{"id":703,"date":"2012-05-14T15:45:28","date_gmt":"2012-05-14T13:45:28","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=703"},"modified":"2024-06-18T09:59:20","modified_gmt":"2024-06-18T07:59:20","slug":"plasmas","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/plasmas","title":{"rendered":"Etching and plasma treatment"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_10u9ewp4pfmc\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, 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width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-703'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-thmwn-aa849b359d93dae30a5ce238143da115\">\n#top .av-special-heading.av-thmwn-aa849b359d93dae30a5ce238143da115{\npadding-bottom:10px;\n}\nbody .av-special-heading.av-thmwn-aa849b359d93dae30a5ce238143da115 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-thmwn-aa849b359d93dae30a5ce238143da115 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-thmwn-aa849b359d93dae30a5ce238143da115 av-special-heading-h3  avia-builder-el-1  el_after_av_layerslider  el_before_av_two_fifth  avia-builder-el-first'><h3 class='av-special-heading-tag'  itemprop=\"headline\"  >Etching and plasma treatment<\/h3><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-dmcjr-75d523b7a9534f368ea8d648f8518597\">\n.flex_column.av-dmcjr-75d523b7a9534f368ea8d648f8518597{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-dmcjr-75d523b7a9534f368ea8d648f8518597 av_two_fifth  avia-builder-el-2  el_after_av_heading  el_before_av_three_fifth  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-3wrcxb-b9fea0b700b3d13e5d1adcdca88b6c95'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-19902 aligncenter\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma.jpg\" alt=\"\" width=\"300\" height=\"225\" \/><\/a><\/p>\n<\/div><\/section><\/div>\n<div  class='flex_column av-81er3-66001974a3b07454d203d033636e0063 av_three_fifth  avia-builder-el-4  el_after_av_two_fifth  el_before_av_one_full  flex_column_div'     ><section  class='av_textblock_section av-lxk3r79l-8ca172b1517092d3401a2ef8ac9feced'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p>Notre savoir faire comprend la gravure des mat\u00e9riaux III\/V divers,divers alliages tels que TaN, TiN, di\u00e9lectriques, des mat\u00e9riaux magn\u00e9tiques ou encore ferro\u00e9lectriques et les traitements et pr\u00e9parations de surface.<br \/>\nPour r\u00e9aliser ces gravures, nous avons \u00e0 notre disposition, 2 syst\u00e8mes RIE Plasmalab 80+ (Oxford), un syst\u00e8me ICP-RIE system Plasmalab 100 (Oxford) \u00e0 2 chambres et un syst\u00e8me ICP-RIE de la marque Sentech. Un grand nombre de\u00a0 mat\u00e9riaux peut \u00eatre grav\u00e9 gr\u00e2ce \u00e0 la diversit\u00e9 de gaz disponibles: N2, O2, Ar, He, SF6, C4F8, CHF3, CH4, H2, CF4, BCl3, Cl2. Des wafers de 4 pouces sont utilis\u00e9s mais il est possible par simple collage sur un wafer support de graver des morceaux.<br \/>\nNous utilisons \u00e9galement les plasmas RF O2 pour les traitements et pr\u00e9parations de surface, ainsi qu\u2019un stripper (PVA Tepla 300) pour les gravures et pr\u00e9parations de surface par plasma micro-ondes de O2\/CF4 .<\/p>\n<\/div><\/section><\/div>\n<div  class='flex_column av-7xf8f-be94b0c3397e39dc6c2d7fcb4b256128 av_one_full  avia-builder-el-6  el_after_av_three_fifth  el_before_av_three_fifth  first flex_column_div'     ><p><div  class='hr av-9k8in-6400dae05a0d47578161e8d16c997f20 hr-default  avia-builder-el-7  el_before_av_textblock  avia-builder-el-first'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div><br \/>\n<section  class='av_textblock_section av-3dc2jj-a9d17ec96218974ba8793143559fdbb4'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4>Expertise and know-how: some highlights<\/h4>\n<\/div><\/section><\/p><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-kpk1r-87bf1d8c326bc636b715867fa739fc04\">\n.flex_column.av-kpk1r-87bf1d8c326bc636b715867fa739fc04{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-kpk1r-87bf1d8c326bc636b715867fa739fc04 av_three_fifth  avia-builder-el-9  el_after_av_one_full  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jl23u3wz-41ab2217d744ea2b1b611be19600323c'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li>Controlled etching of III\/V materials such as GaAs, InP, InGaAs, GaSb, GaN,... by ICP in a chlorinated medium.