">\n.avia-image-container.av-asiltf-ff6f1e9e26444b043a51506bc353bdff img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-asiltf-ff6f1e9e26444b043a51506bc353bdff .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-asiltf-ff6f1e9e26444b043a51506bc353bdff av-styling- avia-align-center  avia-builder-el-24  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex3-bonding-80x80.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9gx003-158701fb34a48a0f12f4c7f24a0835ef\">\n.flex_column.av-9gx003-158701fb34a48a0f12f4c7f24a0835ef{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-9gx003-158701fb34a48a0f12f4c7f24a0835ef av_one_fifth  avia-builder-el-25  el_after_av_one_fifth  el_before_av_one_full  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7a67j7-e38774f06be24ebde321315acdf1551d\">\n#top .av_textblock_section.av-7a67j7-e38774f06be24ebde321315acdf1551d .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-7a67j7-e38774f06be24ebde321315acdf1551d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\"><em>3. Anodic bonding <\/em><em>(silicon\/glass)<\/em><em>: creation of a microfluidic channel (Biomems group).<\/em><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_one_full-1df1b63c6c045939f2dc1aefbdd8e7ad\">\n.flex_column.av-av_one_full-1df1b63c6c045939f2dc1aefbdd8e7ad{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-av_one_full-1df1b63c6c045939f2dc1aefbdd8e7ad av_one_full  avia-builder-el-27  el_after_av_one_fifth  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-2l8w2b-f5aa7ebb3fe7ccd08b8cadc66f016966'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Expertise and know-how: other<\/h4>\n<ul>\n<li>Molecular Si\/Si bonding with activation plasma under O2<\/li>\n<li>Parylene\/SiO2 bonding with O2 activation plasma<\/li>\n<\/ul>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":8972,"menu_order":20,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-9091","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9091","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=9091"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9091\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/8972"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=9091"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}