{"id":52943,"date":"2022-06-03T16:05:18","date_gmt":"2022-06-03T14:05:18","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=52943"},"modified":"2022-06-07T11:24:45","modified_gmt":"2022-06-07T09:24:45","slug":"projet-phare-materials-dielectrics","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les-projets-phare\/projet-phare-materials\/projet-phare-materials-dielectrics","title":{"rendered":"Projet phare Materials \u2013 Dielectrics"},"content":{"rendered":"<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1kzgasb-1d96ca1da1a0998e66a381fd10556164\">\n.flex_column.av-1kzgasb-1d96ca1da1a0998e66a381fd10556164{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 20px 0px;\n}\n<\/style>\n<div  class='flex_column av-1kzgasb-1d96ca1da1a0998e66a381fd10556164 av_one_full  avia-builder-el-0  el_before_av_toggle_container  avia-builder-el-first  first flex_column_div'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-l3yhdtf4-b86faea8a000116652fcc77a34578a0c\">\n.avia-image-container.av-l3yhdtf4-b86faea8a000116652fcc77a34578a0c img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-l3yhdtf4-b86faea8a000116652fcc77a34578a0c .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-l3yhdtf4-b86faea8a000116652fcc77a34578a0c av-styling- avia-align-center  avia-builder-el-1  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-52944 avia-img-lazy-loading-not-52944 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/06\/titre_dielectrics.jpg\" alt='' title='titre_dielectrics'  height=\"180\" width=\"180\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/06\/titre_dielectrics.jpg 180w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/06\/titre_dielectrics-80x80.jpg 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/06\/titre_dielectrics-12x12.jpg 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/06\/titre_dielectrics-36x36.jpg 36w\" sizes=\"(max-width: 180px) 100vw, 180px\" \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-l3y7rjdk-a69bd7bbd005721029b5c946a025139d\">\n#top .togglecontainer.av-l3y7rjdk-a69bd7bbd005721029b5c946a025139d p.toggler{\nborder-color:#f28447;\n}\n#top .togglecontainer.av-l3y7rjdk-a69bd7bbd005721029b5c946a025139d p.toggler.activeTitle{\ncolor:#f28447;\nborder-color:#f28447;\n}\n#top .togglecontainer.av-l3y7rjdk-a69bd7bbd005721029b5c946a025139d .toggle_wrap .toggle_content{\nborder-color:#f28447;\n}\n<\/style>\n<div  class='togglecontainer av-l3y7rjdk-a69bd7bbd005721029b5c946a025139d av-elegant-toggle  avia-builder-el-2  el_after_av_one_full  avia-builder-el-last  toggle_close_all hasCurrentStyle' >\n<section class='av_toggle_section av-av_toggle-c036fa044b838c0f66e4e65cde565303'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div role=\"tablist\" class=\"single_toggle\" data-tags=\"{All} \"  ><p id='toggle-toggle-id-1' data-fake-id='#toggle-id-1' class='toggler  av-title-above av-inherit-border-color'  itemprop=\"headline\"  role='tab' tabindex='0' aria-controls='toggle-id-1' data-slide-speed=\"200\" data-title=\"Oxides, nitrides, oxinitrides\" data-title-open=\"\" data-aria_collapsed=\"Click to expand: Oxides, nitrides, oxinitrides\" data-aria_expanded=\"Click to collapse: Oxides, nitrides, oxinitrides\">Oxides, nitrides, oxinitrides<span class=\"toggle_icon\"><span class=\"vert_icon\"><\/span><span class=\"hor_icon\"><\/span><\/span><\/p><div id='toggle-id-1' aria-labelledby='toggle-toggle-id-1' role='region' class='toggle_wrap  av-title-above'  ><div class='toggle_content invers-color av-inherit-border-color'  itemprop=\"text\" ><h2>Oxides, nitrides, oxinitrides<\/h2>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-f0d5074a002e20eff4be0ceb53609087\">\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087{\ncolor:#f28447;\nborder-color:#f28447;\n}\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-f0d5074a002e20eff4be0ceb53609087 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue881' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><strong>Materials<br \/>\n<\/strong><span lang=\"EN-US\">SiO<sub>2<\/sub>, Si<sub>3<\/sub>N<sub>4<\/sub>, Si<sub>x<\/sub>N<sub>y<\/sub>, Al<sub>2<\/sub>O<sub>3<\/sub>, TiN, TiO<sub>2<\/sub>, TiON, LTO, oxynitrides<\/span><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-f0d5074a002e20eff4be0ceb53609087\">\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087{\ncolor:#f28447;\nborder-color:#f28447;\n}\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-f0d5074a002e20eff4be0ceb53609087 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue881' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><span style=\"color: #000000;\"><strong>Synthesis<br \/>\n<\/strong><\/span>ALD \u2013 300\u00b0C \u2013 up