{"id":711,"date":"2012-05-14T15:55:10","date_gmt":"2012-05-14T13:55:10","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=711"},"modified":"2024-06-13T11:53:40","modified_gmt":"2024-06-13T09:53:40","slug":"polissage","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/packaging\/polissage","title":{"rendered":"Shaping chips and wafers"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_one_fourth  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_5oq6949oslhh\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" 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6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, 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width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-711'><div class='entry-content-wrapper clearfix'>\n<div class='flex_column_table av-9ywav-0b0575df3b452e8a2a25efab78148813 sc-av_one_fourth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9ywav-0b0575df3b452e8a2a25efab78148813\">\n.flex_column.av-9ywav-0b0575df3b452e8a2a25efab78148813{\nwidth:21.25%;\nmargin-left:0;\n}\n#top .flex_column_table.av-equal-height-column-flextable.av-9ywav-0b0575df3b452e8a2a25efab78148813 .av-flex-placeholder{\nwidth:5%;\n}\n<\/style>\n<div  class='flex_column av-9ywav-0b0575df3b452e8a2a25efab78148813 av_one_fourth  avia-builder-el-1  el_after_av_layerslider  el_before_av_three_fourth  avia-builder-el-first  first flex_column_table_cell av-equal-height-column av-align-middle'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lx4imfws-95b766ea05a09ef06a9d51b9cf7856f7\">\n.avia-image-container.av-lx4imfws-95b766ea05a09ef06a9d51b9cf7856f7 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lx4imfws-95b766ea05a09ef06a9d51b9cf7856f7 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lx4imfws-95b766ea05a09ef06a9d51b9cf7856f7 av-styling- avia-align-center  avia-builder-el-2  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-64898 avia-img-lazy-loading-not-64898 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/patchwork-sans-la-scie-DAD-packaging.png\" alt='' title='patchwork sans la scie DAD packaging'  height=\"740\" width=\"540\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/patchwork-sans-la-scie-DAD-packaging.png 540w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/patchwork-sans-la-scie-DAD-packaging-219x300.png 219w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/patchwork-sans-la-scie-DAD-packaging-9x12.png 9w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/patchwork-sans-la-scie-DAD-packaging-514x705.png 514w\" sizes=\"(max-width: 540px) 100vw, 540px\" \/><\/div><\/div><\/div><\/div><div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-3wvawn-79c0c4bbfcb133bb1f9c0d7be149da11\">\n.flex_column.av-3wvawn-79c0c4bbfcb133bb1f9c0d7be149da11{\nwidth:73.75%;\nmargin-left:0;\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n#top .flex_column_table.av-equal-height-column-flextable.av-3wvawn-79c0c4bbfcb133bb1f9c0d7be149da11 .av-flex-placeholder{\nwidth:5%;\n}\n<\/style>\n<div  class='flex_column av-3wvawn-79c0c4bbfcb133bb1f9c0d7be149da11 av_three_fourth  avia-builder-el-3  el_after_av_one_fourth  el_before_av_three_fourth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-8u7sn-6302fad328029cd8a5ea1b63ba0d95ec\">\n#top .av-special-heading.av-8u7sn-6302fad328029cd8a5ea1b63ba0d95ec{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-8u7sn-6302fad328029cd8a5ea1b63ba0d95ec .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-8u7sn-6302fad328029cd8a5ea1b63ba0d95ec .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-8u7sn-6302fad328029cd8a5ea1b63ba0d95ec av-special-heading-h3  avia-builder-el-4  el_before_av_textblock  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Amincissement et polissage<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-38v8fb-42cc746a62160a3941920c0c157307ad'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Il est possible au sein du p\u00f4le packaging d\u2019en amincir et de polir une large palette (semi-conducteurs, m\u00e9taux, c\u00e9ramiques, etc\u2026) avec grande pr\u00e9cision ou rapidit\u00e9 d\u2019ex\u00e9cution suivant le besoin. Ces \u00e9tapes d\u2019amincissement\/polissage sont utilis\u00e9es afin par exemple de pr\u00e9parer un substrat avant fabrication pour limiter les d\u00e9fauts de surface, amincir des dispositifs apr\u00e8s fabrication, <span class=\"st\">planariser des couches d\u2019interconnexion (<em>interlayer dielectric<\/em> thin films: ILDs) ou des structures d\u2019isolement par tranch\u00e9e peu profonde (STI: shallow trench isolation)<\/span>.