{"id":50026,"date":"2022-01-25T12:53:12","date_gmt":"2022-01-25T10:53:12","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=50026"},"modified":"2024-07-23T13:54:55","modified_gmt":"2024-07-23T11:54:55","slug":"projet-phare-micro-nano-devices","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/projet-phare-micro-nano-devices","title":{"rendered":"Micro Nano Devices flagship project"},"content":{"rendered":"<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mhdo7s-f15fd1db2e2bca00030b55b696efbe8b\">\n.flex_column.av-mhdo7s-f15fd1db2e2bca00030b55b696efbe8b{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mhdo7s-f15fd1db2e2bca00030b55b696efbe8b av_one_full  avia-builder-el-0  el_before_av_textblock  avia-builder-el-first  first flex_column_div av-zero-column-padding'     ><section  class='av_textblock_section av-lyyctiy6-c4ff37fe420407895f4e64c549faba5d'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h1 style=\"text-align: center;\"><span style=\"color: #e88215;\">MICRO\/NANO DEVICES<\/span><\/h1>\n<hr \/>\n<\/div><\/section><\/div><section  class='av_textblock_section av-ksyp8ink-3-67c44fe882c6e7bb07766d78eaaa82ab'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><h5>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-d9a3c433f95a8ada0341ef5516a26d08\">\n.av_font_icon.av-13ewzjw-d9a3c433f95a8ada0341ef5516a26d08{\ncolor:#800000;\nborder-color:#800000;\n}\n.av_font_icon.av-13ewzjw-d9a3c433f95a8ada0341ef5516a26d08 .av-icon-char{\nfont-size:20px;\nline-height:20px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-d9a3c433f95a8ada0341ef5516a26d08 avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue871' data-av_iconfont='entypo-fontello' ><\/span><\/span><\/h5>\n<p>IEMN is structured by flagship projects targeting societal challenges such as health, energy, or telecommunications. The success of most of them will require the development of devices beyond the art. They are fabricated by using available micro and nanotechnology techniques and devices roadmaps but also developing new concepts breaking through the limits of the existing technology in terms of new material integration, performance, energy efficiency, cost or environmental sustainability. The Micro &amp; Nanodevices project is aimed at developing both approaches:<\/p>\n<ul>\n<li>Push the limits of existing technologies already present at the IEMN.<\/li>\n<li>Develop devices based on original\/new physical effects, materials, etc.<\/li>\n<\/ul>\n<p>In both cases, it benefits from the strong basis of IEMN in Micro &amp; Nano device fabrication techniques coming from the well-established expertise of its technical&amp; academic teams and its state-of-the-art nanotech and characterization facility.<\/p>\n<\/div><\/section><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-lyycvjgg-653ae76408c4b6df262578d245303cf2\">\n.flex_column.av-lyycvjgg-653ae76408c4b6df262578d245303cf2{\nbackground-color:#ffffff;\n}\n<\/style>\n<div  class='flex_column av-lyycvjgg-653ae76408c4b6df262578d245303cf2 av_one_full  avia-builder-el-4  el_after_av_textblock  el_before_av_one_fourth  first flex_column_div  column-top-margin'     ><div  class='tabcontainer av-1fgj988-61d7df9f84d23a5b93ebcccf9f2a5968 top_tab  avia-builder-el-5  avia-builder-el-no-sibling'>\n<section class='av_tab_section av_tab_section av-tirtey-e1446422066379b69a1747267373480d'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div id='tab-id-1-tab' class='tab active_tab' role='tab' aria-selected=\"true\" tabindex=\"0\" data-fake-id='#tab-id-1' aria-controls='tab-id-1-content'  itemprop=\"headline\" ><span class='tab_icon' aria-hidden='true' data-av_icon='\ue875' data-av_iconfont='entypo-fontello'><\/span>Objectives<\/div><div id='tab-id-1-content' class='tab_content active_tab_content' role='tabpanel' aria-labelledby='tab-id-1-tab' aria-hidden=\"false\"><div class='tab_inner_content invers-color'  itemprop=\"text\" ><h5>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-13ewzjw-2-47a7f28680df1b538da45a5b8ad9000e\">\n.av_font_icon.av-13ewzjw-2-47a7f28680df1b538da45a5b8ad9000e{\ncolor:#0a607a;\nborder-color:#0a607a;\n}\n.av_font_icon.av-13ewzjw-2-47a7f28680df1b538da45a5b8ad9000e .av-icon-char{\nfont-size:22px;\nline-height:22px;\n}\n<\/style>\n<span  class='av_font_icon av-13ewzjw-2-47a7f28680df1b538da45a5b8ad9000e avia_animate_when_visible av-icon-style- avia-icon-pos-left avia-icon-animate'><span class='av-icon-char' aria-hidden='true' data-av_icon='\ue881' data-av_iconfont='entypo-fontello' ><\/span><\/span><\/h5>\n<h4><span