<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-gukyn-48daaf66199ed8183f3b3f15a4ac2a93\">\n.flex_column.av-gukyn-48daaf66199ed8183f3b3f15a4ac2a93{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-gukyn-48daaf66199ed8183f3b3f15a4ac2a93 av_one_fifth  avia-builder-el-11  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jl23uk23-e92db24d702a5d1bea746c71d2ca5cbd\">\n.avia-image-container.av-jl23uk23-e92db24d702a5d1bea746c71d2ca5cbd img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jl23uk23-e92db24d702a5d1bea746c71d2ca5cbd .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jl23uk23-e92db24d702a5d1bea746c71d2ca5cbd av-styling- avia-align-center  avia-builder-el-12  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19908 avia-img-lazy-loading-not-19908 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_transistor.png\" alt='' title='cmnf_gravures_plasma_transistor'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_transistor.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_transistor-36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7o5wf-3c6783c0351d0d6dbbdba5042cb181a5\">\n.flex_column.av-7o5wf-3c6783c0351d0d6dbbdba5042cb181a5{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7o5wf-3c6783c0351d0d6dbbdba5042cb181a5 av_one_fifth  avia-builder-el-13  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jl23sryu-8f6fcf5cc802b1a6c90c0b19b1c41974\">\n#top .av_textblock_section.av-jl23sryu-8f6fcf5cc802b1a6c90c0b19b1c41974 .avia_textblock{\nfont-size:10px;\n}\n<\/style>\n<section  class='av_textblock_section av-jl23sryu-8f6fcf5cc802b1a6c90c0b19b1c41974'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>Realization of a GaSb based I-MOSFET (Anode team)<\/em><\/p>\n<\/div><\/section><\/div>\n<div class='flex_column_table av-997wv-89309d2b26ecfa093d59d9df9047354a sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-997wv-89309d2b26ecfa093d59d9df9047354a\">\n.flex_column.av-997wv-89309d2b26ecfa093d59d9df9047354a{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-997wv-89309d2b26ecfa093d59d9df9047354a av_three_fifth  avia-builder-el-15  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-jl23jnj2-711916ff5c768ced561b4dd44152215c'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li class=\"translation-block\">Control through a comparative study of the <strong>selectivity of e-beam resins<\/strong> (PMMA, ZEP, CSAR) in ICP or RIE plasmas of SF6 or Cl2 chemistry<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7v3wf-8e7c899113e6498ecc4172dc3684eb3f\">\n.flex_column.av-7v3wf-8e7c899113e6498ecc4172dc3684eb3f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7v3wf-8e7c899113e6498ecc4172dc3684eb3f av_one_fifth  avia-builder-el-17  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jl23q6uk-6c8526b13abab7b362919ba2fdae7d73\">\n.avia-image-container.av-jl23q6uk-6c8526b13abab7b362919ba2fdae7d73 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jl23q6uk-6c8526b13abab7b362919ba2fdae7d73 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jl23q6uk-6c8526b13abab7b362919ba2fdae7d73 av-styling- avia-align-center  avia-builder-el-18  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19906 avia-img-lazy-loading-not-19906 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_resine.png\" alt='' title='cmnf_gravures_plasma_resine'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_resine.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_resine-36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1w3okn-b6065061f236d367013e9b8dde744a28\">\n.flex_column.av-1w3okn-b6065061f236d367013e9b8dde744a28{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1w3okn-b6065061f236d367013e9b8dde744a28 av_one_fifth  avia-builder-el-19  el_after_av_one_fifth  el_before_av_three_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1ocxun-d91721d6f3abb6865529b11660a8c25f\">\n#top .av_textblock_section.av-1ocxun-d91721d6f3abb6865529b11660a8c25f .avia_textblock{\nfont-size:10px;\n}\n<\/style>\n<section  class='av_textblock_section av-1ocxun-d91721d6f3abb6865529b11660a8c25f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>Behavior of ZEP resin during 50 nm pitch 150 nm trench etching (collaborative study of lithography and etching resources).