<\/p>\n<p>En fonction de l\u2019application, des sp\u00e9cifications d\u2019\u00e9paisseurs et de rugosit\u00e9 de surface, il est possible de r\u00e9aliser polissage m\u00e9canique doux (Logitech PM5), rapide (Grinder G&amp;N), manuel avec la polisseuse PRESI (Minitech233) ainsi qu\u2019un polissage m\u00e9cano-chimique (CMP Alpsitec E460). De plus, l\u2019association de la polisseuse \u00e0 une colleuse automatique (Logitech 1WBS1) permet des collages tr\u00e8s reproductibles et garantit un parall\u00e9lisme optimal entre l\u2019\u00e9chantillon et le porte-\u00e9chantillon. Un syst\u00e8me de nettoyage m\u00e9gasonic (EDI ou chimique) peut \u00eatre utilis\u00e9 afin de nettoyer les \u00e9chantillons apr\u00e8s ces processus.<\/p>\n<\/div><\/section><\/p><\/div><\/div><!--close column table wrapper. Autoclose: 1 --><div  class='flex_column av-bmlzr-890f0f4e1ea0aca09bfd3ae8a144b39f av_three_fourth  avia-builder-el-6  el_after_av_three_fourth  el_before_av_one_fourth  first flex_column_div  column-top-margin'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lx4e6oup-21e1734fa859db51316e8957c45edfa6\">\n#top .av-special-heading.av-lx4e6oup-21e1734fa859db51316e8957c45edfa6{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-lx4e6oup-21e1734fa859db51316e8957c45edfa6 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-lx4e6oup-21e1734fa859db51316e8957c45edfa6 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-lx4e6oup-21e1734fa859db51316e8957c45edfa6 av-special-heading-h3  avia-builder-el-7  el_before_av_textblock  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >D\u00e9coupe de pr\u00e9cision<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-lx4e94vz-146fd3b1789c932f5ba0d2afbc2c33c3'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">Nous disposons au sein du pole d\u2019une scie de haute pr\u00e9cision pour la d\u00e9coupe de substrats minces \u00e0 \u00e9pais (jusque 3 mm d\u2019\u00e9paisseur selon les mat\u00e9riaux). La scie diamant\u00e9e (DISCO DAD 3240) permet la s\u00e9paration des puces et la structuration de tout type de mat\u00e9riaux gr\u00e2ce \u00e0 diff\u00e9rents types de lames et de param\u00e8tres de d\u00e9coupe. La taille des \u00e9chantillons peut atteindre jusque 8 pouces. Les d\u00e9bris sont \u00e9limin\u00e9s lors de la d\u00e9coupe \u00e0 l\u2019aide d\u2019un jet d\u2019eau d\u00e9-ionis\u00e9e. L\u2019eau de d\u00e9coupe est maintenue dans une unit\u00e9 de contr\u00f4le permettant de garder une temp\u00e9rature et une pression constante en circuit ferm\u00e9. L\u2019interface graphique ainsi que les fonctions d\u2019automatisation permettent des coupes de qualit\u00e9 reproductibles. Des coupes \u00e0 angle et \u00e0 g\u00e9om\u00e9tries pr\u00e9programm\u00e9es sont \u00e9galement possibles.<\/p>\n<\/div><\/section><\/p><\/div><div  class='flex_column av-av_one_fourth-8e732eaf6cff74ed0b0c26bbaca512a0 av_one_fourth  avia-builder-el-9  el_after_av_three_fourth  el_before_av_hr  flex_column_div  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lxd30tk3-3f9502ca7de888c542f257af764d660e\">\n.avia-image-container.av-lxd30tk3-3f9502ca7de888c542f257af764d660e img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lxd30tk3-3f9502ca7de888c542f257af764d660e .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lxd30tk3-3f9502ca7de888c542f257af764d660e av-styling- avia-align-center  avia-builder-el-10  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-64902 avia-img-lazy-loading-not-64902 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Scie-DAD-packaging.png\" alt='' title='Scie DAD packaging'  height=\"732\" width=\"525\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Scie-DAD-packaging.png 525w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Scie-DAD-packaging-215x300.png 215w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Scie-DAD-packaging-9x12.png 9w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Scie-DAD-packaging-506x705.png 506w\" sizes=\"(max-width: 525px) 100vw, 525px\" \/><\/div><\/div><\/div><\/div><div  class='hr av-9vao7-72ef754e2b6867bafd4675cdf5e92c91 hr-default  avia-builder-el-11  el_after_av_one_fourth  el_before_av_textblock'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><\/p>\n<section  class='av_textblock_section av-jlgofqn9-df19e0ca3fdb84f86cec9955dec58006'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Savoir-faire: points marquants<\/h4>\n<\/div><\/section>\n<div class='flex_column_table av-2wqw3b-8437008d9fe1feda289e8e90023bca80 