style=\"color: #107582;\">Challenge 1: \u201cestablished devices: Pushing the limits\u201d<\/span><\/h4>\n<p><strong>IEMN has a strong basis in design and fabrication of electronics devices based on III-V compound semiconductors. These devices are dedicated to improve the performances of the telecommunications systems in terms of energy efficiency, operation frequency or available power. In this context, IEMN is developping original ideas in order:<\/strong><\/p>\n<ol>\n<li>to obtain InP\/InGaAs HEMT and DHBT transistors with cut-off frequency beyond 1 THz for UHD telecom systems (low-noise and power amplifiers) but also InP UTC Photodiodes with improved efficiency and frequency limits for 1550 nm optical telecom systems and optical to THz telecom conversion.<\/li>\n<li>to improve the performances (efficiency, conversion loss, frequency band, etc) and the technology maturity (reaching TRL 5) of LTG-GaAs ultrafast optoelectronics devices for laser-based generation and detection of millimetre and THz waves. In this latter case, it covers the field of spectrum analysis for the characterization of THz devices and systems and the analog-to-digital conversion of millimetre waves.<\/li>\n<li>to develop AlGaN\/GaN transistors for high power amplifier working in the millimeter waves spectrum for telecommunications (civil and military). GaN based Schottky diodes will be also studied to replace GaAs Schottky diode in electronics multiplication based THz sources, which are mainly based on the generation of harmonics of a low frequency source.<\/li>\n<\/ol>\n<p><strong>IEMN pursues MEMS-NEMS technologies already validated at low TRL scales (0-3). The objectives are to establish a performance and industrial roadmap (TRL &gt;4 then TRL &gt;6). Several device families are envisaged:<\/strong><\/p>\n<ol>\n<li>Une premi\u00e8re cat\u00e9gorie comprend des capteurs de force MEMS\/NEMS pour l&rsquo;imagerie en champ proche ou l&rsquo;inertie. Ces dispositifs visent une fr\u00e9quence de fonctionnement de &gt;100 MHz combin\u00e9e \u00e0 une r\u00e9solution de &lt; 1fN\/Hz<sup>1\/2<\/sup><br \/>\nThey are either all-Si or Si+GaN based, where GaN heterostructures enable electromechanical transduction and Si is used for 3D patterning of moving parts. This approach aims to provide hardened sensors for industrial IoT ;<\/li>\n<li>sensors based on a glass\/silicon\/glass MEMS technology for instrumented opto-microfluidics cytometric systems. Here coupling 3D hydrodynamics, focusing and optical fiber access within the same chip will targets systems able to analyze and process in real time more than 6500 events per second.<\/li>\n<li>microbatteries and microsupercapacitors technologies that will be also at the basis of energy related applications.<\/li>\n<\/ol>\n<hr \/>\n<h4><span style=\"color: #107582;\">Challenge 2: emerging technologies: new materials &amp; physical concepts<\/span><\/h4>\n<p><strong>Besides the continuous improvement of these existing technologies, IEMN will also work on devices based on rising materials and technologies or using original physical effects.<\/strong><\/p>\n<ol>\n<li>IEMN investigates devices based on graphene-related-materials and two-dimensional metallic transitions materials (TMDC) for high-frequency electronics and optoelectronics applications. For example, we propose to study an ultrafast electronic switch overcoming the physical limits of the standard technologies by taking advantage of an ionic filament conduction mechanism observed in these materials.<\/li>\n<li>The combination of magnetoelastic materials together with electro-active ones such as piezoelectrics or ferroelectric relaxors results in artificial multiferroic or magnetoelectric composites. IEMN develops devices where the possible control of magnetization in an energy efficient fashion which can be applied to memories or magnetic domain wall control, and devices where the magnetoelastic coupling can also be exploited in Surface Acoustic Wave devices. This topic involves theoretical studies of multiphysic phenomena as well as technological efforts to deposit, pattern and integrate these non-standard materials on wafers.