{"id":9002,"date":"2016-04-05T14:55:28","date_gmt":"2016-04-05T12:55:28","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=9002"},"modified":"2023-11-06T17:05:39","modified_gmt":"2023-11-06T15:05:39","slug":"optique","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/lithographie\/optique","title":{"rendered":"Optic Lithography"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_n85dfvb4ybz9\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-9002'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-5ca851db8fff2daf63e30d8e69ff6663\">\n#top .av-special-heading.av-av_heading-5ca851db8fff2daf63e30d8e69ff6663{\npadding-bottom:30px;\n}\nbody .av-special-heading.av-av_heading-5ca851db8fff2daf63e30d8e69ff6663 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-5ca851db8fff2daf63e30d8e69ff6663 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-5ca851db8fff2daf63e30d8e69ff6663 av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_fifth  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Optic Lithography<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n<div class='flex_column_table av-18kew7u-112a4e807606221fa5f7151f21814451 sc-av_one_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18kew7u-112a4e807606221fa5f7151f21814451\">\n#top .flex_column_table.av-equal-height-column-flextable.av-18kew7u-112a4e807606221fa5f7151f21814451{\nmargin-top:0px;\nmargin-bottom:15px;\n}\n.flex_column.av-18kew7u-112a4e807606221fa5f7151f21814451{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-18kew7u-112a4e807606221fa5f7151f21814451 av_one_fifth  avia-builder-el-2  el_after_av_heading  el_before_av_two_third  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-169ssbe-2fe181f9545185357164ebe2a9ee5893\">\n.avia-image-container.av-169ssbe-2fe181f9545185357164ebe2a9ee5893 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-169ssbe-2fe181f9545185357164ebe2a9ee5893 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-169ssbe-2fe181f9545185357164ebe2a9ee5893 av-styling- avia-align-center  avia-builder-el-3  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/aligneur_pascal-180x180.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-14ebawa-6c660b17d45d611d143d21abccfa1c8d\">\n#top .flex_column_table.av-equal-height-column-flextable.av-14ebawa-6c660b17d45d611d143d21abccfa1c8d{\nmargin-top:0px;\nmargin-bottom:15px;\n}\n.flex_column.av-14ebawa-6c660b17d45d611d143d21abccfa1c8d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-14ebawa-6c660b17d45d611d143d21abccfa1c8d av_two_third  avia-builder-el-4  el_after_av_one_fifth  el_before_av_heading  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><section  class='av_textblock_section av-12e54y2-61fd4ffbdd2b725c9ec0ca8e112a0f9e'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">La zone photolithographie est \u00e9quip\u00e9e de <strong>2\u00a0aligneurs de masques optiques MA6\/BA6 (6 inch)<\/strong> N\u00b0750 et 834 de marque Suss MicroTec.<\/p>\n<p>Passage de la g\u00e9n\u00e9ration GEN 2 \u00e0 GEN 4 permettant la continuit\u00e9 des maintenances curatives et pr\u00e9ventives sur plus de 7 ans.<\/p>\n<p>R\u00e9solution &lt; 1\u00b5m en mode vacuum contact et en alignement face avant TSA &lt; 0,5 \u00b5m.<\/p>\n<p>R\u00e9solution &lt; 1\u00b5m en mode Vacuum contact et alignement face arriere BSA &lt; 1 \u00b5m<\/p>\n<p>Acquisition Video pour alignement wafer \/ masque en TSA \/ BSA<\/p>\n<p>Portes Wafer: 1\/4, 1\/2 de 2&Prime;, 2&Prime;, 3&Prime;, 4&Prime; avec portes masques optiques 4&Prime;, 5&Prime;.<\/p>\n<p>D\u00e9marche \u00e9co-responsable, avec une baisse de la consommation d&rsquo;\u00e9nergie, de l\u2019azote et de l\u2019air comprim\u00e9 consomm\u00e9es et passage en UV LED qui permettra la suppression des lampes \u00e0 mercure nocives pour l\u2019environnement et tr\u00e8s co\u00fbteuses.<\/p>\n<p>UV-LED: 10 000 Heures de fonctionnement.