{"id":447,"date":"2012-05-10T11:52:47","date_gmt":"2012-05-10T09:52:47","guid":{"rendered":"https:\/\/www.iemn.fr\/?page_id=447"},"modified":"2024-11-15T15:30:50","modified_gmt":"2024-11-15T13:30:50","slug":"gravures","status":"publish","type":"page","link":"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures","title":{"rendered":"Engraving and implantation pole"},"content":{"rendered":"<div id='layer_slider_1'  class='avia-layerslider main_color avia-shadow  avia-builder-el-0  el_before_av_heading  avia-builder-el-first  container_wrap sidebar_right'  style='height: 261px;'  ><div id=\"layerslider_26_1gl5qtgl3mzkh\" data-ls-slug=\"homepageslider\" class=\"ls-wp-container fitvidsignore ls-selectable\" style=\"width:1140px;height:260px;margin:0 auto;margin-bottom: 0px;\"><div class=\"ls-slide\" data-ls=\"duration:6000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF2-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF3-1-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><div class=\"ls-slide\" data-ls=\"duration:4000;transition2d:5;\"><img loading=\"lazy\" decoding=\"async\" width=\"2600\" height=\"270\" src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg\" class=\"ls-bg\" alt=\"\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4.jpg 2600w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-300x31.jpg 300w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-768x80.jpg 768w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1030x107.jpg 1030w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-1500x156.jpg 1500w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/06\/Slider_CMNF4-705x73.jpg 705w\" sizes=\"auto, (max-width: 2600px) 100vw, 2600px\" \/><ls-layer style=\"font-size:14px;text-align:left;font-style:normal;text-decoration:none;text-transform:none;font-weight:700;letter-spacing:0px;background-position:0% 0%;background-repeat:no-repeat;mix-blend-mode:normal;top:231px;left:0px;height:30px;width:500px;line-height:32px;color:#ffffff;border-radius:6px 6px 6px 6px;padding-left:50px;background-color:rgba(0, 0, 0, 0.57);\" class=\"ls-l ls-ib-icon ls-text-layer\" data-ls=\"minfontsize:0;minmobilefontsize:0;\"><i class=\"fa fa-user-circle\" style=\"color:#f2f2f2;margin-right:0.8em;font-size:1em;transform:translateY( -0.125em );\"><\/i>PLATEFORME : CENTRALE DE MICRO NANO FABRICATION<\/ls-layer><\/div><\/div><\/div><div id='after_layer_slider_1'  class='main_color av_default_container_wrap container_wrap sidebar_right'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-small alpha units'><div class='post-entry post-entry-type-page post-entry-447'><div class='entry-content-wrapper clearfix'>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-b2b2v-dc14b5238e74369ab0a2a373751eb2f9\">\n#top .av-special-heading.av-b2b2v-dc14b5238e74369ab0a2a373751eb2f9{\npadding-bottom:30px;\n}\nbody .av-special-heading.av-b2b2v-dc14b5238e74369ab0a2a373751eb2f9 .av-special-heading-tag .heading-char{\nfont-size:25px;\n}\n.av-special-heading.av-b2b2v-dc14b5238e74369ab0a2a373751eb2f9 .av-subheading{\nfont-size:15px;\n}\n<\/style>\n<div  class='av-special-heading av-b2b2v-dc14b5238e74369ab0a2a373751eb2f9 av-special-heading-h1  avia-builder-el-1  el_after_av_layerslider  el_before_av_one_fifth  avia-builder-el-first'><h1 class='av-special-heading-tag'  itemprop=\"headline\"  >Engraving and Implantation Unit<\/h1><div class=\"special-heading-border\"><div class=\"special-heading-inner-border\"><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mn4hb-089ad027640d8002fb70ef4a33b739da\">\n.flex_column.av-mn4hb-089ad027640d8002fb70ef4a33b739da{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mn4hb-089ad027640d8002fb70ef4a33b739da av_one_fifth  avia-builder-el-2  el_after_av_heading  el_before_av_one_fifth  first flex_column_div av-zero-column-padding'     ><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-old13-5b9b7900d603418a455f8d5913237ce9\">\n.flex_column.av-old13-5b9b7900d603418a455f8d5913237ce9{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-old13-5b9b7900d603418a455f8d5913237ce9 av_one_fifth  avia-builder-el-3  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jlgjxm4m-6cda76e085faf8f8fdfcb21d5a3cc320\">\n.avia-image-container.av-jlgjxm4m-6cda76e085faf8f8fdfcb21d5a3cc320 