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2wqw3b-8437008d9fe1feda289e8e90023bca80\">\n.flex_column.av-2wqw3b-8437008d9fe1feda289e8e90023bca80{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2wqw3b-8437008d9fe1feda289e8e90023bca80 av_three_fifth  avia-builder-el-13  el_after_av_textblock  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-2ojo07-67bde76ceebdaf4991084f0bf233bd2e'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>&#8211; <strong>Amincissements et polissages m\u00e9caniques doux :<\/strong><\/p>\n<p style=\"text-align: justify;\">diff\u00e9rents proc\u00e9d\u00e9s standards ont \u00e9t\u00e9 d\u00e9velopp\u00e9s en polissage doux pour amincir et polir les mat\u00e9riaux tels que: Si, GaAs, InP, GaN, Al, Quartz. Un contr\u00f4le automatique de la plan\u00e9it\u00e9 permet d\u2019obtenir un polissage plan, convexe ou concave avec une pr\u00e9cision de +\/- 5 \u00b5m et une rugosit\u00e9 de l\u2019ordre du nanom\u00e8tre. L\u2019amincissement d\u2019\u00e9chantillons d\u2019un diam\u00e8tre maximal de 3\u2033 et d\u2019\u00e9paisseur maximum de 2mm est possible jusqu\u2019\u00e0 quelques dizaines de \u00b5m, suivant leur nature.<\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2k92f3-63101743bee8f465900e64baba3b9124\">\n.flex_column.av-2k92f3-63101743bee8f465900e64baba3b9124{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2k92f3-63101743bee8f465900e64baba3b9124 av_one_fifth  avia-builder-el-15  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2aqpkn-04e01a5563814c93afe800e851080269\">\n.flex_column.av-2aqpkn-04e01a5563814c93afe800e851080269{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2aqpkn-04e01a5563814c93afe800e851080269 av_one_fifth  avia-builder-el-16  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-24s8w7-4165a5e1122091ac0e3608d642ba7366 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-24s8w7-4165a5e1122091ac0e3608d642ba7366\">\n.flex_column.av-24s8w7-4165a5e1122091ac0e3608d642ba7366{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-24s8w7-4165a5e1122091ac0e3608d642ba7366 av_three_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-1vuzb3-67cb1cf83ccf40305fb5917ffa68ffea'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>&#8211; <strong>Amincissement manuel de 650 \u00b5m de billes d\u2019acier d\u20191 mm de diam\u00e8tre coll\u00e9s dans l\u2019epoxy avec la polisseuse PRESI Minitech 233<br \/>\n<\/strong><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-154n0n-515fc199f1b93287a5fcfd58a56513be\">\n.flex_column.av-154n0n-515fc199f1b93287a5fcfd58a56513be{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-154n0n-515fc199f1b93287a5fcfd58a56513be av_one_fifth  avia-builder-el-19  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1ihhz3-e04974a526e0ec7e5bc5566eb6a4834c\">\n.avia-image-container.av-1ihhz3-e04974a526e0ec7e5bc5566eb6a4834c img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-1ihhz3-e04974a526e0ec7e5bc5566eb6a4834c .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-1ihhz3-e04974a526e0ec7e5bc5566eb6a4834c av-styling- av-img-linked avia-align-center  avia-builder-el-20  el_before_av_image  avia-builder-el-first'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-1030x773.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-1030x773.png 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-300x225.png 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-768x576.png 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-1536x1152.png 1536w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-2048x1536.png 2048w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-16x12.png 16w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-1500x1125.png 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-705x529.png 705w\" data-sizes=\"(max-width: 1030px) 100vw, 1030px\" class='avia_image'  aria-label='tissdiam 40\u00b5m - amincissement de 650 um'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-64567 avia-img-lazy-loading-not-64567 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-80x80.png\" alt='' title='tissdiam 40\u00b5m - amincissement de 650 um'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-36x36.png 36w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um-180x180.png 180w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><br \/>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lx4no6ky-69635075a98e06c9be51e1c03ad4fe8d\">\n.avia-image-container.av-lx4no6ky-69635075a98e06c9be51e1c03ad4fe8d img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lx4no6ky-69635075a98e06c9be51e1c03ad4fe8d .