<\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-25c0a85cdb05a84cbc1341642f26efe8\">\n#top .av-special-heading.av-av_heading-25c0a85cdb05a84cbc1341642f26efe8{\npadding-bottom:15px;\n}\nbody .av-special-heading.av-av_heading-25c0a85cdb05a84cbc1341642f26efe8 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-25c0a85cdb05a84cbc1341642f26efe8 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-25c0a85cdb05a84cbc1341642f26efe8 av-special-heading-h6  avia-builder-el-6  el_after_av_two_third  el_before_av_three_fifth'><h6 class='av-special-heading-tag'  itemprop=\"headline\"  >Expertise and know-how: some highlights<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-zcavju-6be5549d2c26d5ec6115582c9ccdca2e\">\n.flex_column.av-zcavju-6be5549d2c26d5ec6115582c9ccdca2e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-zcavju-6be5549d2c26d5ec6115582c9ccdca2e av_three_fifth  avia-builder-el-7  el_after_av_heading  el_before_av_one_fifth  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-yazfcq-0a852c27f9047aa59724c36efaeeb650'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- <strong>Air Bridge Technology<\/strong> metal by electrolysis (2 to 5\u00b5m) using a resin bilayer.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-w7xy9m-f9ee9557859bad327ac2be1cf89760d7\">\n.flex_column.av-w7xy9m-f9ee9557859bad327ac2be1cf89760d7{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-w7xy9m-f9ee9557859bad327ac2be1cf89760d7 av_one_fifth  avia-builder-el-9  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-uwjuii-bb46fb23e1812160129e24dedf4c5d77\">\n.avia-image-container.av-uwjuii-bb46fb23e1812160129e24dedf4c5d77 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-uwjuii-bb46fb23e1812160129e24dedf4c5d77 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-uwjuii-bb46fb23e1812160129e24dedf4c5d77 av-styling- avia-align-center  avia-builder-el-10  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex1-lithographie-UV-80x70.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ta281m-f165ce0b5971c1172dafaa67c24319cc\">\n.flex_column.av-ta281m-f165ce0b5971c1172dafaa67c24319cc{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-ta281m-f165ce0b5971c1172dafaa67c24319cc av_one_fifth  avia-builder-el-11  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9zmre-74378a24c28c326cba42f8e746a4a7ec\">\n#top .av_textblock_section.av-9zmre-74378a24c28c326cba42f8e746a4a7ec .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-9zmre-74378a24c28c326cba42f8e746a4a7ec'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em>\u00a01.\u00a0 Air bridge, 2\u00b5m Au electrolysis (optoelectronics team)<\/em><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-q73vqy-3437a2fcd130e5fe3ac9d437cc337d63\">\n.flex_column.av-q73vqy-3437a2fcd130e5fe3ac9d437cc337d63{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-q73vqy-3437a2fcd130e5fe3ac9d437cc337d63 av_three_fifth  avia-builder-el-13  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-odhhga-5826b82e10bb55d58119e514caf4d89b'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- <strong>Cap layer sorting<\/strong> for lift off of metal deposits made by sputtering<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-m4rqyy-af6b9e753fed71162df167f0cd73d89a\">\n.flex_column.av-m4rqyy-af6b9e753fed71162df167f0cd73d89a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-m4rqyy-af6b9e753fed71162df167f0cd73d89a av_one_fifth  avia-builder-el-15  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-kfc8ru-debad4b50d52d7db2c217a31d87a33df\">\n.avia-image-container.av-kfc8ru-debad4b50d52d7db2c217a31d87a33df img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-kfc8ru-debad4b50d52d7db2c217a31d87a33df .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-kfc8ru-debad4b50d52d7db2c217a31d87a33df av-styling- avia-align-center  avia-builder-el-16  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex2-lithographie-UV-80x80.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jsl9qy-be023201bf0945616fd648652edc5aa5\">\n.flex_column.av-jsl9qy-be023201bf0945616fd648652edc5aa5{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-jsl9qy-be023201bf0945616fd648652edc5aa5 av_one_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-hec7ca-ab795b0a5eea2dc9c429fb1dacf124b2\">\n#top .av_textblock_section.av-hec7ca-ab795b0a5eea2dc9c429fb1dacf124b2 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-hec7ca-ab795b0a5eea2dc9c429fb1dacf124b2'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em> <em>2. Lift off of a 3\u00b5m Au deposit made by sputtering (NAM6 team)<\/em><\/em><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fqzabu-404f2fe14250de15e139ff199ad501c5\">\n.flex_column.av-fqzabu-404f2fe14250de15e139ff199ad501c5{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fqzabu-404f2fe14250de15e139ff199ad501c5 