{"id":853,"date":"2012-05-17T12:50:33","date_gmt":"2012-05-17T10:50:33","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=853"},"modified":"2024-06-20T16:46:23","modified_gmt":"2024-06-20T14:46:23","slug":"focused-ion-beam","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/focused-ion-beam","title":{"rendered":"Focused Ion Beam"},"content":{"rendered":"<div  class='flex_column av-dvuhh-0c884f4d52d7f44a4ad78073a5768c9f av_one_full  avia-builder-el-0  el_before_av_one_third  avia-builder-el-first  first flex_column_div'     ><section  class='av_textblock_section av-lxk8taw1-b474eeedc800150242b2806bd75060f9'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Dual Beam Microscopy (MEB \u2013 FIB)<\/h4>\n<\/div><\/section><\/div>\n<div class='flex_column_table av-ckuct-20f69cdbd6ca0fe2745315e41f7d983d sc-av_one_third av-equal-height-column-flextable'><div  class='flex_column av-ckuct-20f69cdbd6ca0fe2745315e41f7d983d av_one_third  avia-builder-el-2  el_after_av_one_full  el_before_av_one_third  first flex_column_table_cell av-equal-height-column av-align-middle  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lxk8wpe7-220b6c8af0c81f3bd6f6ff6d34fcb906\">\n.avia-image-container.av-lxk8wpe7-220b6c8af0c81f3bd6f6ff6d34fcb906 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lxk8wpe7-220b6c8af0c81f3bd6f6ff6d34fcb906 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lxk8wpe7-220b6c8af0c81f3bd6f6ff6d34fcb906 av-styling- avia-align-center  avia-builder-el-3  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-65487 avia-img-lazy-loading-not-65487 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-1030x773.jpg\" alt='' title='PHOTO 5 RETOUCHEE'  height=\"773\" width=\"1030\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-1030x773.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-300x225.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-768x576.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-1536x1152.jpg 1536w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-2048x1536.jpg 2048w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-16x12.jpg 16w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-1500x1125.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/PHOTO-5-RETOUCHEE-705x529.jpg 705w\" sizes=\"(max-width: 1030px) 100vw, 1030px\" \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-apb11-6d7722e065bf45fa9303b28942fc9b1c av_one_third  avia-builder-el-4  el_after_av_one_third  el_before_av_one_third  flex_column_table_cell av-equal-height-column av-align-middle  column-top-margin'     ><section  class='av_textblock_section av-lxk8tvkm-29a708a72cc4557178852ce95484b5e1'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h5><strong>Zeiss \u2013 Crossbeam 550 L \u2013 <u>Characteristics\u00a0:<\/u><br \/>\n<\/strong><\/h5>\n<p><strong><u>Electron column (SEM) :<\/u><\/strong><\/p>\n<ul>\n<li>Electron source : Field effect gun (FEG)<\/li>\n<li>Accelerated voltage : 20V to 30kV<\/li>\n<li>Probe Current\u00a0: 3 pA to 40 nA<\/li>\n<li>Scanning resolution (SEM) : 0.9nm<\/li>\n<li>Transmission resolution (STEM) : 0.6nm<\/li>\n<\/ul>\n<h5><\/h5>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-lxk90els-e8400633d688e1bf017ba0e1b9c0a3ea'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong><u>Ion column (FIB) :<\/u><\/strong><\/p>\n<ul>\n<li>Ion source : Gallium liquid metal ion source (LMIS Ga+)<\/li>\n<li>Accelerated voltage : 500V to 30kV<\/li>\n<li>Probe Current\u00a0: 1pA to 100nA<\/li>\n<li>FIB resolution : \u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 3nm at 30kV<\/li>\n<li>120nm at 1kV<\/li>\n<li>330nm at 500V<\/li>\n<\/ul>\n<p><strong><u>Gaz injectors (x2<\/u><\/strong><strong>) :<\/strong> Platinum, Carbon, Tungsten, \u2026<\/p>\n<p><strong><u>Micromanipulators<\/u><\/strong><strong> : <\/strong>Kleindiek<\/p>\n<h5><\/h5>\n<\/div><\/section><\/p><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-adwj9-ca1f94ad28d9b9aa25a243f64ad38e9a av_one_third  avia-builder-el-7  el_after_av_one_third  el_before_av_hr  flex_column_table_cell av-equal-height-column av-align-middle  column-top-margin'     ><section  class='av_textblock_section av-lxk8z7gx-314e84861a28cf9edab742c6d1bb87d5'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><strong><u>Laser Femtosecond\u00a0:<\/u><\/strong><\/p>\n<ul>\n<li>Localisation\u00a0: Airlock chamber<\/li>\n<li>Focus diameter : &lt; 15 \u03bcm<\/li>\n<li>Pulse duration : &lt; 350 fs<\/li>\n<li>Pulse repetition rate : 0.1 \u2013 1000 kHz<\/li>\n<li>Scan Speed : 0.1 \u2013 9000 mm\/s<\/li>\n<li>Scan Field : 40 x 40 mm<\/li>\n<\/ul>\n<p><strong><u>Detectors :<\/u><\/strong><\/p>\n<ul>\n<li>SE (Secondary electrons)<\/li>\n<li>BSD (Backscattered electrons)<\/li>\n<li>InLens (Secondary and backscattered electrons)<\/li>\n<li>STEM (Transmission electrons)<\/li>\n<li>EDX (Oxford Ultimax 100), EBSD (Oxford Symmetry)<\/li>\n<\/ul>\n<p><strong><u>Stage :<\/u><\/strong><\/p>\n<ul>\n<li>6-axes motorised super eucentric<\/li>\n<li>Movements : X = 153mm, Y = 153mm, Z = 50mm , M = 20mm<\/li>\n<li>Tilt= -15 to 70\u00b0\u00a0 \u2013 Rotation = 360\u00b0 continuous<\/li>\n<\/ul>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 --><div  class='hr av-enlpp-67693007d52bdbded2c63ea29c4f30a5 hr-default  avia-builder-el-9  