{"id":9033,"date":"2016-04-05T17:07:44","date_gmt":"2016-04-05T15:07:44","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=9033"},"modified":"2018-11-16T17:58:43","modified_gmt":"2018-11-16T15:58:43","slug":"electronique","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/lithographie\/electronique","title":{"rendered":"Electronic Lithography"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_2u558z1xu85i\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-9033'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jok7lxgc-77ca6dd21ec323ed1dedba59dafd5d93\">\n#top .av-special-heading.av-jok7lxgc-77ca6dd21ec323ed1dedba59dafd5d93{\npadding-bottom:30px;\n}\nbody .av-special-heading.av-jok7lxgc-77ca6dd21ec323ed1dedba59dafd5d93 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-jok7lxgc-77ca6dd21ec323ed1dedba59dafd5d93 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-jok7lxgc-77ca6dd21ec323ed1dedba59dafd5d93 av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_fifth  avia-builder-el-first '><h3 class='av-special-heading-tag '  itemprop=\"headline\"  >Lithographie \u00e9lectronique<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n<div class='flex_column_table av-17mrouh-4f56fe6ee049f9d57e43362f1f6ee016 sc-av_one_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-17mrouh-4f56fe6ee049f9d57e43362f1f6ee016\">\n.flex_column.av-17mrouh-4f56fe6ee049f9d57e43362f1f6ee016{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-17mrouh-4f56fe6ee049f9d57e43362f1f6ee016 av_one_fifth  avia-builder-el-2  el_after_av_heading  el_before_av_two_third  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  '     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-16q37g9-a8f30adfac87b7158bf3ffcfd027a6a6\">\n.avia-image-container.av-16q37g9-a8f30adfac87b7158bf3ffcfd027a6a6 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-16q37g9-a8f30adfac87b7158bf3ffcfd027a6a6 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-16q37g9-a8f30adfac87b7158bf3ffcfd027a6a6 av-styling- avia-align-center  avia-builder-el-3  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/image-masqueur-180x180.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-14cl59l-2c5ea2ef1248c2456207047fd21a5880\">\n.flex_column.av-14cl59l-2c5ea2ef1248c2456207047fd21a5880{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-14cl59l-2c5ea2ef1248c2456207047fd21a5880 av_two_third  avia-builder-el-4  el_after_av_one_fifth  el_before_av_heading  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  '     ><section  class='av_textblock_section av-12u21yx-6d6df21ac67fc623ec798f44a8a76a29 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">La zone lithographie \u00e9lectronique est \u00e9quip\u00e9e de 2 masqueurs \u00e9lectroniques EBPG 5000plus (100kV) avec sas automatique 10 positions qui permettent d\u2019atteindre des r\u00e9solutions de l\u2019ordre de 10nm. La taille des \u00e9chantillons peut aller de quelques mm\u00b2 jusqu&rsquo;\u00e0 4 pouces. Avec plus de 2000 \u00e9critures par an sur un large \u00e9ventail applicatif, l\u2019\u00e9quipe b\u00e9n\u00e9ficie d\u2019une v\u00e9ritable expertise gr\u00e2ce \u00e0 une capitalisation des retours sur exp\u00e9rience. L\u2019implication des\u00a0 chercheurs dans la mise en oeuvre de la ressource vise \u00e0 mieux partager l\u2019expertise acquise dans le domaine depuis plus de 20 ans et \u00e0 optimiser son utilisation\u00a0 pour chaque domaine d\u2019applications.<\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-f062a261f26dbc70bee7bb8c0c191d2d\">\n#top .av-special-heading.av-av_heading-f062a261f26dbc70bee7bb8c0c191d2d{\npadding-bottom:15px;\n}\nbody .av-special-heading.av-av_heading-f062a261f26dbc70bee7bb8c0c191d2d .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-f062a261f26dbc70bee7bb8c0c191d2d .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-f062a261f26dbc70bee7bb8c0c191d2d av-special-heading-h6  avia-builder-el-6  el_after_av_two_third  el_before_av_three_fifth '><h6 class='av-special-heading-tag '  itemprop=\"headline\"  >Expertises et savoir-faire: quelques points marquants<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-zmx1ah-0bf773d285f82365c1e6bcb94e819d3f\">\n.flex_column.av-zmx1ah-0bf773d285f82365c1e6bcb94e819d3f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-zmx1ah-0bf773d285f82365c1e6bcb94e819d3f av_three_fifth  avia-builder-el-7  el_after_av_heading  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-yprem1-14053839b3aa879e77b413cc43be7a80 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>&#8211; Haute r\u00e9solution et rapidit\u00e9 d&rsquo;\u00e9criture.