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jlgjxm4m-6cda76e085faf8f8fdfcb21d5a3cc320 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jlgjxm4m-6cda76e085faf8f8fdfcb21d5a3cc320 av-styling- av-img-linked avia-align-center  avia-builder-el-4  el_before_av_textblock  avia-builder-el-first'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/plasmas\" class='avia_image'  aria-label='engraving'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-71473 avia-img-lazy-loading-not-71473 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png\" alt='' title='engraving'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-jlgjpmwc-c5a544f57a6dd7679c3bc8121f5e4b2a'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: center;\"><strong>Etching and plasma treatment<\/strong><\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-hre3b-3fbcb30faa77c3accb844369c34fa112\">\n.flex_column.av-hre3b-3fbcb30faa77c3accb844369c34fa112{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-hre3b-3fbcb30faa77c3accb844369c34fa112 av_one_fifth  avia-builder-el-6  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding avia-link-column av-column-link'    data-link-column-url=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/gravure-profonde-du-silicium\"   ><a class=\"av-screen-reader-only\" href=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/gravure-profonde-du-silicium\" >Link to: Gravure profonde du Silicium<\/a><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jlgjzcaz-779e71e7dc2e1eb3ef5d4b0ef8fdca12\">\n.avia-image-container.av-jlgjzcaz-779e71e7dc2e1eb3ef5d4b0ef8fdca12 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jlgjzcaz-779e71e7dc2e1eb3ef5d4b0ef8fdca12 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jlgjzcaz-779e71e7dc2e1eb3ef5d4b0ef8fdca12 av-styling- av-img-linked avia-align-center  avia-builder-el-7  el_before_av_textblock  avia-builder-el-first'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/en\/sous-menu-groupe\" class='avia_image'  aria-label='engraving'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-71473 avia-img-lazy-loading-not-71473 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png\" alt='' title='engraving'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-jlgjq8ix-e7250f5c4c8cfa5f4a8e09f76837e477'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: center;\"><strong>\u00a0Deep etching of silicon<\/strong><\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-q8jfj-8f563a5d298eb49bea4ea746efcd71e5\">\n.flex_column.av-q8jfj-8f563a5d298eb49bea4ea746efcd71e5{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-q8jfj-8f563a5d298eb49bea4ea746efcd71e5 av_one_fifth  avia-builder-el-9  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jlgjlbhn-da40889cee6bc281ac4433ad7645e807\">\n.avia-image-container.av-jlgjlbhn-da40889cee6bc281ac4433ad7645e807 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jlgjlbhn-da40889cee6bc281ac4433ad7645e807 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jlgjlbhn-da40889cee6bc281ac4433ad7645e807 av-styling- av-img-linked avia-align-center  avia-builder-el-10  el_before_av_textblock  avia-builder-el-first'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/gravure-chimique\" class='avia_image'  aria-label='engraving'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-71473 avia-img-lazy-loading-not-71473 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png\" alt='' title='engraving'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-jlgjm9tn-0a28581fdb0da623afb1a4221c4b9b97'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: center;\"><strong>Chemical vapor etching<\/strong><\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mn4hb-7-698dce37c1c5675290c006518ca3c65e\">\n.flex_column.av-mn4hb-7-698dce37c1c5675290c006518ca3c65e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mn4hb-7-698dce37c1c5675290c006518ca3c65e av_one_fifth  avia-builder-el-12  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding'     ><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mn4hb-6-b69d2fb7bf1135607d456d0e6757436e\">\n.flex_column.av-mn4hb-6-b69d2fb7bf1135607d456d0e6757436e{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mn4hb-6-b69d2fb7bf1135607d456d0e6757436e