<\/li>\n<li>We also work on magneto-plasmonic effects to obtain efficient THz\/MIR isolators and Bio-sensors. In the former case, the idea consists in exploiting the magnetoplasmon cyclotron resonances in nanostructured low-effective mass materials (ex: InSb) to create non-reciprocal mirrors. In the second case the idea consists in using the non-reciprocal magneto-optical effects to design ultra-sensitive surface plasmon resonance sensors;<\/li>\n<li>In recent years, the rise of commercial QCL MIR lasers has opened up new possibilities in the MIR range (\u03bb~ 2 \u00b5m-10 \u00b5m). Based on IEMN's expertise in designing and fabricating ultrafast optoelectronic devices in the IR range, we are developing ultrafast photoconductors in the MIR range using plasmonic nano-antennas to collect MIR radiation and AlGaAs\/GaAs or InSb quantum well nanowires to perform the optoelectronic conversion.<\/li>\n<li>All optics ADC will also be studied by using a breakthrough concept in which an electro-optic polymer waveguide is combined with a microwave guide.<\/li>\n<li>We also plan to develop microsystems for high bandwidth bolometric detection of THz signals unlocking available detectors issues and able to work at room temperature, that will combine on chip silicon photonics to NEMS and microantennas.<\/li>\n<\/ol>\n<\/div><\/div><\/section>\n<section class='av_tab_section av_tab_section av-tuohii-dafb8e0faa736770447a1f56b2ff9c58'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div id='tab-id-2-tab' class='tab' role='tab' aria-selected=\"false\" tabindex=\"0\" data-fake-id='#tab-id-2' aria-controls='tab-id-2-content'  itemprop=\"headline\" ><span class='tab_icon' aria-hidden='true' data-av_icon='\ue82d' data-av_iconfont='entypo-fontello'><\/span>Key technology areas<\/div><div id='tab-id-2-content' class='tab_content' role='tabpanel' aria-labelledby='tab-id-2-tab' aria-hidden=\"true\"><div class='tab_inner_content invers-color'  itemprop=\"text\" ><h3 style=\"text-align: center;\"><strong>Challenge 1\/MEMS, Microsystems, bioMEMS: established devices<\/strong><\/h3>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge1-1.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-57381 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge1-1.jpg\" alt=\"\" width=\"1000\" height=\"583\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge1-1.jpg 1000w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge1-1-300x175.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge1-1-768x448.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge1-1-18x10.jpg 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge1-1-705x411.jpg 705w\" sizes=\"auto, (max-width: 1000px) 100vw, 1000px\" \/><\/a><\/p>\n<h3 style=\"text-align: center;\"><strong>Challenge 1\/Established technologies: III-V Opto &amp; Electron devices<\/strong><\/h3>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-57383 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2.jpg\" alt=\"\" width=\"1100\" height=\"593\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2.jpg 1100w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2-300x162.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2-1030x555.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2-768x414.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2-18x10.jpg 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge2-705x380.jpg 705w\" sizes=\"auto, (max-width: 1100px) 100vw, 1100px\" \/><\/a><\/p>\n<h3 style=\"text-align: center;\"><strong>Challenge 1\/MEMS, Microsystems, bioMEMS: established devices<\/strong><\/h3>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge3.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-57385 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge3.jpg\" alt=\"\" width=\"900\" height=\"788\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge3.jpg 900w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge3-300x263.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge3-768x672.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge3-14x12.jpg 14w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge3-705x617.jpg 705w\" sizes=\"auto, (max-width: 900px) 100vw, 900px\" \/><\/a><\/p>\n<h3 style=\"text-align: center;\"><strong>Challenge 2\/Emerging technologies: 1D&amp;2D structures for Physics and RF applications<\/strong><\/h3>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-57386 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4.jpg\" alt=\"\" width=\"1100\" height=\"603\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4.jpg 1100w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4-300x164.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4-1030x565.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4-768x421.