<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n<div class='flex_column_table av-1lo7lj-f5abf34ac67a3eabf5fa871252180513 sc-av_three_fifth av-equal-height-column-flextable'>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1lo7lj-f5abf34ac67a3eabf5fa871252180513\">\n.flex_column.av-1lo7lj-f5abf34ac67a3eabf5fa871252180513{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-1lo7lj-f5abf34ac67a3eabf5fa871252180513 av_three_fifth  avia-builder-el-21  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-1fvsif-dcc3ba9cc66708783a274d2b27a41e16'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><ul>\n<li>Etching of multilayer magneto-electric assemblies<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-18g1mf-d2dc50df340db5a6002e2f10dd5851fd\">\n.flex_column.av-18g1mf-d2dc50df340db5a6002e2f10dd5851fd{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-18g1mf-d2dc50df340db5a6002e2f10dd5851fd av_one_fifth  avia-builder-el-23  el_after_av_three_fifth  el_before_av_one_fifth  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-135ozz-9ce826716ce89f4bf8b95c2c8b43e8c4\">\n.avia-image-container.av-135ozz-9ce826716ce89f4bf8b95c2c8b43e8c4 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-135ozz-9ce826716ce89f4bf8b95c2c8b43e8c4 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-135ozz-9ce826716ce89f4bf8b95c2c8b43e8c4 av-styling- av-img-linked avia-align-center  avia-builder-el-24  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_microstructure.png\" data-srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_microstructure.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_microstructure-36x36.png 36w\" data-sizes=\"(max-width: 80px) 100vw, 80px\" class='avia_image'  aria-label='cmnf_gravures_plasma_microstructure'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19904 avia-img-lazy-loading-not-19904 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_microstructure.png\" alt='' title='cmnf_gravures_plasma_microstructure'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_microstructure.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/08\/cmnf_gravures_plasma_microstructure-36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><\/div>\n<div class='av-flex-placeholder'><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-xxxqn-fac5733a59eae2bba3605aa5e062cebe\">\n.flex_column.av-xxxqn-fac5733a59eae2bba3605aa5e062cebe{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-xxxqn-fac5733a59eae2bba3605aa5e062cebe av_one_fifth  avia-builder-el-25  el_after_av_one_fifth  el_before_av_one_full  flex_column_table_cell av-equal-height-column av-align-middle av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-sks1b-8b2b1d74e726920bddbf49c898c60432\">\n#top .av_textblock_section.av-sks1b-8b2b1d74e726920bddbf49c898c60432 .avia_textblock{\nfont-size:10px;\n}\n<\/style>\n<section  class='av_textblock_section av-sks1b-8b2b1d74e726920bddbf49c898c60432'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\"><em>Etching of a PMN-PT microstructure by plasma ICP-RIE Chlorine (Aiman-films group)<br \/>\n<\/em><\/p>\n<\/div><\/section><\/div><\/div><!--close column table wrapper. Autoclose: 1 -->\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-73psf-cb6d3e3b9422157fe45ea86b7fb5d104\">\n.flex_column.av-73psf-cb6d3e3b9422157fe45ea86b7fb5d104{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-73psf-cb6d3e3b9422157fe45ea86b7fb5d104 av_one_full  avia-builder-el-27  el_after_av_one_fifth  el_before_av_hr  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-awtqv-1232d5940087475c8b1f711c3af8b4fc'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h4 style=\"text-align: justify;\">Expertise and know-how: other<\/h4>\n<ul>\n<li style=\"text-align: justify;\">Surface treatments and cleaning by O2, SF6\/O2 or Ar\/O2 plasma<\/li>\n<li style=\"text-align: justify;\">Surface preparation before anodic or thermal bonding by microwave O2 plasma<\/li>\n<li style=\"text-align: justify;\">Silicon etching in RIE and ICP-RIE, including Si nanowire formation,...<\/li>\n<li style=\"text-align: justify;\">Deburring and de-flashing of etching flanks after Bosch process to improve component performance without scaloping<\/li>\n<\/ul>\n<\/div><\/section><\/div>\n<div  class='hr av-av_hr-91d7ccd583a503147498e120fee2ff9b hr-default  avia-builder-el-29  el_after_av_one_full  el_before_av_textblock'><span class='hr-inner'><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n<section  class='av_textblock_section av-lxk43xeu-d4d444326fd4b7a492c3d793b7aa8cf9'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p>Contacts: Timothey Bertrand, Giuseppe Di Gioia, Dmitri Yarekha<\/p>\n<\/blockquote>\n<\/div><\/section>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":447,"menu_order":1,"comment_status":"closed","ping_status":"open","template":"","meta":{"footnotes":""},"class_list":["post-703","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/703","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=703"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/703\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=703"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}