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lx4no6ky-69635075a98e06c9be51e1c03ad4fe8d av-styling- av-img-linked avia-align-center  avia-builder-el-21  el_after_av_image  avia-builder-el-last'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um.tif\" class='avia_image'  aria-label='tissdiam 40\u00b5m - amincissement de 650 um'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-64565 avia-img-lazy-loading-not-64565 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/tissdiam-40\u00b5m-amincissement-de-650-um.tif\" alt='' title='tissdiam 40\u00b5m - amincissement de 650 um'   itemprop=\"thumbnailUrl\"  \/><\/a><\/div><\/div><\/div><\/p><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1cjbbr-05d0d8b13b07e826c81f639175433e15\">\n.flex_column.av-1cjbbr-05d0d8b13b07e826c81f639175433e15{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1cjbbr-05d0d8b13b07e826c81f639175433e15 av_one_fifth  avia-builder-el-22  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-174i7j-5a9b35a737c6cf0d5c33c276926fae3c\">\n#top .av_textblock_section.av-174i7j-5a9b35a737c6cf0d5c33c276926fae3c .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-174i7j-5a9b35a737c6cf0d5c33c276926fae3c'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><i>2. Tissdiam 40\u00b5m \u2013 amincissement de 650 um<br \/>\n<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-vjd8f-d0080116a8bbdf6a286a5aa0f96e1c6e sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-vjd8f-d0080116a8bbdf6a286a5aa0f96e1c6e\">\n.flex_column.av-vjd8f-d0080116a8bbdf6a286a5aa0f96e1c6e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-vjd8f-d0080116a8bbdf6a286a5aa0f96e1c6e av_three_fifth  avia-builder-el-24  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-r6qcf-ea4dd6b89d03af5a05ec2fc0290f2932'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>&#8211; <strong>Reports sur substrats flexibles<br \/>\n<\/strong><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1pej93-5dbb2c2fe88151a7da966d616a240ea5\">\n.flex_column.av-1pej93-5dbb2c2fe88151a7da966d616a240ea5{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1pej93-5dbb2c2fe88151a7da966d616a240ea5 av_one_fifth  avia-builder-el-26  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lsrbj-352a7d5835f7bb6dddf0bdb3d55e9dcd\">\n.avia-image-container.av-lsrbj-352a7d5835f7bb6dddf0bdb3d55e9dcd img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lsrbj-352a7d5835f7bb6dddf0bdb3d55e9dcd .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lsrbj-352a7d5835f7bb6dddf0bdb3d55e9dcd av-styling- av-img-linked avia-align-center  avia-builder-el-27  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_report_amincissement.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_report_amincissement.png 402w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_report_amincissement-300x249.png 300w\" data-sizes=\"(max-width: 402px) 100vw, 402px\" class='avia_image'  aria-label='report sur flexible apr\u00e8s amincissement'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-11978 avia-img-lazy-loading-not-11978 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_report_amincissement-80x80.png\" alt='' title='report sur flexible apr\u00e8s amincissement'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_report_amincissement-80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_report_amincissement-36x36.png 36w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_report_amincissement-180x180.png 180w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-efdb3-3d978fbda1e2ca3b6700e44b4b8235c9\">\n.flex_column.av-efdb3-3d978fbda1e2ca3b6700e44b4b8235c9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-efdb3-3d978fbda1e2ca3b6700e44b4b8235c9 av_one_fifth  avia-builder-el-28  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7ev13-0bb57114094eb8b4828847c516df6df9\">\n#top .av_textblock_section.av-7ev13-0bb57114094eb8b4828847c516df6df9 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-7ev13-0bb57114094eb8b4828847c516df6df9'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><i>2. Silicon components reported on flexible substrate after grinding and chemical etching<br \/>\n<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-13rsj3-b370e4d7874bab7ad220210f288465d2 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13rsj3-b370e4d7874bab7ad220210f288465d2\">\n.flex_column.av-13rsj3-b370e4d7874bab7ad220210f288465d2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-13rsj3-b370e4d7874bab7ad220210f288465d2 av_three_fifth  