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4-18x10.jpg 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge4-705x386.jpg 705w\" sizes=\"auto, (max-width: 1100px) 100vw, 1100px\" \/><\/a><\/p>\n<h3 style=\"text-align: center;\"><strong>Challenge 2\/Microsystems: emerging \u00a0devices<\/strong><\/h3>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-57387 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5.jpg\" alt=\"\" width=\"1100\" height=\"626\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5.jpg 1100w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5-300x171.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5-1030x586.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5-768x437.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5-18x10.jpg 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge5-705x401.jpg 705w\" sizes=\"auto, (max-width: 1100px) 100vw, 1100px\" \/><\/a><\/p>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-57389 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6.jpg\" alt=\"\" width=\"1100\" height=\"639\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6.jpg 1100w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6-300x174.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6-1030x598.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6-768x446.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6-18x10.jpg 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge6-705x410.jpg 705w\" sizes=\"auto, (max-width: 1100px) 100vw, 1100px\" \/><\/a><\/p>\n<p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge_8.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter wp-image-57390 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge_8.jpg\" alt=\"\" width=\"850\" height=\"663\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge_8.jpg 850w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge_8-300x234.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge_8-768x599.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge_8-15x12.jpg 15w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2023\/04\/visuel_challenge_8-705x550.jpg 705w\" sizes=\"auto, (max-width: 850px) 100vw, 850px\" \/><\/a><\/p>\n<\/div><\/div><\/section>\n<section class='av_tab_section av_tab_section av-mp02wa-5720f7c8bcf590e663d4f6be99c034be'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div id='tab-id-3-tab' class='tab' role='tab' aria-selected=\"false\" tabindex=\"0\" data-fake-id='#tab-id-3' aria-controls='tab-id-3-content'  itemprop=\"headline\" ><span class='tab_icon' aria-hidden='true' data-av_icon='\ue810' data-av_iconfont='entypo-fontello'><\/span>Main equipment<\/div><div id='tab-id-3-content' class='tab_content' role='tabpanel' aria-labelledby='tab-id-3-tab' aria-hidden=\"true\"><div class='tab_inner_content invers-color'  itemprop=\"text\" ><p><strong><span style=\"color: #107582;\">A key aspect for device research is the starting material(s). For the III-V compounds, IEMN has the mastery of epitaxial growth of all structures excepted III-N materials.<\/span><\/strong><br \/>\nThis is made possible by in-house expertise in MBE. For III-N materials (GaN and related heterostructures), IEMN works in collaboration with CNRS-CRHEA and the european epitaxy company epigan nv. For the other devices, IEMN develops materials based on sputtering techniques or Atomic Layer Deposition (multiferroics, materials for supercapacitors and microbatteries). As far as concerned the 2D materials, IEMN has been developing CVD &amp; MBE techniques since several years which are now mature for graphene-related materials. In all these aspects, there will be a strong interaction with the material-oriented transverse project.<\/p>\n<p><strong><span style=\"color: #107582;\">IEMN legitimacy for conducting device research is also based on mastering the full \u2018design-fabrication-characterization\u2019 chain that permits reactivity. <\/span><\/strong><br \/>\nMoreover, updating its technology building blocks and creating new technological approaches is carried out. This includes novel process integration sequences: e-beam nanofabrication with ultimate dimensions, high AR etching,  that are dedicated to specific roadmaps or that support to combine photonic parts, RF\/THz antenna, electron devices. IEMN also explores non-standard fabrication techniques (laser structuration, ink based patterning) and non-standard materials (polymers, bio-sourced materials). This approach can be combined to cleanroom batch fabrication or enable advanced back-end (hybrid packaging schemes) that are required to demonstrate functional devices.