av_three_fifth  avia-builder-el-19  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-e3canu-42655c316e76daaff01c1b95bf4a1d75'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p class=\"translation-block\">- Thick resins (SPR, AZ15NXT) for making <strong>very deep engravings<\/strong> up to Via-hole by deep dry etching process<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ctlcje-ab45be7fa81bacb843f9385c97051875\">\n.flex_column.av-ctlcje-ab45be7fa81bacb843f9385c97051875{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-ctlcje-ab45be7fa81bacb843f9385c97051875 av_one_fifth  avia-builder-el-21  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-11u2q2-5348f981a0c9a58d4504563a69b5ad18\">\n.avia-image-container.av-11u2q2-5348f981a0c9a58d4504563a69b5ad18 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-11u2q2-5348f981a0c9a58d4504563a69b5ad18 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-11u2q2-5348f981a0c9a58d4504563a69b5ad18 av-styling- avia-align-center  avia-builder-el-22  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2016\/04\/Ex3-lithographie-UV-80x73.jpg\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-8zquui-3322278ae58b27f75d2a3271aba461ba\">\n.flex_column.av-8zquui-3322278ae58b27f75d2a3271aba461ba{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-8zquui-3322278ae58b27f75d2a3271aba461ba av_one_fifth  avia-builder-el-23  el_after_av_one_fifth  el_before_av_heading  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7d0nqi-3751819526091c7e468ff06826032b42\">\n#top .av_textblock_section.av-7d0nqi-3751819526091c7e468ff06826032b42 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-7d0nqi-3751819526091c7e468ff06826032b42'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><em>3. High aspect ratio structures SPR220 4\u00b5m on Si (CSAM team)<br \/>\n<\/em><\/p>\n<p><em>\u00a0<\/em><\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-av_heading-7c9f2d38ba4a0ac6e84ce42184b3ff2f\">\n#top .av-special-heading.av-av_heading-7c9f2d38ba4a0ac6e84ce42184b3ff2f{\npadding-bottom:1px;\n}\nbody .av-special-heading.av-av_heading-7c9f2d38ba4a0ac6e84ce42184b3ff2f .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-av_heading-7c9f2d38ba4a0ac6e84ce42184b3ff2f .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-av_heading-7c9f2d38ba4a0ac6e84ce42184b3ff2f av-special-heading-h6  avia-builder-el-25  el_after_av_one_fifth  el_before_av_one_full'><h6 class='av-special-heading-tag'  itemprop=\"headline\"  >Expertise and know-how: other<\/h6><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1uw8re-30c51dfea1256ac554209b7e53956c60\">\n.flex_column.av-1uw8re-30c51dfea1256ac554209b7e53956c60{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1uw8re-30c51dfea1256ac554209b7e53956c60 av_one_full  avia-builder-el-26  el_after_av_heading  avia-builder-el-last  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-1xgu3e-ddbc010fecbab4a320515a0d20ffd9d9'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li style=\"text-align: justify;\">Production of structured resin masks (from 300 nm to some 40 \u00b5m thick) for dry etching (ICP, RIE, DRIE, RIBE) or wet etching of materials.<\/li>\n<li style=\"text-align: justify;\">Realization of bi or trilayers of resins as protective masks for implantation, for metallic deposits (evaporation or spraying by the lift-off technique), for electrolysis (Au, Cu, ...)<\/li>\n<li style=\"text-align: justify;\">Realization of specific annealing with control of the temperature ramps allowing to minimize the constraints in the polymer or for the transfer of materials (graphene, parylene,...).<\/li>\n<li style=\"text-align: justify;\">Use of thick resins (3 to 5\u00b5m) as front protection during mechanical or laser cutting.<\/li>\n<\/ul>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":12,"featured_media":0,"parent":8972,"menu_order":10,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-9002","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9002","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=9002"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9002\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/8972"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=9002"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}