to 8 inch wafers : Al<sub>2<\/sub>O<sub>3 <\/sub>\u00a0(TMAH + H<sub>2<\/sub>O), TiO<sub>2<\/sub> (TiCl<sub>4<\/sub> +H<sub>2<\/sub>O)<br \/>\nLPCVD Tempress furnaces- up to 4 inch wafers: LTO (420\u00b0C), Si<sub>x<\/sub>N<sub>y<\/sub>, Si<sub>3<\/sub>N<sub>4<\/sub>, oxinitrides (600 to 825\u00b0C),<br \/>\nAPCVD Tempress furnaces \u2013 850 \u00e0 1100\u00b0C \u2013 up to 4 inch wafers : wet (50 to 2500 nm) or dry SiO<sub>2<\/sub> (5 to 500 nm)<br \/>\nPECVD \u2013 100 \u00e0 340\u00b0C \u2013 HF 13.56 MHz \u2013 1 Torr \u2013 up to 8 inch wafers : Si<sub>3<\/sub>N<sub>4<\/sub>SiO<sub>2<\/sub><br \/>\nSputtering \u2013 &gt; 300\u00b0C \u2013 up to 4 inch wafers : TiN, TiON<\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-f0d5074a002e20eff4be0ceb53609087\">\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087{\ncolor:#f28447;\nborder-color:#f28447;\n}\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-f0d5074a002e20eff4be0ceb53609087 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue881' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><span style=\"color: #000000;\"><strong> Mastering<\/strong><\/span><br \/>\nComplete\/ Exploratory for oxinitrides<\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-f0d5074a002e20eff4be0ceb53609087\">\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087{\ncolor:#f28447;\nborder-color:#f28447;\n}\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-f0d5074a002e20eff4be0ceb53609087 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue881' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><span style=\"color: #000000;\"><strong> Applications<br \/>\n<\/strong><\/span>Electrical insulator, barrier and passivation layers,\u00a0 etching support, electrode for 3D \u00b5battery, capacitor<\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-f0d5074a002e20eff4be0ceb53609087\">\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087{\ncolor:#f28447;\nborder-color:#f28447;\n}\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-f0d5074a002e20eff4be0ceb53609087 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue881' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><span style=\"color: #000000;\"><strong> Characterisation<br \/>\n<\/strong><\/span>Profilometry, Ellipsometry, SEM, stress, breakdown voltage, roughness<\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mqde7m-f0d5074a002e20eff4be0ceb53609087\">\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087{\ncolor:#f28447;\nborder-color:#f28447;\n}\n.av_font_icon.av-mqde7m-f0d5074a002e20eff4be0ceb53609087 .av-icon-char{\nfont-size:25px;\nline-height:25px;\n}\n<\/style>\n<span  class='av_font_icon av-mqde7m-f0d5074a002e20eff4be0ceb53609087 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue881' data-av_iconfont='entypo-fontello' ><\/span><\/span>\n<p><span style=\"color: #000000;\"><strong> Partnership<br \/>\n<\/strong><\/span>Vmicro, EFE<\/p>\n<p><div  class='avia-button-wrap av-rpqvoq-62b7517046d9f2ea144d549c430c3199-wrap avia-button-left  avia-builder-el-9  el_after_av_font_icon  el_before_av_button'><a href='mailto: isabelle.roch@univ-lille.fr'  class='avia-button av-rpqvoq-62b7517046d9f2ea144d549c430c3199 av-link-btn avia-icon_select-yes-left-icon avia-size-small avia-position-left avia-color-silver'   aria-label=\" isabelle.roch@univ-lille.fr\"><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'><\/span><span class='avia_iconbox_title' > isabelle.roch@univ-lille.fr<\/span><\/a><\/div><br \/>\n<div  class='avia-button-wrap av-rpqvoq-a0cd343465ecd16a2ee83db169b35d06-wrap avia-button-left  avia-builder-el-10  el_after_av_button  avia-builder-el-last'><a href='mailto: guillaume.cochez@univ-lille.fr'  class='avia-button av-rpqvoq-a0cd343465ecd16a2ee83db169b35d06 av-link-btn avia-icon_select-yes-left-icon avia-size-small avia-position-left avia-color-silver'   aria-label=\" guillaume.cochez@univ-lille.fr\"><span class='avia_button_icon avia_button_icon_left' aria-hidden='true' data-av_icon='\ue805' data-av_iconfont='entypo-fontello'><\/span><span class='avia_iconbox_title' > guillaume.cochez@univ-lille.fr<\/span><\/a><\/div><\/p>\n<\/div><\/div><\/div><\/section>\n<\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":50018,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-52943","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/52943","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=52943"}],"version-history":[{"count":0,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/52943\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/50018"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=52943"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}