avia-builder-el-30  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-w8hjz-a1139ea0f80121f38170d12faba2faa8'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>&#8211; <strong>Polissage M\u00e9cano Chimique pour \u2013 <\/strong>Interlevels dielectrics ILDs, \u2013 Shallow trench isolation STI technology, -Damascene process<\/p>\n<p><strong>\u00a0<\/strong><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-os0fj-5fbfda79c76266351000716e9f6d91e3\">\n.flex_column.av-os0fj-5fbfda79c76266351000716e9f6d91e3{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-os0fj-5fbfda79c76266351000716e9f6d91e3 av_one_fifth  avia-builder-el-32  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ixmcv-5eb816b1b99f66fe1cf878c32f9186e3\">\n.avia-image-container.av-ixmcv-5eb816b1b99f66fe1cf878c32f9186e3 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-ixmcv-5eb816b1b99f66fe1cf878c32f9186e3 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-ixmcv-5eb816b1b99f66fe1cf878c32f9186e3 av-styling- av-img-linked avia-align-center  avia-builder-el-33  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_CMP_a-confirmer.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_CMP_a-confirmer.png 591w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_CMP_a-confirmer-300x225.png 300w\" data-sizes=\"(max-width: 591px) 100vw, 591px\" class='avia_image'  aria-label='pillars_SAW'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-11986 avia-img-lazy-loading-not-11986 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_CMP_a-confirmer-80x80.png\" alt='' title='pillars_SAW'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_CMP_a-confirmer-80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_CMP_a-confirmer-36x36.png 36w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/Ex_CMP_a-confirmer-180x180.png 180w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-d0567-91801dcae8d7a1b6429ffe528fd2a039\">\n.flex_column.av-d0567-91801dcae8d7a1b6429ffe528fd2a039{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-d0567-91801dcae8d7a1b6429ffe528fd2a039 av_one_fifth  avia-builder-el-34  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-9r9lz-7027e8472d287378313fdffe1dfa89fc\">\n#top .av_textblock_section.av-9r9lz-7027e8472d287378313fdffe1dfa89fc .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-9r9lz-7027e8472d287378313fdffe1dfa89fc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><i>3.<\/i> <em>Ni pillars thinning and planarization for the fabrication of pillars-based metamaterial (SAW process)<\/em><\/p>\n<p style=\"text-align: justify;\"><i>\u00a0<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-5llhr-ea6aa2f4b8333004ade23692cd400d6e sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-5llhr-ea6aa2f4b8333004ade23692cd400d6e\">\n.flex_column.av-5llhr-ea6aa2f4b8333004ade23692cd400d6e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-5llhr-ea6aa2f4b8333004ade23692cd400d6e av_three_fifth  avia-builder-el-36  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-1g29jj-185047489c7f931b46aa1ca381e16741'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">\u2013 Technique des \u00ab\u00a0carr\u00e9s de chocolat\u00a0\u00bb : r\u00e9glage de la profondeur de coupe pour permettre une entaille partielle du substrat fa\u00e7on \u00ab\u00a0carr\u00e9s de chocolat\u00a0\u00bb\u00a0 facilitant la d\u00e9coupe finale par clivage pour des surfaces de 1 mm\u00b2 et plus.\u00a0<i><br \/>\n<\/i><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-49v4n-87269fcf2030489d24d95da6ebf4eec8\">\n.flex_column.av-49v4n-87269fcf2030489d24d95da6ebf4eec8{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-49v4n-87269fcf2030489d24d95da6ebf4eec8 av_one_fifth  avia-builder-el-38  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lx4hgbim-98b46663abd311e926c47e5f7d86c724\">\n.avia-image-container.av-lx4hgbim-98b46663abd311e926c47e5f7d86c724 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lx4hgbim-98b46663abd311e926c47e5f7d86c724 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lx4hgbim-98b46663abd311e926c47e5f7d86c724 av-styling- av-img-linked avia-align-center  avia-builder-el-39  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1.png 120w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1-80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1-12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1-36x36.png 36w\" data-sizes=\"(max-width: 120px) 100vw, 120px\" class='avia_image'  aria-label='Ex1-d\u00e9coupe-GaAs-e1472041757895-120x120'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-64503 