<\/p>\n<p><a href=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/\" target=\"_blank\" rel=\"noopener\">Discover the Central Micro Nano Fabrication Platform (CMNF)<\/a><\/p>\n<\/div><\/div><\/section>\n<section class='av_tab_section av_tab_section av-n23m7e-0d93931625bb63d3a562a1baec831a17'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div id='tab-id-4-tab' class='tab' role='tab' aria-selected=\"false\" tabindex=\"0\" data-fake-id='#tab-id-4' aria-controls='tab-id-4-content'  itemprop=\"headline\" ><span class='tab_icon' aria-hidden='true' data-av_icon='\ue855' data-av_iconfont='entypo-fontello'><\/span>Equipement principal <\/div><div id='tab-id-4-content' class='tab_content' role='tabpanel' aria-labelledby='tab-id-4-tab' aria-hidden=\"true\"><div class='tab_inner_content invers-color'  itemprop=\"text\" ><p><a href=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/08\/methodologie_micro_nano_devices.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-54219 size-full\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/08\/methodologie_micro_nano_devices.jpg\" alt=\"\" width=\"947\" height=\"454\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/08\/methodologie_micro_nano_devices.jpg 947w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/08\/methodologie_micro_nano_devices-300x144.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/08\/methodologie_micro_nano_devices-768x368.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/08\/methodologie_micro_nano_devices-18x9.jpg 18w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2022\/08\/methodologie_micro_nano_devices-705x338.jpg 705w\" sizes=\"auto, (max-width: 947px) 100vw, 947px\" \/><\/a><\/p>\n<\/div><\/div><\/section>\n<section class='av_tab_section av_tab_section av-u1eone-622e4932a8467f52dfa187ba9d84abac'  itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div id='tab-id-5-tab' class='tab' role='tab' aria-selected=\"false\" tabindex=\"0\" data-fake-id='#tab-id-5' aria-controls='tab-id-5-content'  itemprop=\"headline\" ><span class='tab_icon' aria-hidden='true' data-av_icon='\ue84d' data-av_iconfont='entypo-fontello'><\/span>Scientific production<\/div><div id='tab-id-5-content' class='tab_content' role='tabpanel' aria-labelledby='tab-id-5-tab' aria-hidden=\"true\"><div class='tab_inner_content invers-color'  itemprop=\"text\" ><p><a href=\"https:\/\/haltools.archives-ouvertes.fr\/Public\/afficheRequetePubli.php?collection_exp=IEMN&amp;solrQuery=localReference_t%3A%22flagship_devices%22&amp;CB_auteur=oui&amp;CB_titre=oui&amp;CB_identifiant=oui&amp;CB_article=oui&amp;CB_vignette=oui&amp;langue=Anglais&amp;tri_exp=annee_publi&amp;tri_exp2=typdoc&amp;tri_exp3=date_publi&amp;ordre_aff=TA&amp;CB_rubriqueDiv=oui&amp;Fen=Aff&amp;css=..\/css\/VisuRubriqueEncadre.css\">Afficher la production scientifique du flagship devices dans un onglet<\/a><\/p>\n<p><a href=\"https:\/\/publis.iemn.fr\/#\/flagships\/devices\">Afficher la production scientifique du flagship devices dans IEMN-HAL<\/a><\/p>\n<\/div><\/div><\/section>\n<\/div><\/div>\n<div  class='flex_column av-kdpjd6-7a8e9aeed4bcdb02f52327c918830440 av_one_fourth  avia-builder-el-7  el_after_av_one_full  avia-builder-el-last  first flex_column_div  column-top-margin'     ><section  class='av_textblock_section av-kyln20de-e6bd8200e8a572cc7b9fb6f7a739338b'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><div style=\"display: flex; align-items: center;\">\n<h6 style=\"text-align: left; margin-right: 10px;\">Coordinators:<\/h6>\n<div style=\"margin-right: 10px;\"><a style=\"display: inline-block; padding: 5px 10px; background-color: #444444; color: #ffffff; text-decoration: none; border-radius: 10px;\" href=\"mailto:Emilien.Peytavit@iemn.fr\">mailto:Emilien.Peytavit@iemn.fr<\/a><\/div>\n<div style=\"margin-right: 10px;\"><a style=\"display: inline-block; padding: 5px 10px; background-color: #444444; color: #ffffff; text-decoration: none; border-radius: 10px;\" href=\"mailto:Marc.Faucher@iemn.fr\">Marc.Faucher@iemn.fr<\/a><\/div>\n<\/div>\n<\/div><\/section><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-50026","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/50026","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=50026"}],"version-history":[{"count":1,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/50026\/revisions"}],"predecessor-version":[{"id":73548,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/50026\/revisions\/73548"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=50026"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}