av_one_fifth  avia-builder-el-13  el_after_av_one_fifth  el_before_av_one_fifth  first flex_column_div av-zero-column-padding  column-top-margin'     ><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mn4hb-5-7d5d7aeda978742ece9480a616387406\">\n.flex_column.av-mn4hb-5-7d5d7aeda978742ece9480a616387406{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mn4hb-5-7d5d7aeda978742ece9480a616387406 av_one_fifth  avia-builder-el-14  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jlgk2cbz-32963f099a6347409c0146bf28e4be92\">\n.avia-image-container.av-jlgk2cbz-32963f099a6347409c0146bf28e4be92 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jlgk2cbz-32963f099a6347409c0146bf28e4be92 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jlgk2cbz-32963f099a6347409c0146bf28e4be92 av-styling- av-img-linked avia-align-center  avia-builder-el-15  el_before_av_textblock  avia-builder-el-first'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/ribe\" class='avia_image'  aria-label='engraving'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-71473 avia-img-lazy-loading-not-71473 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png\" alt='' title='engraving'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-ld3uf-dc3cf96e8a95523322c871a4497b59ab'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: center;\"><strong>Ion beam etching<\/strong><\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mn4hb-4-52f5355710513d4ef2dc31680a75f4db\">\n.flex_column.av-mn4hb-4-52f5355710513d4ef2dc31680a75f4db{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mn4hb-4-52f5355710513d4ef2dc31680a75f4db av_one_fifth  avia-builder-el-17  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jlgk2cbz-3-f8845e79e0f28dbded99f0270036af53\">\n.avia-image-container.av-jlgk2cbz-3-f8845e79e0f28dbded99f0270036af53 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jlgk2cbz-3-f8845e79e0f28dbded99f0270036af53 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jlgk2cbz-3-f8845e79e0f28dbded99f0270036af53 av-styling- av-img-linked avia-align-center  avia-builder-el-18  el_before_av_textblock  avia-builder-el-first'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/traitements-thermiques-et-implantation-ionique\" class='avia_image'  aria-label='engraving'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-71473 avia-img-lazy-loading-not-71473 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png\" alt='' title='engraving'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-ld3uf-2-26934368fcd59e7da00edd719ce8a668'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: center;\"><strong>Ion implantation<\/strong><\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-fgcw7-3aa4fdd08b681102afeefa15ad59b994\">\n.flex_column.av-fgcw7-3aa4fdd08b681102afeefa15ad59b994{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-fgcw7-3aa4fdd08b681102afeefa15ad59b994 av_one_fifth  avia-builder-el-20  el_after_av_one_fifth  el_before_av_one_fifth  flex_column_div av-zero-column-padding  column-top-margin'     ><p>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jlgkl0nh-96358fd481142211e4e1fa5b2505731e\">\n.avia-image-container.av-jlgkl0nh-96358fd481142211e4e1fa5b2505731e img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jlgkl0nh-96358fd481142211e4e1fa5b2505731e .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jlgkl0nh-96358fd481142211e4e1fa5b2505731e av-styling- av-img-linked avia-align-center  avia-builder-el-21  el_before_av_textblock  avia-builder-el-first'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><a href=\"https:\/\/www.iemn.fr\/en\/les_plateformes\/cmnf\/gravures\/gravure-humide\" class='avia_image'  aria-label='engraving'><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-71473 avia-img-lazy-loading-not-71473 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png\" alt='' title='engraving'  height=\"80\" width=\"80\"  itemprop=\"thumbnailUrl\" srcset=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--80x80.png 80w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--12x12.png 12w, https:\/\/www.iemn.fr\/wp-content\/uploads\/2024\/11\/gravure--36x36.png 36w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/a><\/div><\/div><\/div><br \/>\n<section  class='av_textblock_section av-jj4c9s5y-8f6481535f9c5e794ba3f2eb8d1146d2'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: center;\"><strong>Wet etching and chemical surface preparation<\/strong><\/p>\n<\/div><\/section><\/p><\/div>\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-mn4hb-1-4c0096b593786a6b23a142dbdc8f6485\">\n.flex_column.av-mn4hb-1-4c0096b593786a6b23a142dbdc8f6485{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-mn4hb-1-4c0096b593786a6b23a142dbdc8f6485 av_one_fifth  avia-builder-el-23  el_after_av_one_fifth  el_before_av_one_full  flex_column_div av-zero-column-padding  column-top-margin'     ><\/div><\/p>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-7e97z-b0626a8be9fefff3c9b9519a243b6146\">\n.flex_column.av-7e97z-b0626a8be9fefff3c9b9519a243b6146{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-7e97z-b0626a8be9fefff3c9b9519a243b6146 av_one_full  avia-builder-el-24  el_after_av_one_fifth  el_before_av_one_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-wmtjz-1c5275d8296abb3f9e77e5e2b900535f'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><p style=\"text-align: justify;\">With 10 plasma etching reactors (ICP-RIE, RIE, DRIE, IBE) and 2 dry chemical etching reactors (HF vapour and XeF2), the <em>Engraving<\/em> is a major piece of equipment at the Micro Nano Fabrication plant. Wet chemical etching of a wide range of materials is also carried out here. The division's expertise extends to the etching of various families of materials: Si, III-V, insulators (Si<sub>x<\/sub>N<sub>y<\/sub>SiO<sub>2<\/sub>), various alloys (Al<sub>2<\/sub>O<sub>3<\/sub>TiN, VN) and metals (Au, Pt). A significant part of the activity is dedicated to the deep etching of Si for the production of MEMS components, microstructures for energy storage and RF\/THz components.<\/p>\n<\/div><\/section><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-evqlz-c8fe27fba2abebdfa474b5823cd08e8f\">\n.flex_column.av-evqlz-c8fe27fba2abebdfa474b5823cd08e8f{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-evqlz-c8fe27fba2abebdfa474b5823cd08e8f av_one_third  avia-builder-el-26  el_after_av_one_full  el_before_av_one_third  first flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jjpf3mtd-d7caf9c2b743357a6fdc8df7ff24ad82\">\n.avia-image-container.av-jjpf3mtd-d7caf9c2b743357a6fdc8df7ff24ad82 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jjpf3mtd-d7caf9c2b743357a6fdc8df7ff24ad82 .av-caption-image-overlay-bg{\nopacity:0.4;\nbackground-color:#000000;\n}\n.avia-image-container.av-jjpf3mtd-d7caf9c2b743357a6fdc8df7ff24ad82 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jjpf3mtd-d7caf9c2b743357a6fdc8df7ff24ad82 av-styling- avia-align-center  avia-builder-el-27  avia-builder-el-no-sibling  noHover av-overlay-on-hover'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><div class=\"av-image-caption-overlay\"><div class=\"av-caption-image-overlay-bg\"><\/div><div class=\"av-image-caption-overlay-position\"><div class=\"av-image-caption-overlay-center\"><p>Dry engravings : Plasmas<\/p>\n<\/div><\/div><\/div><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19576 avia-img-lazy-loading-not-19576 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/07\/gravure_plasmas.jpg\" alt='' title='plasma_engraving'  height=\"100\" width=\"300\"  itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-ahawn-c1f37032c635ff5ea5612b9b36159a5d\">\n.flex_column.av-ahawn-c1f37032c635ff5ea5612b9b36159a5d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-ahawn-c1f37032c635ff5ea5612b9b36159a5d av_one_third  avia-builder-el-28  el_after_av_one_third  el_before_av_one_third  flex_column_div av-zero-column-padding  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-jjpezzgw-01e9369413e76de35c5b0dcaa04a0376\">\n.avia-image-container.av-jjpezzgw-01e9369413e76de35c5b0dcaa04a0376 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-jjpezzgw-01e9369413e76de35c5b0dcaa04a0376 .av-caption-image-overlay-bg{\nopacity:0.4;\nbackground-color:#000000;\n}\n.avia-image-container.av-jjpezzgw-01e9369413e76de35c5b0dcaa04a0376 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-jjpezzgw-01e9369413e76de35c5b0dcaa04a0376 av-styling- avia-align-center  