<\/strong><b> <\/b><\/p>\n<p>R\u00e9alisation de r\u00e9seaux denses de nanoplots par des m\u00e9thodes d&rsquo;\u00e9criture ultra-rapides (Dots On The Fly ou S\u00e9quentielle). En plus de sa tr\u00e8s grande rapidit\u00e9 d&rsquo;\u00e9criture (facteur 80) la m\u00e9thode s\u00e9quentielle peut offrir un lissage des contours.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-36b7eh-5344a0f17a6c829fec173f42e1328235\">\n.flex_column.av-36b7eh-5344a0f17a6c829fec173f42e1328235{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-36b7eh-5344a0f17a6c829fec173f42e1328235 av_one_fifth  avia-builder-el-9  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  '     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-tzbuzd-3a396eb44489c90a04b7b2327307bcdf\">\n.avia-image-container.av-tzbuzd-3a396eb44489c90a04b7b2327307bcdf img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-tzbuzd-3a396eb44489c90a04b7b2327307bcdf .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-tzbuzd-3a396eb44489c90a04b7b2327307bcdf av-styling- avia-align-center  avia-builder-el-10  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/litho-elec-Ex1-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-sphp49-5f6d22679934671e41b2d93dd557a0ce\">\n.flex_column.av-sphp49-5f6d22679934671e41b2d93dd557a0ce{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-sphp49-5f6d22679934671e41b2d93dd557a0ce av_one_fifth  avia-builder-el-11  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  '     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-qqrtvt-a9fbc342691ac4cf885bc9f62164c055\">\n#top .av_textblock_section.av-qqrtvt-a9fbc342691ac4cf885bc9f62164c055 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-qqrtvt-a9fbc342691ac4cf885bc9f62164c055 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>1. Nanoplots<\/i><i> d&rsquo;or de 10-15nm espac\u00e9s de 50nm sur silicium, apr\u00e8s lift-off, r\u00e9alis\u00e9s par m\u00e9thode s\u00e9quentielle <a href=\"http:\/\/www.beilstein-journals.org\/bjnano\/single\/articleFullText.htm?publicId=2190-4286-5-202\">[Ref]<\/a><br \/>\n<\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-q9n6t5-564783d1c8b04d261f12b879a949803c\">\n.flex_column.av-q9n6t5-564783d1c8b04d261f12b879a949803c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-q9n6t5-564783d1c8b04d261f12b879a949803c av_three_fifth  avia-builder-el-13  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-ncsr6h-80885a3049920a0396c9c7a244ef175a '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>&#8211; R\u00e9sines optiques utilis\u00e9es en \u00e9lectronique<\/strong><\/p>\n<p>L&rsquo;utilisation de r\u00e9sines optiques en e-beam offre une meilleure tenue en gravure s\u00e8che et un fort rapport d\u2019aspect pour des gravures tr\u00e8s profondes jusqu\u2019\u00e0 100\u00b5m dans le silicium.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lpj9mh-96b4eb51b6230a9082180f9afe6d88e2\">\n.flex_column.av-lpj9mh-96b4eb51b6230a9082180f9afe6d88e2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-lpj9mh-96b4eb51b6230a9082180f9afe6d88e2 av_one_fifth  avia-builder-el-15  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-20bae1-187a8b36298490971fc5ed92f89de486\">\n.avia-image-container.av-20bae1-187a8b36298490971fc5ed92f89de486 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-20bae1-187a8b36298490971fc5ed92f89de486 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-20bae1-187a8b36298490971fc5ed92f89de486 av-styling- avia-align-center  avia-builder-el-16  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex2-lithographie-elec-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-imdf9l-d5da7837cc005f509518b4c6d139681e\">\n.flex_column.av-imdf9l-d5da7837cc005f509518b4c6d139681e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-imdf9l-d5da7837cc005f509518b4c6d139681e av_one_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-hc49a1-1617163087feedd9d85d80453ca97157\">\n#top .av_textblock_section.av-hc49a1-1617163087feedd9d85d80453ca97157 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-hc49a1-1617163087feedd9d85d80453ca97157 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>2. UV210 utilis\u00e9e en <\/i><i>ebeam<\/i><i>: lignes de 500nm espac\u00e9es de 500nm.