avia-img-lazy-loading-not-64503 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1-80x80.png\" alt='' title='Ex1-d\u00e9coupe-GaAs-e1472041757895-120x120'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1-80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1-12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1-36x36.png 36w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex1-decoupe-GaAs-e1472041757895-120x120-1.png 120w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-vjvr3-efda6dac4cfd8a168cd23c7f328bcb36\">\n.flex_column.av-vjvr3-efda6dac4cfd8a168cd23c7f328bcb36{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-vjvr3-efda6dac4cfd8a168cd23c7f328bcb36 av_one_fifth  avia-builder-el-40  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lx4gwn7x-22efd268e70ca6c6b1f18a6152e3984b\">\n#top .av_textblock_section.av-lx4gwn7x-22efd268e70ca6c6b1f18a6152e3984b .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-lx4gwn7x-22efd268e70ca6c6b1f18a6152e3984b'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>4. D\u00e9coupe d\u2019\u00e9l\u00e9ments en GaAs de 3 x 0.5 mm de c\u00f4t\u00e9, 600 \u00b5m d\u2019\u00e9paisseur<\/em><i><br \/>\n<\/i><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-2wiw7-9be7ed3a6150500f8cffaeee6ed430d5 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-2wiw7-9be7ed3a6150500f8cffaeee6ed430d5\">\n.flex_column.av-2wiw7-9be7ed3a6150500f8cffaeee6ed430d5{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-2wiw7-9be7ed3a6150500f8cffaeee6ed430d5 av_three_fifth  avia-builder-el-42  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-75hr-deb37a3fac09e57ffa445b58fbb1b210'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">\u2013 D\u00e9coupes m\u00e9caniques d\u2019assemblages de mat\u00e9riaux de duret\u00e9s diff\u00e9rentes en micro-cavit\u00e9s ou membranes avec conservation de l\u2019int\u00e9grit\u00e9 des structures<i>.<br \/>\n<\/i><\/p>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-flvef-4e50e711528c270aaa609afbf7a76253\">\n.flex_column.av-flvef-4e50e711528c270aaa609afbf7a76253{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-flvef-4e50e711528c270aaa609afbf7a76253 av_one_fifth  avia-builder-el-44  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lx4hec50-76714ec8278fa82616f9fdae3737a669\">\n.avia-image-container.av-lx4hec50-76714ec8278fa82616f9fdae3737a669 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-lx4hec50-76714ec8278fa82616f9fdae3737a669 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-lx4hec50-76714ec8278fa82616f9fdae3737a669 av-styling- av-img-linked avia-align-center  avia-builder-el-45  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1-12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1-36x36.png 36w\" data-sizes=\"(max-width: 80px) 100vw, 80px\" class='avia_image'  aria-label='Ex3-d\u00e9coupe-cavit\u00e9-80x80'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-64500 avia-img-lazy-loading-not-64500 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1.png\" alt='' title='Ex3-d\u00e9coupe-cavit\u00e9-80x80'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1-12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/06\/Ex3-decoupe-cavite-80x80-1-36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-arm93-efcd8c2a979fb824801526de34c37cb2\">\n.flex_column.av-arm93-efcd8c2a979fb824801526de34c37cb2{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-arm93-efcd8c2a979fb824801526de34c37cb2 av_one_fifth  avia-builder-el-46  el_after_av_one_fifth  avia-builder-el-last  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lx4gwr33-c9be33f606002e312ef7ea11111c0785\">\n#top .av_textblock_section.av-lx4gwr33-c9be33f606002e312ef7ea11111c0785 .avia_textblock{\nfont-size:11px;\n}\n<\/style>\n<section  class='av_textblock_section av-lx4gwr33-c9be33f606002e312ef7ea11111c0785'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><i>5<\/i><em>. D\u00e9coupe de Si\/verre avec cavit\u00e9, \u00e9paisseur 1680 \u00b5m\u00a0avant amincissement<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":11372,"menu_order":5,"comment_status":"closed","ping_status":"open","template":"","meta":{"footnotes":""},"class_list":["post-711","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/711","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=711"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/711\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/11372"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=711"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}