avia-builder-el-29  avia-builder-el-no-sibling  noHover av-overlay-on-hover'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><div class=\"av-image-caption-overlay\"><div class=\"av-caption-image-overlay-bg\"><\/div><div class=\"av-image-caption-overlay-position\"><div class=\"av-image-caption-overlay-center\"><p>Wet etching: Chemistry<\/p>\n<\/div><\/div><\/div><img decoding=\"async\" fetchpriority=\"high\" class='wp-image-19577 avia-img-lazy-loading-not-19577 avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2018\/07\/gravures_humides.jpg\" alt='' title='wet_engravings'  height=\"100\" width=\"300\"  itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1f7473-dd9f77331b78da5210568f4d0b22bc5c\">\n.flex_column.av-1f7473-dd9f77331b78da5210568f4d0b22bc5c{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 20px;\n}\n<\/style>\n<div  class='flex_column av-1f7473-dd9f77331b78da5210568f4d0b22bc5c av_one_third  avia-builder-el-30  el_after_av_one_third  el_before_av_two_fifth  flex_column_div  column-top-margin'     ><style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-1797rb-c63c75dd407ccc6a281521ca42ee3fa4\">\n.avia-image-container.av-1797rb-c63c75dd407ccc6a281521ca42ee3fa4 img.avia_image{\nbox-shadow:none;\n}\n.avia-image-container.av-1797rb-c63c75dd407ccc6a281521ca42ee3fa4 .av-image-caption-overlay-center{\ncolor:#ffffff;\n}\n<\/style>\n<div  class='avia-image-container av-1797rb-c63c75dd407ccc6a281521ca42ee3fa4 av-styling- av-hover-grow avia-align-center  avia-builder-el-31  avia-builder-el-no-sibling'   itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><div class=\"avia-image-container-inner\"><div class=\"avia-image-overlay-wrap\"><img decoding=\"async\" fetchpriority=\"high\" class='wp-image- avia-img-lazy-loading-not- avia_image' src=\"https:\/\/www.iemn.fr\/wp-content\/uploads\/2012\/05\/HF-vapeur-300x161.png\" alt='' title=''   itemprop=\"thumbnailUrl\"  \/><\/div><\/div><\/div><\/div>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-uzuu8y-db5415fe4b3c63ad0d97061393624c4d\">\n.flex_column.av-uzuu8y-db5415fe4b3c63ad0d97061393624c4d{\nborder-radius:0px 0px 0px 0px;\npadding:0px 0px 0px 0px;\n}\n<\/style>\n<div  class='flex_column av-uzuu8y-db5415fe4b3c63ad0d97061393624c4d av_two_fifth  avia-builder-el-32  el_after_av_one_third  avia-builder-el-last  first flex_column_div av-zero-column-padding  column-top-margin'     ><section  class='av_textblock_section av-z8by9u-a58abc707c04210520013fe71582cb7b'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p><strong>Contact:<br \/>\n<\/strong><\/p>\n<p><strong>Dmitri Yarekha<\/strong>Head of Engraving Division<\/p>\n<p><a href=\"mailto:dmitri.yarekha@univ-lille.fr\" target=\"_blank\" rel=\"noopener\">dmitri.yarekha@univ-lille.fr<\/a><\/p>\n<p>Timothey Bertrand, Laurent Fug\u00e8re, Jean Houpin, David Troadec, Gisuseppe Di Gioia<\/p>\n<\/blockquote>\n<\/div><\/section><br \/>\n<section  class='av_textblock_section av-lxndwltr-2e037bd4992faff3c62ff0a951919dd3'   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/CreativeWork\" ><div class='avia_textblock'  itemprop=\"text\" ><blockquote>\n<p><a class=\"moz-txt-link-abbreviated\" href=\"mailto:gravure@iemn.fr\">gravure@iemn.fr<\/a><\/p>\n<p><a class=\"moz-txt-link-abbreviated\" href=\"mailto:implantation@iemn.fr\">implantation@iemn.fr<\/a><\/p>\n<p><a class=\"moz-txt-link-abbreviated\" href=\"mailto:fib@iemn.fr\">fib@iemn.fr<\/a><\/p>\n<\/blockquote>\n<\/div><\/section><\/p><\/div>","protected":false},"excerpt":{"rendered":"","protected":false},"author":2,"featured_media":0,"parent":9351,"menu_order":15,"comment_status":"closed","ping_status":"open","template":"","meta":{"footnotes":""},"class_list":["post-447","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/comments?post=447"}],"version-history":[{"count":1,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447\/revisions"}],"predecessor-version":[{"id":73554,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/447\/revisions\/73554"}],"up":[{"embeddable":true,"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/pages\/9351"}],"wp:attachment":[{"href":"https:\/\/www.iemn.fr\/en\/wp-json\/wp\/v2\/media?parent=447"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}