<\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-gctgtl-7808c9125ee11c0ea1147d04ee7eab3c\">\n.flex_column.av-gctgtl-7808c9125ee11c0ea1147d04ee7eab3c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-gctgtl-7808c9125ee11c0ea1147d04ee7eab3c av_three_fifth  avia-builder-el-19  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-ebz2yh-9010c2ea5b9c78a748d472396cacb2e4 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong>&#8211; Proc\u00e9d\u00e9 tri-couches<\/strong><\/p>\n<p>L&rsquo;utilisation de tri-couches de r\u00e9sine d\u00e9velopp\u00e9es s\u00e9lectivement permet d&rsquo;obtenir les profils n\u00e9cessaires \u00e0 la r\u00e9alisation de grilles en T.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-d5vy7d-36961213597fd01fc26573fde78b7502\">\n.flex_column.av-d5vy7d-36961213597fd01fc26573fde78b7502{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-d5vy7d-36961213597fd01fc26573fde78b7502 av_one_fifth  avia-builder-el-21  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-atm1ix-2b70426f0839b5d4ce141fbadd75990e\">\n.avia-image-container.av-atm1ix-2b70426f0839b5d4ce141fbadd75990e img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-atm1ix-2b70426f0839b5d4ce141fbadd75990e .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-atm1ix-2b70426f0839b5d4ce141fbadd75990e av-styling- avia-align-center  avia-builder-el-22  avia-builder-el-no-sibling '   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image ' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/litho-elec-Ex3-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-vybah-bc4c08123c8bf59c9bea9fbb98e47078\">\n.flex_column.av-vybah-bc4c08123c8bf59c9bea9fbb98e47078{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-vybah-bc4c08123c8bf59c9bea9fbb98e47078 av_one_fifth  avia-builder-el-23  el_after_av_one_fifth  el_before_av_heading  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7gi1nd-02a108fc3c796db9b0da6a26f1d9043a\">\n#top .av_textblock_section.av-7gi1nd-02a108fc3c796db9b0da6a26f1d9043a .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-7gi1nd-02a108fc3c796db9b0da6a26f1d9043a '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><i>3. Proc\u00e9d\u00e9 tri-couche, apr\u00e8s d\u00e9veloppement\u00a0<\/i><i><\/i><i>et apr\u00e8s <\/i><i>litf<\/i><i>-off <\/i><i>(<\/i><i>inset<\/i><i>) <\/i><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-0d2219414bcdbf33b72ab7a6a67ba52a\">\n#top .av-special-heading.av-av_heading-0d2219414bcdbf33b72ab7a6a67ba52a{\npadding-bottom:1px;\n}\nbody .av-special-heading.av-av_heading-0d2219414bcdbf33b72ab7a6a67ba52a .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-0d2219414bcdbf33b72ab7a6a67ba52a .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-0d2219414bcdbf33b72ab7a6a67ba52a av-special-heading-h6  avia-builder-el-25  el_after_av_one_fifth  el_before_av_three_fifth '><h6 class='av-special-heading-tag '  itemprop=\"headline\"  >Expertises et savoir-faire: autres<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3t13uh-556f0fc1751b1b356cac5a72f6e5bc05\">\n.flex_column.av-3t13uh-556f0fc1751b1b356cac5a72f6e5bc05{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-3t13uh-556f0fc1751b1b356cac5a72f6e5bc05 av_three_fifth  avia-builder-el-26  el_after_av_heading  avia-builder-el-last  first flex_column_div av-zero-column-padding  '     ><section  class='av_textblock_section av-360pbd-abcd34a8476d3e9494fbc9d39439b886 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li>Dilution des r\u00e9sines<\/li>\n<li>Concentration de r\u00e9sines par distillation de solvants pour les utiliser en e-beam<\/li>\n<li>Utilisation de polym\u00e8res conducteurs permettant l\u2019\u00e9coulement des charges sur mat\u00e9riaux isolants<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":8972,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":"","_members_access_role":[],"_members_access_error":""},"class_list":["post-9033","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9033","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=9033"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9033\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/8972"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=9033"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}