el_after_av_one_third  el_before_av_one_fifth'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p>\n<div class='flex_column_table av-q8qot-17234c936e89c7da01470b43db7c91b8 sc-av_one_fifth av-equal-height-column-flextable'><div  class='flex_column av-q8qot-17234c936e89c7da01470b43db7c91b8 av_one_fifth  avia-builder-el-10  el_after_av_hr  el_before_av_two_fifth  first flex_column_table_cell av-equal-height-column av-align-top'     ><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-juoa5-56f63f77e4edc64bf90d07ba1312257a av_two_fifth  avia-builder-el-11  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-top'     ><section  class='av_textblock_section av-lxncpivb-d27126d2c22afd767d66dbd7cd576b05'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>1. R\u00e9alisation d\u2019une pointe Chrome \u00e0 l\u2019aide d\u2019un Laser femtoseconde<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-azscd-83fc72b66db61a5a6cf0a56ae3f4f306 av_one_fifth  avia-builder-el-13  el_after_av_two_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-top'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lxncs08r-87578be6afd4b7821cd671a0f0dc1e6e\">\n.avia-image-container.av-lxncs08r-87578be6afd4b7821cd671a0f0dc1e6e img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lxncs08r-87578be6afd4b7821cd671a0f0dc1e6e .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lxncs08r-87578be6afd4b7821cd671a0f0dc1e6e av-styling- avia-align-center  avia-builder-el-14  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-65829 avia-img-lazy-loading-not-65829 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Pointe_Cr_Laser-196x300.jpg\" alt='' title='Pointe_Cr_Laser'  height=\"300\" width=\"196\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Pointe_Cr_Laser-196x300.jpg 196w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Pointe_Cr_Laser-8x12.jpg 8w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Pointe_Cr_Laser.jpg 428w\" sizes=\"(max-width: 196px) 100vw, 196px\" \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-liwhp-4480686e3f74c737463f66ba1687e8da av_one_fifth  avia-builder-el-15  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-top'     ><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-ga9lh-37f6d9c07c5fa9e1f4fe47c03c0b1743 sc-av_one_fifth av-equal-height-column-flextable'><div  class='flex_column av-ga9lh-37f6d9c07c5fa9e1f4fe47c03c0b1743 av_one_fifth  avia-builder-el-16  el_after_av_one_fifth  el_before_av_two_fifth  first flex_column_table_cell av-equal-height-column av-align-top  column-top-margin'     ><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-b77bh-4124daef9fafda3871f9f5b385763259 av_two_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-top  column-top-margin'     ><section  class='av_textblock_section av-lxncpzpn-a5210262c6eddc3a1d0d65d3a4a62214'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>2. D\u00e9coupe laser d\u2019une batterie pour analyse Synchrotron<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-d56lx-6d85ee8a7566595fb42f4f0e19164e64 av_one_fifth  avia-builder-el-19  el_after_av_two_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-top  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lxncsux3-308602bdd0eda7988e7d53f497e899f8\">\n.avia-image-container.av-lxncsux3-308602bdd0eda7988e7d53f497e899f8 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lxncsux3-308602bdd0eda7988e7d53f497e899f8 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lxncsux3-308602bdd0eda7988e7d53f497e899f8 av-styling- avia-align-center  avia-builder-el-20  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-65830 avia-img-lazy-loading-not-65830 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Batterie_Laser-277x300.jpg\" alt='' title='Batterie_Laser'  height=\"300\" width=\"277\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Batterie_Laser-277x300.jpg 277w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Batterie_Laser-11x12.jpg 11w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Batterie_Laser.jpg 620w\" sizes=\"(max-width: 277px) 100vw, 277px\" \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div><div  class='flex_column av-9tnd9-d275b287a04f8dd70f524f03ff9096b5 av_one_fifth  avia-builder-el-21  el_after_av_one_fifth  el_before_av_one_full  flex_column_table_cell av-equal-height-column av-align-top  column-top-margin'     ><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div  class='flex_column av-2yd9-90821c049c305663c69ffa2a3ddc188a av_one_full  avia-builder-el-22  el_after_av_one_fifth  avia-builder-el-last  first flex_column_div  column-top-margin'     ><section  class='av_textblock_section av-lxk8u2nf-e032a5569fb24e11a0610df3a6e46163'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p><strong>Contact: <\/strong><a>David TROADEC<\/a><\/p>\n<\/blockquote>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":447,"menu_order":10,"comment_status":"closed","ping_status":"open","template":"","meta":{"footnotes":""},"class_list":["post-853","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/853","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=853"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/853\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=853"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}